[Scan]
initial_time=2016-01-28T16:01:30
final_time=2016-01-28T16:01:49
ip_count=19
run=1026
dataset=1
scan=44
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.85869E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.71322E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.23985E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.40738E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.43408E-8
mult1=-9.82467E-9
mult2=-2.73658E-9
rf_tmon=-3.80946E-3
rf_agc=3.39524E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=5.72443E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70928E0
bslens_imon=2.38752E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19913E1
lens5a_imon=1.97943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.09947E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04528E1
cs_ea1_imon=1.25102E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10144E0
lens1_imon=1.30093E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64993E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.42304E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.99856E-5
olens2_vset=0.0E0
olens2_vmon=1.0252E-3
olens2_imon=1.01791E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.3104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15211E1
os_ea1_imon=2.3893E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63455E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26449E0
cs_ionrep_imon=9.73534E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91837E2
cs_nozzle_imon=1.9325E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=2.04855E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.41006E-9
tplens_vset=0.0E0
tplens_vmon=-1.62963E0
tplens_imon=-2.74111E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.01457E1
iondef3_imon=8.61688E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98639E1
iondef2_imon=9.18673E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98448E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.16655E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29398E0
ionrepsh_imon=8.91419E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23027E0
os_ea2_imon=-8.05023E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00502E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.17587E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09781E0
os_ef2alow_imon=-2.65194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51173E-1
os_ef2bup_imon=-5.36933E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10763E1
os_restr2_imon=3.3658E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.29433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02067E1
cs_anode2_imon=2.09829E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5756E1
iondef1_imon=4.71645E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50208E1
iondef4_imon=5.17227E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.67705E-8
olens1_vset=0.0E0
olens1_vmon=1.35899E-3
olens1_imon=1.22159E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-1.17071E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.47881E-6
window_vset=0.0E0
window_vmon=1.81303E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86428E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92569E3
multa_neg_imon=7.99749E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.45784E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.39579E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3321E1
os_fil1_imon=9.4078E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0769E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60257E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30525E1
cs_fil1_imon=9.23223E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29262E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62496E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.50917E-2
os_fil2_imon=-2.79811E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34521E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.65996E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31041E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21437E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56889E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.39E2	0.0E0	1.47E2	4.1E1	-7.40192E-2	-8.80022E1	-1.16825E-3	-8.80002E1	0.0E0	5.26905E-3	9.34839E-2	1.5848E1	-1.98788E1	-2.00074E1	1.5019E1	2.15238E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.16501E-2
2.0E0	1.7E2	0.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80024E1	-1.12057E-3	-8.8E1	-7.15256E-5	5.26905E-3	9.33886E-2	1.58153E1	-1.98834E1	-1.98173E1	1.4981E1	2.15808E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.16252E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80026E1	-1.09673E-3	-8.80005E1	2.38419E-5	5.22137E-3	9.30786E-2	1.58056E1	-1.98883E1	-1.99744E1	1.50028E1	2.15519E-9	2.52373E-3	2.52373E-3	6.30192E-3	2.16595E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80027E1	-1.26362E-3	-8.80003E1	4.52995E-4	4.93526E-3	9.32455E-2	1.57644E1	-1.98627E1	-1.99089E1	1.50184E1					
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80028E1	-1.07288E-3	-8.80002E1	1.66893E-4	5.05447E-3	9.32932E-2	1.58437E1	-1.98669E1	-1.99762E1	1.5025E1	2.15894E-9	2.51334E-3	2.51334E-3	6.29645E-3	2.17255E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80027E1	-1.21593E-3	-8.80003E1	-4.76837E-5	5.17368E-3	9.31978E-2	1.58062E1	-1.98406E1	-1.99546E1	1.50066E1	2.15706E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.15938E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80024E1	-1.14441E-3	-8.80001E1	3.09944E-4	5.38826E-3	9.31978E-2	1.57814E1	-1.98434E1	-2.00818E1	1.49938E1	2.15847E-9	2.52318E-3	2.52318E-3	6.31974E-3	2.17302E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80025E1	-1.09673E-3	-8.80003E1	4.29153E-4	5.00679E-3	9.31263E-2	1.57909E1	-1.98502E1	-1.99028E1	1.50202E1	2.15992E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.17361E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80027E1	-1.19209E-3	-8.80003E1	3.8147E-4	5.24521E-3	9.32455E-2	1.58132E1	-1.98511E1	-2.00829E1	1.50394E1	2.15696E-9	2.5225E-3	2.5225E-3	6.29624E-3	2.17529E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80027E1	-1.12057E-3	-8.80003E1	-4.76837E-5	5.6982E-3	9.35316E-2	1.57987E1	-1.9847E1	-1.98657E1	1.50172E1	2.15238E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.16125E-2
1.4E1	1.0E1	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80028E1	-1.14441E-3	-8.80002E1	3.33786E-4	5.34058E-3	9.35316E-2	1.57902E1	-1.98487E1	-2.00906E1	1.49886E1	2.158E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.16313E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80028E1	-1.35899E-3	-8.80001E1	2.38419E-4	5.24521E-3	9.34124E-2	1.58075E1	-1.98612E1	-1.99855E1	1.50114E1	2.15726E-9	2.51603E-3	2.51603E-3	6.31269E-3	2.171E-2
1.6E1	2.9E1	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80027E1	-1.14441E-3	-8.8E1	2.86102E-4	4.93526E-3	9.36031E-2	1.58173E1	-1.98296E1	-2.00177E1	1.49914E1	2.15791E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.1676E-2
1.7E1	4.8E1	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80026E1	-1.21593E-3	-8.80001E1	2.6226E-4	5.24521E-3	9.32693E-2	1.57933E1	-1.98597E1	-2.00874E1	1.50106E1	2.16081E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.17066E-2
1.8E1	1.86E2	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80028E1	-1.3113E-3	-8.80002E1	2.86102E-4	5.17368E-3	9.36747E-2	1.57819E1	-1.98458E1	-1.98591E1	1.5028E1	2.15332E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.17444E-2
1.9E1	3.17E2	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80028E1	-1.12057E-3	-8.80002E1	-1.19209E-4	5.07832E-3	9.3174E-2	1.57926E1	-1.98428E1	-1.98741E1	1.5004E1	2.15613E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.17633E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80025E1	-1.21593E-3	-8.80002E1	1.19209E-4	5.17368E-3	9.32932E-2	1.57631E1	-1.98552E1	-1.9939E1	1.49883E1	2.15624E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.16252E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80025E1	-1.09673E-3	-8.80003E1	1.43051E-4	5.14984E-3	9.35078E-2	1.57909E1	-1.98615E1	-1.99372E1	1.50166E1	2.15349E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.16806E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80025E1	-1.14441E-3	-8.80003E1	2.38419E-5	5.19753E-3	9.37939E-2	1.57786E1	-1.98608E1	-2.0081E1	1.50074E1	2.15851E-9	2.51809E-3	2.51809E-3	6.31555E-3	2.16655E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80025E1	-8.82149E-4	-8.80001E1	3.57628E-4	4.93526E-3	9.35078E-2	1.5756E1	-1.98639E1	-2.01457E1	1.50208E1					
