[Scan]
initial_time=2016-01-28T16:01:57
final_time=2016-01-28T16:02:16
ip_count=19
run=1026
dataset=1
scan=45
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.80677E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.44751E-10
ql2_vset=
ql2_vmon=-1.43051E-3
ql2_imon=1.19308E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.42183E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.43589E-8
mult1=-8.86143E-9
mult2=-2.66472E-9
rf_tmon=-5.40165E-3
rf_agc=3.20718E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=6.01733E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67533E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19856E1
lens5a_imon=1.97617E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.0513E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5384E1
cs_ef1b_imon=3.11778E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02136E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05244E1
cs_ea1_imon=1.24541E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07336E0
lens1_imon=1.43672E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64297E1
os_ef1alow_imon=2.94807E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03996E1
cs_ea2_imon=1.38318E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84465E1
cs_ef1a_imon=2.98894E-5
olens2_vset=0.0E0
olens2_vmon=1.50204E-3
olens2_imon=1.01907E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11441E1
os_restr1_imon=4.30687E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15374E1
os_ea1_imon=2.43663E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64128E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26021E0
cs_ionrep_imon=9.51542E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93349E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01536E1
cs_anode1_imon=2.03728E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.40251E-9
tplens_vset=0.0E0
tplens_vmon=-1.60712E0
tplens_imon=-2.47906E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99402E1
iondef3_imon=8.78167E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98476E1
iondef2_imon=9.33198E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=8.0241E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2808E0
ionrepsh_imon=9.39188E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33614E1
lens5b_imon=2.17832E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74741E1
cs_ef2b_imon=3.1423E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20281E0
os_ea2_imon=-7.38318E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00454E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70752E1
cs_ef2a_imon=3.1641E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.13954E0
os_ef2alow_imon=-2.82522E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.66069E-1
os_ef2bup_imon=-5.50311E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10624E1
os_restr2_imon=3.36805E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.29629E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01932E1
cs_anode2_imon=2.07854E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57981E1
iondef1_imon=5.03058E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50154E1
iondef4_imon=4.95935E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.67939E-8
olens1_vset=0.0E0
olens1_vmon=1.45435E-3
olens1_imon=1.2232E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09511E0
cs_ionaccel_imon=-8.44045E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47176E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55971E1
einzel_imon=8.03425E-6
window_vset=0.0E0
window_vmon=1.66623E-1
window_imon=-1.48238E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39158E-4
mask2_vset=0.0E0
mask2_vmon=-1.86214E1
mask2_imon=-1.14375E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92603E3
multa_neg_imon=7.13448E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.51679E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50171E3
multb_neg_imon=6.85746E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32441E0
defgridb_imon=5.99268E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33185E1
os_fil1_imon=9.39579E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06142E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60636E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30489E1
cs_fil1_imon=9.22433E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34517E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61845E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42492E-2
os_fil2_imon=-2.70417E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89521E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.96044E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37762E-1
cs_fil2_imon=-2.26304E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.68114E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21435E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.16067E-2
chamber_ion_pmon=2.15624E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40059E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.25004E-1
res40_imon=-2.63839E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.18E2	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80024E1	-1.3113E-3	-8.80002E1	1.19209E-4	4.93526E-3	9.34839E-2	1.58534E1	-1.98495E1	-1.99864E1	1.49902E1	2.15879E-9	2.51838E-3	2.51838E-3	6.3131E-3	2.16639E-2
2.0E0	1.65E2	0.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80027E1	-1.21593E-3	-8.80005E1	0.0E0	5.03063E-3	9.34601E-2	1.5771E1	-1.98566E1	-2.00288E1	1.50364E1	2.15519E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.16125E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80026E1	-1.09673E-3	-8.80001E1	2.86102E-4	4.69685E-3	9.33886E-2	1.57855E1	-1.98654E1	-1.99332E1	1.50004E1	2.15977E-9	2.52179E-3	2.52179E-3	6.30171E-3	2.18208E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80026E1	-1.43051E-3	-8.79999E1	-9.53674E-5	5.14984E-3	9.3174E-2	1.58032E1	-1.98667E1	-2.00283E1	1.50016E1	2.15817E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.16736E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80027E1	-1.16825E-3	-8.80001E1	-1.90735E-4	5.03063E-3	9.32217E-2	1.58215E1	-1.98678E1	-1.99286E1	1.5012E1	2.15887E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.16377E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.8003E1	-1.09673E-3	-8.80003E1	-2.38419E-5	5.36442E-3	9.31263E-2	1.58319E1	-1.98666E1	-1.99773E1	1.50172E1	2.15716E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.18663E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80027E1	-1.0252E-3	-8.80003E1	-2.38419E-4	4.98295E-3	9.33647E-2	1.57779E1	-1.9851E1	-1.99489E1	1.49941E1	2.15825E-9	2.51886E-3	2.51886E-3	6.3282E-3	2.1667E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80024E1	-1.0252E-3	-8.80003E1	4.76837E-5	4.79221E-3	9.32932E-2	1.57572E1	-1.98417E1	-1.9916E1	1.49926E1	2.15879E-9	2.52407E-3	2.52407E-3	6.31879E-3	2.16639E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80023E1	-9.53674E-4	-8.80002E1	-2.38419E-4	5.19753E-3	9.30309E-2	1.58398E1	-1.98446E1	-1.99655E1	1.50097E1	2.15808E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.16436E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80025E1	-1.12057E-3	-8.80001E1	4.52995E-4	5.29289E-3	9.32217E-2	1.58672E1	-1.98807E1	-2.00177E1	1.501E1	2.15706E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.17444E-2
1.4E1	8.0E0	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80025E1	-1.04904E-3	-8.80002E1	-1.90735E-4	5.43594E-3	9.32455E-2	1.58504E1	-1.98759E1	-1.99496E1	1.50136E1	2.15716E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.15883E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80027E1	-1.12057E-3	-8.80002E1	0.0E0	5.14984E-3	9.34839E-2	1.57188E1	-1.98681E1	-2.00159E1	1.50416E1	2.15624E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.16621E-2
1.6E1	1.5E1	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80024E1	-1.3113E-3	-8.80001E1	-1.19209E-4	5.26905E-3	9.34601E-2	1.58109E1	-1.98771E1	-1.99685E1	1.50226E1	2.15706E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.16125E-2
1.7E1	4.3E1	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80024E1	-1.45435E-3	-8.80003E1	9.53674E-5	5.03063E-3	9.3174E-2	1.58437E1	-1.98597E1	-1.99354E1	1.5025E1	2.159E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.16252E-2
1.8E1	1.88E2	1.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80024E1	-1.35899E-3	-8.80004E1	2.38419E-5	4.81606E-3	9.34124E-2	1.57692E1	-1.98452E1	-1.99594E1	1.50172E1	2.15894E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.16689E-2
1.9E1	3.39E2	0.0E0	7.68E2	5.29E2	-7.40967E-2	-8.8003E1	-8.82149E-4	-8.80003E1	-4.76837E-5	5.10216E-3	9.32217E-2	1.58546E1	-1.98885E1	-2.00003E1	1.50106E1	2.15425E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.16125E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80026E1	-1.3113E-3	-8.80004E1	-3.09944E-4	4.93526E-3	9.36031E-2	1.57737E1	-1.9867E1	-1.99148E1	1.49825E1	2.15894E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.16313E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80028E1	-9.53674E-4	-8.80001E1	1.19209E-4	4.93526E-3	9.3174E-2	1.57819E1	-1.98705E1	-2.00597E1	1.50046E1	2.15716E-9	2.52276E-3	2.52276E-3	6.28592E-3	2.1829E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80026E1	-1.09673E-3	-8.80002E1	1.43051E-4	5.05447E-3	9.31978E-2	1.58109E1	-1.98517E1	-1.9952E1	1.50196E1	2.15894E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.16125E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80025E1	-1.43051E-3	-8.80004E1	-2.38419E-5	4.98295E-3	9.34362E-2	1.57981E1	-1.98476E1	-1.99402E1	1.50154E1	2.15624E-9	2.52384E-3	2.52384E-3	6.33977E-3	2.16067E-2
