[Scan]
initial_time=2016-01-28T15:59:17
final_time=2016-01-28T15:59:36
ip_count=19
run=1026
dataset=1
scan=39
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.87964E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.52261E-10
ql2_vset=
ql2_vmon=-1.00136E-3
ql2_imon=1.24992E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.44794E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.43062E-8
mult1=-9.66815E-9
mult2=-2.75454E-9
rf_tmon=-3.59316E-3
rf_agc=3.40365E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=6.19042E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62994E0
bslens_imon=2.44021E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19958E1
lens5a_imon=1.97399E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05309E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53748E1
cs_ef1b_imon=3.10379E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04657E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04584E1
cs_ea1_imon=1.24674E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05981E0
lens1_imon=1.22079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03709E1
cs_ea2_imon=1.42378E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=3.00108E-5
olens2_vset=0.0E0
olens2_vmon=8.82149E-4
olens2_imon=1.02237E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11093E1
os_restr1_imon=4.30824E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15563E1
os_ea1_imon=2.41071E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2472E0
cs_ionrep_imon=9.74576E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91851E2
cs_nozzle_imon=1.93321E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=2.03161E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=4.38378E-9
tplens_vset=0.0E0
tplens_vmon=-1.63409E0
tplens_imon=-1.93306E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00447E1
iondef3_imon=8.57408E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98723E1
iondef2_imon=9.44457E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98375E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=7.46083E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26373E0
ionrepsh_imon=9.49232E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33786E1
lens5b_imon=2.16866E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21598E0
os_ea2_imon=-5.31219E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06064E2
lens4b_imon=2.00476E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09901E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49972E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.35211E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.32132E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.09288E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58323E1
iondef1_imon=5.02599E-6
iondef4_vset=1.53E1
iondef4_vmon=1.499E1
iondef4_imon=5.26597E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=2.67188E-8
olens1_vset=0.0E0
olens1_vmon=1.38283E-3
olens1_imon=1.22738E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-1.08061E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47075E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=7.59414E-6
window_vset=0.0E0
window_vmon=1.63884E-1
window_imon=-9.11223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.38962E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92598E3
multa_neg_imon=7.42811E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=7.06449E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.38771E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36984E0
defgridb_imon=5.92219E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33202E1
os_fil1_imon=9.4224E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07215E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60329E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30522E1
cs_fil1_imon=9.224E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30403E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62335E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.59423E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.14607E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.34762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21407E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.15515E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21761E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.31E2	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80023E1	-1.23978E-3	-8.80004E1	7.15256E-5	5.07832E-3	9.3317E-2	1.58133E1	-1.98539E1	-1.99738E1	1.49993E1	2.15238E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.16501E-2
2.0E0	1.67E2	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80025E1	-1.28746E-3	-8.80005E1	-3.09944E-4	4.88758E-3	9.31025E-2	1.58081E1	-1.98428E1	-2.00345E1	1.50253E1	2.16085E-9	2.52061E-3	2.52061E-3	6.29128E-3	2.17732E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80026E1	-9.05991E-4	-8.80003E1	-2.38419E-5	4.91142E-3	9.33647E-2	1.57932E1	-1.98582E1	-2.00357E1	1.50271E1	2.15409E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.17145E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80026E1	-1.14441E-3	-8.80006E1	-4.29153E-4	5.14984E-3	9.36985E-2	1.58056E1	-1.98387E1	-1.99419E1	1.49992E1	2.15455E-9	2.52236E-3	2.52236E-3	6.32858E-3	2.16555E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80027E1	-1.40667E-3	-8.80003E1	-1.19209E-4	4.86374E-3	9.3174E-2	1.58269E1	-1.98374E1	-1.99137E1	1.49987E1	2.158E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.16313E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80025E1	-1.3113E-3	-8.80003E1	-2.14577E-4	5.26905E-3	9.32455E-2	1.57778E1	-1.98511E1	-2.00186E1	1.50316E1	2.15992E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.17547E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80025E1	-1.28746E-3	-8.8E1	-1.43051E-4	5.36442E-3	9.32932E-2	1.57933E1	-1.98224E1	-2.00057E1	1.50178E1	2.15987E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.15938E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80025E1	-9.29832E-4	-8.80004E1	9.53674E-5	5.22137E-3	9.31978E-2	1.58023E1	-1.98771E1	-1.98987E1	1.50058E1	2.158E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.17255E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80025E1	-9.77516E-4	-8.80003E1	1.90735E-4	5.34058E-3	9.33886E-2	1.58305E1	-1.98633E1	-2.00255E1	1.50106E1	2.15894E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.17255E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80024E1	-1.14441E-3	-8.80002E1	1.66893E-4	4.98295E-3	9.34124E-2	1.57873E1	-1.98477E1	-1.99598E1	1.49746E1	2.15706E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.16689E-2
1.4E1	1.4E1	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80028E1	-1.09673E-3	-8.80003E1	1.43051E-4	5.26905E-3	9.35555E-2	1.57985E1	-1.98493E1	-1.9952E1	1.49896E1	2.158E-9	2.52209E-3	2.52209E-3	6.35692E-3	2.16125E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80029E1	-1.09673E-3	-8.80002E1	-2.38419E-5	5.4121E-3	9.35555E-2	1.58362E1	-1.98452E1	-1.99591E1	1.5016E1	2.15349E-9	2.51954E-3	2.51954E-3	6.29128E-3	2.17176E-2
1.6E1	2.1E1	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80027E1	-1.21593E-3	-8.80003E1	2.14577E-4	4.88758E-3	9.32217E-2	1.57891E1	-1.98464E1	-1.98741E1	1.50088E1	2.15706E-9	2.52757E-3	2.52757E-3	6.32936E-3	2.1839E-2
1.7E1	4.6E1	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80026E1	-1.45435E-3	-8.80003E1	0.0E0	5.43594E-3	9.34839E-2	1.58227E1	-1.98813E1	-2.00688E1	1.50039E1	2.15613E-9	2.5188E-3	2.5188E-3	6.34588E-3	2.16501E-2
1.8E1	1.62E2	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80026E1	-1.33514E-3	-8.80004E1	-2.38419E-4	5.24521E-3	9.37939E-2	1.57674E1	-1.98795E1	-1.98549E1	1.50112E1	2.15441E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.15883E-2
1.9E1	3.16E2	1.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80029E1	-1.28746E-3	-8.80003E1	-2.14577E-4	5.24521E-3	9.36508E-2	1.58107E1	-1.98651E1	-1.99137E1	1.50118E1	2.15706E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.16313E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80025E1	-1.26362E-3	-8.80005E1	-9.53674E-5	5.14984E-3	9.34601E-2	1.58305E1	-1.98723E1	-2.00946E1	1.50334E1	2.15332E-9	2.52757E-3	2.52757E-3	6.32936E-3	2.17444E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.44059E-2	-8.80025E1	-8.10623E-4	-8.8E1	2.38419E-4	5.48363E-3	9.33409E-2	1.58126E1	-1.98116E1	-1.98989E1	1.49986E1	2.15894E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.16878E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80025E1	-1.0252E-3	-8.80001E1	-4.76837E-5	5.31673E-3	9.377E-2	1.57684E1	-1.988E1	-2.01514E1	1.50238E1	2.158E-9	2.52977E-3	2.52977E-3	6.29098E-3	2.16125E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80025E1	-1.00136E-3	-8.80003E1	-4.76837E-5	4.88758E-3	9.37223E-2	1.58323E1	-1.98723E1	-2.00447E1	1.499E1	2.15716E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.15515E-2
