[Scan]
initial_time=2016-01-28T16:03:16
final_time=2016-01-28T16:03:36
ip_count=19
run=1026
dataset=1
scan=48
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.78308E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-5.59878E-10
ql2_vset=
ql2_vmon=-1.16825E-3
ql2_imon=1.25613E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.45952E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.42715E-8
mult1=-9.22991E-9
mult2=-2.6243E-9
rf_tmon=-4.8032E-3
rf_agc=3.39283E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=6.10852E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6497E0
bslens_imon=2.55388E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19824E1
lens5a_imon=1.97448E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=3.11244E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04941E1
cs_ea1_imon=1.25067E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05838E0
lens1_imon=1.40003E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.94017E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04121E1
cs_ea2_imon=1.42056E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=3.00432E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.022E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11081E1
os_restr1_imon=4.31437E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15388E1
os_ea1_imon=2.41513E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.09514E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22378E0
cs_ionrep_imon=9.7318E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93339E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01545E1
cs_anode1_imon=2.03702E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.4226E-9
tplens_vset=0.0E0
tplens_vmon=-1.62669E0
tplens_imon=-3.37821E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99726E1
iondef3_imon=8.58503E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98312E1
iondef2_imon=9.28937E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0288E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=7.70855E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30814E0
ionrepsh_imon=9.24336E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33781E1
lens5b_imon=2.18153E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74874E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2285E0
os_ea2_imon=-8.2272E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.17335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12003E0
os_ef2alow_imon=-2.66635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77001E-1
os_ef2bup_imon=-5.48826E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=3.36148E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.3053E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.07198E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57597E1
iondef1_imon=5.01377E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5001E1
iondef4_imon=5.17948E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.67889E-8
olens1_vset=0.0E0
olens1_vmon=7.62939E-4
olens1_imon=1.22983E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-1.02295E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=1.47065E-1
window_imon=-1.35091E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-8.10312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.45242E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.64543E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=7.38871E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.21067E0
defgridb_imon=6.03311E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33182E1
os_fil1_imon=9.40624E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06933E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60615E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30465E1
cs_fil1_imon=9.21283E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.37071E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62638E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.50917E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.09337E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38327E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32843E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21354E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.16806E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.83318E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.27E2	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80023E1	-1.52588E-3	-8.80005E1	9.53674E-5	5.14984E-3	9.30309E-2	1.58185E1	-1.98525E1	-1.99173E1	1.5019E1	2.15624E-9	2.51632E-3	2.51632E-3	6.28592E-3	2.16806E-2
2.0E0	1.91E2	0.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80021E1	-1.40667E-3	-8.80004E1	3.09944E-4	5.19753E-3	9.31978E-2	1.57891E1	-1.98857E1	-2.00895E1	1.50052E1	2.15706E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.17255E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80025E1	-1.28746E-3	-8.80004E1	2.38419E-5	5.36442E-3	9.35078E-2	1.58296E1	-1.98689E1	-1.98614E1	1.49998E1	2.15505E-9	2.51581E-3	2.51581E-3	6.33538E-3	2.1676E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80024E1	-1.5974E-3	-8.80001E1	2.38419E-5	5.24521E-3	9.31501E-2	1.57801E1	-1.98819E1	-2.00471E1	1.49935E1	2.15636E-9	2.51814E-3	2.51814E-3	6.31798E-3	2.16192E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80023E1	-1.4782E-3	-8.80001E1	2.38419E-5	5.03063E-3	9.33409E-2	1.58109E1	-1.98546E1	-1.98464E1	1.50064E1	2.15624E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.15883E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80026E1	-1.19209E-3	-8.8E1	4.76837E-5	5.17368E-3	9.33647E-2	1.58329E1	-1.98627E1	-2.00285E1	1.50346E1	2.15613E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.16313E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80025E1	-1.12057E-3	-8.80001E1	2.38419E-5	5.24521E-3	9.30071E-2	1.58437E1	-1.98446E1	-1.99606E1	1.4983E1	2.15519E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.16313E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80023E1	-1.35899E-3	-8.80003E1	2.38419E-4	5.10216E-3	9.29832E-2	1.57983E1	-1.98386E1	-2.00124E1	1.49974E1	2.16081E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.16689E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80025E1	-1.19209E-3	-8.80004E1	2.14577E-4	5.126E-3	9.32693E-2	1.57749E1	-1.98523E1	-2.00092E1	1.50298E1	2.15987E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17822E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80024E1	-1.14441E-3	-8.80002E1	2.38419E-4	5.00679E-3	9.33886E-2	1.57849E1	-1.98338E1	-1.99985E1	1.50172E1	2.158E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.16313E-2
1.4E1	1.4E1	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80023E1	-7.62939E-4	-8.80004E1	2.86102E-4	4.79221E-3	9.32693E-2	1.58167E1	-1.98657E1	-1.99564E1	1.5007E1	2.158E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.16501E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80022E1	-1.00136E-3	-8.80001E1	9.53674E-5	5.07832E-3	9.31025E-2	1.58221E1	-1.98364E1	-1.98299E1	1.49812E1	2.16081E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.16878E-2
1.6E1	2.5E1	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80022E1	-1.0252E-3	-8.79997E1	0.0E0	4.79221E-3	9.30309E-2	1.57536E1	-1.98471E1	-2.00749E1	1.50412E1	2.15533E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.16436E-2
1.7E1	4.3E1	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80022E1	-8.10623E-4	-8.80002E1	0.0E0	4.98295E-3	9.3174E-2	1.58395E1	-1.98843E1	-1.98687E1	1.50533E1	2.15987E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.16501E-2
1.8E1	1.75E2	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80028E1	-6.91414E-4	-8.8E1	9.53674E-5	4.76837E-3	9.31025E-2	1.58087E1	-1.98515E1	-1.99886E1	1.50309E1	2.15696E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.18108E-2
1.9E1	3.23E2	2.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80025E1	-9.05991E-4	-8.79999E1	2.38419E-4	4.81606E-3	9.31501E-2	1.58425E1	-1.98843E1	-2.00603E1	1.50334E1	2.15917E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.1561E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80028E1	-5.48363E-4	-8.79999E1	3.33786E-4	5.00679E-3	9.31263E-2	1.57814E1	-1.98552E1	-2.00027E1	1.50689E1	2.158E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.17633E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.44831E-2	-8.80025E1	-8.34465E-4	-8.80003E1	3.09944E-4	4.72069E-3	9.31025E-2	1.57927E1	-1.98579E1	-2.00033E1	1.49992E1	2.15425E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.18011E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80025E1	-9.29832E-4	-8.80002E1	7.15256E-5	4.86374E-3	9.34124E-2	1.57977E1	-1.98654E1	-1.98828E1	1.49784E1	2.15808E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.15883E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.80029E1	-1.16825E-3	-8.80001E1	2.14577E-4	5.26905E-3	9.30071E-2	1.57597E1	-1.98312E1	-1.99726E1	1.5001E1	2.15808E-9	2.52384E-3	2.52384E-3	6.29665E-3	2.16806E-2
