[Scan]
initial_time=2016-01-28T15:58:50
final_time=2016-01-28T15:59:10
ip_count=19
run=1026
dataset=1
scan=38
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.8339E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.41425E-10
ql2_vset=
ql2_vmon=-1.35899E-3
ql2_imon=1.2163E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.38329E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.43747E-8
mult1=-9.3473E-9
mult2=-2.73951E-9
rf_tmon=-5.18358E-3
rf_agc=3.29547E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.57089E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66645E0
bslens_imon=2.2371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20012E1
lens5a_imon=1.99441E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5408E1
cs_ef1b_imon=3.12929E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02249E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05046E1
cs_ea1_imon=1.24844E-5
lens1_vset=-2.7E0
lens1_vmon=-3.11247E0
lens1_imon=1.40392E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64811E1
os_ef1alow_imon=2.94441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03483E1
cs_ea2_imon=1.41391E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83786E1
cs_ef1a_imon=2.98333E-5
olens2_vset=0.0E0
olens2_vmon=9.29832E-4
olens2_imon=1.02143E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11455E1
os_restr1_imon=4.35901E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15579E1
os_ea1_imon=2.42267E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64102E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24172E0
cs_ionrep_imon=9.76294E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.9335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01288E1
cs_anode1_imon=2.01431E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.45594E-9
tplens_vset=0.0E0
tplens_vmon=-1.59342E0
tplens_imon=-1.68991E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00394E1
iondef3_imon=8.77403E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98365E1
iondef2_imon=9.3814E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98439E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=8.62217E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27416E0
ionrepsh_imon=9.35025E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33613E1
lens5b_imon=2.17E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74582E1
cs_ef2b_imon=3.14105E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26897E0
os_ea2_imon=-7.0238E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71717E1
cs_ef2a_imon=3.19011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06942E0
os_ef2alow_imon=-2.9389E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67691E-1
os_ef2bup_imon=-5.69594E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11103E1
os_restr2_imon=3.34823E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29383E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01883E1
cs_anode2_imon=2.06459E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57943E1
iondef1_imon=5.09092E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50107E1
iondef4_imon=5.30787E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.68708E-8
olens1_vset=0.0E0
olens1_vmon=1.26362E-3
olens1_imon=1.23042E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13149E0
cs_ionaccel_imon=-1.45092E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02016E2
cs_ionfocb_imon=1.47028E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56236E1
einzel_imon=7.98382E-6
window_vset=0.0E0
window_vmon=1.38431E-1
window_imon=-1.31712E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82537E2
mask1_imon=2.38748E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-3.15668E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=8.0304E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.58597E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=6.99867E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43272E0
defgridb_imon=6.11098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33185E1
os_fil1_imon=9.36872E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07782E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60923E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30472E1
cs_fil1_imon=9.21817E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31019E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62315E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48385E-2
os_fil2_imon=-3.08718E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81872E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.72282E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.2425E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.38889E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21336E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3023E-3
inlet_lpb_pmon=2.16956E-2
chamber_ion_pmon=2.15919E-9
chamber_cvt_pmon=2.5165E-3
foreline_cvt_pmon=2.5165E-3
chamber_tmon=1.40042E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.71776E-1
res40_imon=-2.95918E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.62E2	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80023E1	-1.26362E-3	-8.8E1	2.86102E-4	5.26905E-3	9.34601E-2	1.58138E1	-1.98558E1	-1.99709E1	1.49906E1	2.15762E-9	2.51321E-3	2.51321E-3	6.31925E-3	2.17398E-2
2.0E0	1.57E2	0.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80024E1	-1.28746E-3	-8.80002E1	7.15256E-5	5.24521E-3	9.35078E-2	1.58178E1	-1.98528E1	-1.99951E1	1.50085E1	2.15533E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.16806E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80023E1	-1.07288E-3	-8.80004E1	3.09944E-4	5.14984E-3	9.3317E-2	1.58475E1	-1.98428E1	-1.98544E1	1.50161E1	2.15685E-9	2.52521E-3	2.52521E-3	6.33592E-3	2.17422E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80024E1	-1.19209E-3	-8.80004E1	3.09944E-4	5.36442E-3	9.30786E-2	1.57414E1	-1.98416E1	-2.00436E1	1.5016E1	2.15546E-9	2.52131E-3	2.52131E-3	6.3074E-3	2.16374E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80023E1	-1.04904E-3	-8.80002E1	3.33786E-4	5.07832E-3	9.33886E-2	1.58594E1	-1.98428E1	-2.00291E1	1.50136E1	2.15314E-9	2.51581E-3	2.51581E-3	6.32418E-3	2.17722E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80023E1	-1.09673E-3	-8.80001E1	2.6226E-4	5.03063E-3	9.32932E-2	1.57672E1	-1.98281E1	-1.98251E1	1.50154E1	2.15897E-9	2.51755E-3	2.51755E-3	6.31827E-3	2.16189E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80025E1	-9.29832E-4	-8.80003E1	2.38419E-4	5.03063E-3	9.32455E-2	1.58056E1	-1.98517E1	-2.00729E1	1.50142E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80023E1	-7.62939E-4	-8.8E1	2.86102E-4	4.88758E-3	9.31501E-2	1.57938E1	-1.98588E1	-1.98771E1	1.50074E1	2.15992E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.17918E-2
1.2E1	7.0E0	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80024E1	-7.39098E-4	-8.80001E1	7.15256E-5	5.43594E-3	9.32932E-2	1.58227E1	-1.98422E1	-1.99576E1	1.50262E1	2.15533E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.18104E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80023E1	-8.82149E-4	-8.80001E1	2.38419E-5	5.03063E-3	9.31263E-2	1.58251E1	-1.98356E1	-1.99792E1	1.50046E1	2.158E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.17255E-2
1.4E1	7.0E0	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80025E1	-7.62939E-4	-8.8E1	-2.38419E-4	5.19753E-3	9.33647E-2	1.5711E1	-1.98651E1	-2.00069E1	1.5007E1	2.15332E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.17255E-2
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80025E1	-1.09673E-3	-8.8E1	-1.19209E-4	4.8399E-3	9.30071E-2	1.58156E1	-1.98428E1	-1.98942E1	1.50136E1	2.15425E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.16125E-2
1.6E1	1.5E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80023E1	-8.58307E-4	-8.80003E1	1.19209E-4	4.91142E-3	9.34124E-2	1.5832E1	-1.98569E1	-2.00785E1	1.5013E1	2.15808E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.15699E-2
1.7E1	4.8E1	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80026E1	-1.14441E-3	-8.80003E1	-7.15256E-5	4.86374E-3	9.34601E-2	1.57743E1	-1.98788E1	-1.98753E1	1.50244E1	2.15706E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.17066E-2
1.8E1	1.86E2	3.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80025E1	-1.23978E-3	-8.80005E1	1.90735E-4	5.03063E-3	9.33886E-2	1.58044E1	-1.98575E1	-2.00314E1	1.49968E1	2.158E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.17255E-2
1.9E1	3.08E2	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80024E1	-1.52588E-3	-8.80002E1	1.66893E-4	4.93526E-3	9.32932E-2	1.5808E1	-1.98792E1	-1.99217E1	1.50022E1	2.15613E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.15938E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80021E1	-1.21593E-3	-8.80002E1	7.15256E-5	5.03063E-3	9.32932E-2	1.57842E1	-1.98655E1	-1.99922E1	1.50309E1	2.15832E-9	2.52466E-3	2.52466E-3	6.3074E-3	2.1678E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80021E1	-9.77516E-4	-8.80003E1	-3.09944E-4	5.10216E-3	9.3317E-2	1.57997E1	-1.98924E1	-2.00163E1	1.49976E1	2.15685E-9	2.51498E-3	2.51498E-3	6.3074E-3	2.16443E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80023E1	-9.53674E-4	-8.80003E1	1.43051E-4	4.91142E-3	9.35078E-2	1.58431E1	-2.00017E1	-1.99464E1	1.49815E1	2.15624E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.17361E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80025E1	-1.35899E-3	-8.80004E1	1.90735E-4	4.76837E-3	9.33409E-2	1.57943E1	-1.98365E1	-2.00394E1	1.50107E1	2.15919E-9	2.5165E-3	2.5165E-3	6.3023E-3	2.16956E-2
