[Scan]
initial_time=2016-01-28T16:00:37
final_time=2016-01-28T16:00:56
ip_count=19
run=1026
dataset=1
scan=42
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.49466E-2
qbias_imon=-3.82983E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.62298E-10
ql2_vset=
ql2_vmon=-1.19209E-3
ql2_imon=1.21362E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.43075E-9
ql4_vset=
ql4_vmon=-2.38419E-4
ql4_imon=1.42888E-8
mult1=-9.00909E-9
mult2=-2.48194E-9
rf_tmon=-6.71927E-3
rf_agc=3.14429E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=6.03795E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.62427E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19779E1
lens5a_imon=1.97154E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.09298E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.01973E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05186E1
cs_ea1_imon=1.25199E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06839E0
lens1_imon=1.50674E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.96973E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.42791E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.98666E-5
olens2_vset=0.0E0
olens2_vmon=1.14441E-3
olens2_imon=1.02314E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11171E1
os_restr1_imon=4.31617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15498E1
os_ea1_imon=2.41567E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63876E1
os_ef1bup_imon=3.06703E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26231E0
cs_ionrep_imon=9.67196E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01605E1
cs_anode1_imon=2.04747E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.39926E-9
tplens_vset=0.0E0
tplens_vmon=-1.6192E0
tplens_imon=-2.52482E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00387E1
iondef3_imon=8.6121E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98533E1
iondef2_imon=9.30786E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98432E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=8.24583E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=9.24297E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33922E1
lens5b_imon=2.18134E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23588E0
os_ea2_imon=-8.25669E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0924E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70394E-1
os_ef2bup_imon=-5.48466E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.36616E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.28666E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.09757E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5786E1
iondef1_imon=5.09006E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50184E1
iondef4_imon=5.13984E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.67802E-8
olens1_vset=0.0E0
olens1_vmon=1.14441E-3
olens1_imon=1.23239E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-1.17431E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.6929E-1
window_imon=-1.06619E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.38972E-4
mask2_vset=0.0E0
mask2_vmon=-1.86188E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=7.06918E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93675E3
defgrida_imon=6.48878E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50076E3
multb_neg_imon=6.75194E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3354E0
defgridb_imon=6.04898E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33191E1
os_fil1_imon=9.4015E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06987E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61135E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30508E1
cs_fil1_imon=9.22166E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29863E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62888E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43484E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.73318E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.68882E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21439E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.16806E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.05833E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.16E2	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80025E1	-1.23978E-3	-8.8E1	-1.90735E-4	5.29289E-3	9.35555E-2	1.58215E1	-1.9833E1	-1.9939E1	1.50109E1	2.15808E-9	2.51096E-3	2.51096E-3	6.3074E-3	2.1829E-2
2.0E0	1.59E2	0.0E0	3.16E2	1.6E2	-7.40967E-2	-8.80026E1	-1.3113E-3	-8.80004E1	-1.43051E-4	5.22137E-3	9.35555E-2	1.57622E1	-1.98649E1	-1.98135E1	1.49966E1	2.15257E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.16806E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.47149E-2	-8.80026E1	-9.05991E-4	-8.80003E1	2.38419E-5	5.03063E-3	9.34839E-2	1.58333E1	-1.98564E1	-1.99697E1	1.49842E1	2.15696E-9	2.5225E-3	2.5225E-3	6.32978E-3	2.16569E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.51788E-2	-8.8003E1	-9.29832E-4	-8.79999E1	-4.76837E-5	5.4121E-3	9.32455E-2	1.57891E1	-1.9847E1	-2.00039E1	1.50232E1	2.15726E-9	2.52871E-3	2.52871E-3	6.29684E-3	2.16374E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.51788E-2	-8.80027E1	-1.12057E-3	-8.8E1	-2.6226E-4	5.19753E-3	9.33409E-2	1.577E1	-1.98623E1	-1.98699E1	1.50021E1	2.15894E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.17255E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.54105E-2	-8.80027E1	-9.53674E-4	-8.80003E1	0.0E0	5.74589E-3	9.34601E-2	1.58428E1	-1.98489E1	-2.00672E1	1.50032E1	2.15754E-9	2.52826E-3	2.52826E-3	6.3275E-3	2.17925E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80027E1	-1.04904E-3	-8.80004E1	1.19209E-4	5.38826E-3	9.34839E-2	1.58015E1	-1.98526E1	-1.9911E1	1.50503E1	2.15847E-9	2.51694E-3	2.51694E-3	6.31727E-3	2.17671E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.43285E-2	-8.80027E1	-1.23978E-3	-8.80004E1	3.57628E-4	5.10216E-3	9.36508E-2	1.5786E1	-1.98647E1	-2.00119E1	1.50094E1	2.1556E-9	2.52147E-3	2.52147E-3	6.31332E-3	2.18216E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.44059E-2	-8.80024E1	-1.33514E-3	-8.80004E1	7.15256E-5	5.07832E-3	9.3627E-2	1.57668E1	-1.98693E1	-2.00772E1	1.50207E1	2.15574E-9	2.52106E-3	2.52106E-3	6.3074E-3	2.17911E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80024E1	-1.3113E-3	-8.80003E1	-3.09944E-4	5.24521E-3	9.36031E-2	1.58522E1	-1.98356E1	-2.01282E1	1.50184E1	2.15441E-9	2.52384E-3	2.52384E-3	6.33436E-3	2.17361E-2
1.4E1	6.0E0	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80026E1	-1.19209E-3	-8.8E1	-3.57628E-4	5.29289E-3	9.32932E-2	1.58029E1	-1.98464E1	-2.01409E1	1.49985E1	2.15613E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.16501E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80024E1	-1.43051E-3	-8.80002E1	-1.43051E-4	5.14984E-3	9.32693E-2	1.58168E1	-1.98198E1	-2.01124E1	1.5012E1	2.15505E-9	2.52362E-3	2.52362E-3	6.34099E-3	2.1676E-2
1.6E1	9.0E0	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80025E1	-1.23978E-3	-8.80002E1	-1.43051E-4	4.8399E-3	9.32693E-2	1.58101E1	-1.98681E1	-2.01553E1	1.4998E1	2.15441E-9	2.52923E-3	2.52923E-3	6.3074E-3	2.16436E-2
1.7E1	4.9E1	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80026E1	-8.82149E-4	-8.80002E1	-2.38419E-5	5.31673E-3	9.32693E-2	1.57626E1	-1.98693E1	-2.01168E1	1.50064E1	2.15894E-9	2.51771E-3	2.51771E-3	6.28006E-3	2.17444E-2
1.8E1	1.9E2	1.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80026E1	-1.14441E-3	-8.79998E1	-1.90735E-4	5.00679E-3	9.32217E-2	1.58552E1	-1.98633E1	-2.01084E1	1.5016E1	2.159E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.17732E-2
1.9E1	3.45E2	0.0E0	7.68E2	5.29E2	-7.44831E-2	-8.80024E1	-9.29832E-4	-8.80003E1	2.38419E-5	5.14984E-3	9.33409E-2	1.57945E1	-1.98717E1	-1.99546E1	1.50016E1	2.15894E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.17255E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80025E1	-1.09673E-3	-8.8E1	3.09944E-4	5.48363E-3	9.33647E-2	1.58053E1	-1.98585E1	-1.98579E1	1.50226E1	2.15982E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.17529E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.45602E-2	-8.80026E1	-1.26362E-3	-8.8E1	1.43051E-4	4.95911E-3	9.30548E-2	1.57795E1	-1.98495E1	-1.98158E1	1.50004E1	2.15533E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.17547E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.80027E1	-1.07288E-3	-8.79997E1	2.38419E-5	5.00679E-3	9.30071E-2	1.5822E1	-1.98527E1	-1.99871E1	1.49952E1	2.15894E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.17822E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.49466E-2	-8.80026E1	-1.19209E-3	-8.79999E1	-2.38419E-4	5.19753E-3	9.3317E-2	1.5786E1	-1.98533E1	-2.00387E1	1.50184E1	2.15716E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.16806E-2
