[Scan]
initial_time=2016-01-28T16:07:43
final_time=2016-01-28T16:08:02
ip_count=19
run=1026
dataset=1
scan=58
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.77478E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-5.72431E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.28704E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.42915E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.42221E-8
mult1=-9.57182E-9
mult2=-2.65474E-9
rf_tmon=-5.62996E-3
rf_agc=3.26607E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.9284E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66061E0
bslens_imon=2.41619E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=1.97182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05236E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53833E1
cs_ef1b_imon=3.10026E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.01926E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04917E1
cs_ea1_imon=1.26596E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08587E0
lens1_imon=1.49736E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64342E1
os_ef1alow_imon=2.96131E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04093E1
cs_ea2_imon=1.39794E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84407E1
cs_ef1a_imon=3.00529E-5
olens2_vset=0.0E0
olens2_vmon=1.14441E-3
olens2_imon=1.032E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11299E1
os_restr1_imon=4.32322E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15254E1
os_ea1_imon=2.41138E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63674E1
os_ef1bup_imon=3.07613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24885E0
cs_ionrep_imon=9.68508E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93362E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02127E1
cs_anode1_imon=2.05207E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.36357E-9
tplens_vset=0.0E0
tplens_vmon=-1.62067E0
tplens_imon=-2.97471E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98915E1
iondef3_imon=8.78182E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98218E1
iondef2_imon=9.35025E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98264E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=8.08275E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27156E0
ionrepsh_imon=9.36193E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33353E1
lens5b_imon=2.17272E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.11933E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.25729E0
os_ea2_imon=-6.82913E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06036E2
lens4b_imon=2.00455E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71556E1
cs_ef2a_imon=3.19017E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0325E0
os_ef2alow_imon=-2.74348E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54393E-1
os_ef2bup_imon=-5.33963E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10968E1
os_restr2_imon=3.36844E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.29734E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.09605E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58101E1
iondef1_imon=5.02863E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5037E1
iondef4_imon=5.10336E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.68728E-8
olens1_vset=0.0E0
olens1_vmon=1.19209E-3
olens1_imon=1.23846E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15674E0
cs_ionaccel_imon=-1.03866E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47176E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56146E1
einzel_imon=7.71898E-6
window_vset=0.0E0
window_vmon=1.69866E-1
window_imon=-1.12818E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39201E-4
mask2_vset=0.0E0
mask2_vmon=-1.86227E1
mask2_imon=-7.19492E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92737E3
multa_neg_imon=7.45808E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93661E3
defgrida_imon=6.19274E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=6.53536E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42947E0
defgridb_imon=6.08762E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33147E1
os_fil1_imon=9.4026E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06635E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60984E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30476E1
cs_fil1_imon=9.23568E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31079E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63103E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33063E-2
os_fil2_imon=-2.79499E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83683E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.70055E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33847E-1
cs_fil2_imon=-2.47063E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06486E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21495E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.15938E-2
chamber_ion_pmon=2.15613E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.4006E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.88676E-1
res40_imon=-2.57222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.23E2	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80027E1	-1.14441E-3	-8.79999E1	4.29153E-4	5.24521E-3	9.3174E-2	1.58115E1	-1.98853E1	-1.99461E1	1.50022E1	2.15661E-9	2.51793E-3	2.51793E-3	6.32518E-3	2.15773E-2
2.0E0	1.34E2	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80028E1	-1.07288E-3	-8.80001E1	1.66893E-4	5.10216E-3	9.33886E-2	1.57487E1	-1.98637E1	-2.00314E1	1.50022E1	2.16085E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.16067E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80027E1	-1.21593E-3	-8.80001E1	6.67572E-4	5.14984E-3	9.33647E-2	1.58203E1	-1.98682E1	-1.99856E1	1.50045E1	2.15696E-9	2.52473E-3	2.52473E-3	6.33538E-3	2.15994E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80027E1	-1.04904E-3	-8.8E1	1.90735E-4	4.93526E-3	9.35316E-2	1.58268E1	-1.9867E1	-1.9998E1	1.49836E1	2.16085E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.15883E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80029E1	-8.34465E-4	-8.8E1	3.33786E-4	4.86374E-3	9.30786E-2	1.57505E1	-1.98912E1	-1.99634E1	1.50172E1	2.15624E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16436E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80027E1	-1.12057E-3	-8.8E1	4.29153E-4	5.14984E-3	9.3317E-2	1.58067E1	-1.98487E1	-1.98735E1	1.4992E1	2.15791E-9	2.52473E-3	2.52473E-3	6.33538E-3	2.16569E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80025E1	-7.15256E-4	-8.79996E1	1.43051E-4	4.98295E-3	9.29117E-2	1.58161E1	-1.98585E1	-2.0079E1	1.50172E1	2.15716E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.15699E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80025E1	-1.12057E-3	-8.79998E1	2.86102E-4	4.98295E-3	9.32455E-2	1.57837E1	-1.98753E1	-1.99431E1	1.50491E1	2.15613E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.18201E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80027E1	-1.23978E-3	-8.79999E1	1.43051E-4	4.93526E-3	9.31501E-2	1.58005E1	-1.98362E1	-1.98579E1	1.49986E1	2.15716E-9	2.51632E-3	2.51632E-3	6.35059E-3	2.17176E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80029E1	-1.04904E-3	-8.79998E1	2.14577E-4	5.14984E-3	9.30071E-2	1.5878E1	-1.98807E1	-1.99258E1	1.50076E1	2.15987E-9	2.52757E-3	2.52757E-3	6.31837E-3	2.17066E-2
1.4E1	5.0E0	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80028E1	-1.07288E-3	-8.79999E1	4.52995E-4	4.57764E-3	9.31501E-2	1.58197E1	-1.98723E1	-2.01216E1	1.4992E1	2.15987E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.16501E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80026E1	-1.21593E-3	-8.8E1	2.38419E-5	5.14984E-3	9.33647E-2	1.57957E1	-1.98452E1	-2.0112E1	1.49908E1	2.15519E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.16125E-2
1.6E1	2.2E1	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80029E1	-9.05991E-4	-8.79997E1	7.15256E-5	5.07832E-3	9.36985E-2	1.58097E1	-1.98659E1	-1.98989E1	1.49992E1	2.16175E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.16689E-2
1.7E1	5.2E1	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80026E1	-1.21593E-3	-8.79999E1	1.43051E-4	4.95911E-3	9.33647E-2	1.58138E1	-1.98428E1	-1.99219E1	1.49941E1	2.15992E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.16991E-2
1.8E1	1.87E2	0.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80027E1	-1.23978E-3	-8.79999E1	5.72205E-4	5.05447E-3	9.3317E-2	1.58365E1	-1.98567E1	-1.98597E1	1.49872E1	2.15257E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.16067E-2
1.9E1	3.23E2	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80025E1	-1.12057E-3	-8.80002E1	2.86102E-4	4.86374E-3	9.33647E-2	1.57951E1	-1.98308E1	-1.996E1	1.49932E1	2.15613E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.16689E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80026E1	-1.43051E-3	-8.80003E1	2.86102E-4	5.00679E-3	9.32217E-2	1.57416E1	-1.98543E1	-2.00591E1	1.50094E1	2.15894E-9	2.51771E-3	2.51771E-3	6.29098E-3	2.1575E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80026E1	-1.35899E-3	-8.80001E1	1.43051E-4	4.98295E-3	9.3317E-2	1.58064E1	-1.98446E1	-1.98116E1	1.50045E1	2.16081E-9	2.52647E-3	2.52647E-3	6.33486E-3	2.16878E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80026E1	-1.19209E-3	-8.80004E1	3.33786E-4	4.79221E-3	9.32932E-2	1.58053E1	-1.98669E1	-1.98284E1	1.49836E1	2.15817E-9	2.52131E-3	2.52131E-3	6.33388E-3	2.17646E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80028E1	-1.0252E-3	-8.80006E1	3.09944E-4	4.86374E-3	9.30786E-2	1.58101E1	-1.98218E1	-1.98915E1	1.5037E1	2.15613E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.15938E-2
