[Scan]
initial_time=2016-01-28T16:04:36
final_time=2016-01-28T16:04:56
ip_count=19
run=1026
dataset=1
scan=51
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.84299E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-5.55801E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.1929E-9
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.45342E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.42723E-8
mult1=-9.24672E-9
mult2=-2.48906E-9
rf_tmon=-5.91836E-3
rf_agc=3.24143E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=6.43241E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63676E0
bslens_imon=2.42391E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1994E1
lens5a_imon=1.9681E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54141E1
cs_ef1b_imon=3.11064E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04658E2
lens23_imon=1.01855E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04834E1
cs_ea1_imon=1.25261E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07355E0
lens1_imon=1.15004E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6427E1
os_ef1alow_imon=2.96553E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04134E1
cs_ea2_imon=1.44762E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84323E1
cs_ef1a_imon=3.0048E-5
olens2_vset=0.0E0
olens2_vmon=1.00136E-3
olens2_imon=1.02879E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11214E1
os_restr1_imon=4.31759E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14935E1
os_ea1_imon=2.40935E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63672E1
os_ef1bup_imon=3.07411E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24584E0
cs_ionrep_imon=9.43194E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91845E2
cs_nozzle_imon=1.93785E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=2.05051E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99975E1
olens4_imon=4.39188E-9
tplens_vset=0.0E0
tplens_vmon=-1.68355E0
tplens_imon=-3.35585E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99594E1
iondef3_imon=8.76597E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98332E1
iondef2_imon=9.2885E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.9851E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.18169E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2151E0
ionrepsh_imon=9.31241E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33686E1
lens5b_imon=2.18633E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74655E1
cs_ef2b_imon=3.11406E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19859E0
os_ea2_imon=-6.42955E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00134E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71133E1
cs_ef2a_imon=3.18541E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07419E0
os_ef2alow_imon=-2.66427E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65557E-1
os_ef2bup_imon=-5.36838E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10867E1
os_restr2_imon=3.36671E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.30475E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01946E1
cs_anode2_imon=2.09523E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57951E1
iondef1_imon=4.8897E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50082E1
iondef4_imon=5.14078E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.69168E-8
olens1_vset=0.0E0
olens1_vmon=1.4782E-3
olens1_imon=1.23117E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14038E0
cs_ionaccel_imon=-1.04931E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56394E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=1.70902E-1
window_imon=-1.1176E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39139E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=8.05561E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.30702E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.05836E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52709E0
defgridb_imon=6.33092E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33176E1
os_fil1_imon=9.39871E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06612E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60789E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30432E1
cs_fil1_imon=9.2256E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32876E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62691E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57671E-2
os_fil2_imon=-2.72761E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98979E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.91737E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3511E-1
cs_fil2_imon=-2.59104E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33538E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21392E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.17732E-2
chamber_ion_pmon=2.159E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.92872E-1
res40_imon=-2.54135E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.34E2	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80023E1	-1.21593E-3	-8.79998E1	7.15256E-5	5.26905E-3	9.34839E-2	1.58215E1	-1.98549E1	-2.01427E1	1.50305E1	2.1547E-9	2.52301E-3	2.52301E-3	6.30221E-3	2.16491E-2
2.0E0	1.45E2	1.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80026E1	-1.0252E-3	-8.79999E1	4.76837E-5	4.98295E-3	9.33886E-2	1.57939E1	-1.98597E1	-2.00802E1	1.5004E1	2.15808E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.17176E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80024E1	-1.19209E-3	-8.80001E1	-1.90735E-4	4.64916E-3	9.34601E-2	1.57826E1	-1.98476E1	-2.01437E1	1.50016E1	2.15791E-9	2.52027E-3	2.52027E-3	6.33538E-3	2.17722E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40967E-2	-8.80024E1	-1.19209E-3	-8.80002E1	-2.14577E-4	4.93526E-3	9.33886E-2	1.58125E1	-1.98507E1	-2.00255E1	1.50022E1	2.159E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.17732E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80024E1	-1.23978E-3	-8.8E1	-1.66893E-4	4.95911E-3	9.36747E-2	1.57861E1	-1.98287E1	-1.9867E1	1.50254E1	2.15808E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.16621E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80024E1	-1.26362E-3	-8.80001E1	-2.6226E-4	4.93526E-3	9.34601E-2	1.58341E1	-1.98525E1	-1.9921E1	1.5028E1	2.158E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.16125E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80024E1	-1.14441E-3	-8.79999E1	4.76837E-5	5.43594E-3	9.32932E-2	1.57662E1	-1.98693E1	-1.99216E1	1.50214E1	2.158E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.15189E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80025E1	-1.16825E-3	-8.80001E1	0.0E0	5.19753E-3	9.31263E-2	1.57855E1	-1.98801E1	-2.00886E1	1.5004E1	2.15894E-9	2.52209E-3	2.52209E-3	6.28552E-3	2.17444E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80025E1	-7.15256E-4	-8.79999E1	3.33786E-4	5.14984E-3	9.31501E-2	1.58109E1	-1.98629E1	-2.00711E1	1.5022E1	2.15808E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16806E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80024E1	-1.3113E-3	-8.80002E1	7.15256E-5	5.00679E-3	9.33647E-2	1.57813E1	-1.98921E1	-1.98332E1	1.50563E1	2.15613E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17066E-2
1.4E1	1.0E1	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80025E1	-1.04904E-3	-8.80002E1	9.53674E-5	5.34058E-3	9.29594E-2	1.58289E1	-1.98428E1	-1.98545E1	1.50034E1	2.15613E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.17822E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80024E1	-1.12057E-3	-8.80002E1	3.09944E-4	5.22137E-3	9.32932E-2	1.57619E1	-1.9867E1	-1.99242E1	1.50064E1	2.158E-9	2.52538E-3	2.52538E-3	6.29645E-3	2.17066E-2
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80021E1	-1.14441E-3	-8.80001E1	3.09944E-4	5.31673E-3	9.33409E-2	1.58107E1	-1.98831E1	-1.98651E1	1.49986E1	2.15441E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.17918E-2
1.7E1	4.7E1	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80023E1	-1.04904E-3	-8.80003E1	0.0E0	5.17368E-3	9.3317E-2	1.58371E1	-1.98591E1	-1.99252E1	1.50106E1	2.15894E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.16125E-2
1.8E1	1.75E2	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.8002E1	-5.72205E-4	-8.79998E1	2.86102E-4	4.91142E-3	9.3317E-2	1.58462E1	-1.98513E1	-2.00531E1	1.49962E1	2.15706E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.16878E-2
1.9E1	3.74E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80023E1	-1.19209E-3	-8.80001E1	7.15256E-5	4.79221E-3	9.34601E-2	1.58185E1	-1.98659E1	-2.01077E1	1.49964E1	2.15613E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.18011E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80023E1	-7.39098E-4	-8.79998E1	-2.38419E-5	5.17368E-3	9.34362E-2	1.57784E1	-1.98434E1	-1.99703E1	1.50202E1	2.15716E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.18104E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80023E1	-9.77516E-4	-8.8E1	7.15256E-5	4.95911E-3	9.35793E-2	1.58233E1	-1.98594E1	-1.98145E1	1.50277E1	2.158E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.17066E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80026E1	-1.09673E-3	-8.8E1	1.90735E-4	5.05447E-3	9.3627E-2	1.58067E1	-1.98428E1	-1.98387E1	1.50142E1	2.15817E-9	2.52236E-3	2.52236E-3	6.30212E-3	2.17829E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80027E1	-1.04904E-3	-8.79998E1	-1.19209E-4	4.91142E-3	9.35793E-2	1.57951E1	-1.98332E1	-1.99594E1	1.50082E1	2.159E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.17732E-2
