[Scan]
initial_time=2016-01-28T16:08:09
final_time=2016-01-28T16:08:29
ip_count=19
run=1026
dataset=1
scan=59
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.45602E-2
qbias_imon=-3.80042E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-6.23298E-10
ql2_vset=
ql2_vmon=-1.23978E-3
ql2_imon=1.22638E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.44862E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.42208E-8
mult1=-9.96357E-9
mult2=-2.80088E-9
rf_tmon=-3.99099E-3
rf_agc=3.43284E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.99813E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.47286E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20193E1
lens5a_imon=1.97334E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=3.09947E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04916E1
cs_ea1_imon=1.2646E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06539E0
lens1_imon=1.29404E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.40844E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=3.00432E-5
olens2_vset=0.0E0
olens2_vmon=1.0252E-3
olens2_imon=1.02999E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.31473E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1542E1
os_ea1_imon=2.41242E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24909E0
cs_ionrep_imon=9.68998E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93269E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=2.05071E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.35833E-9
tplens_vset=0.0E0
tplens_vmon=-1.60478E0
tplens_imon=-1.33518E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9924E1
iondef3_imon=8.69501E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98799E1
iondef2_imon=9.46287E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=8.23462E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=9.3439E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33495E1
lens5b_imon=2.15431E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21304E0
os_ea2_imon=-6.92286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06417E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72196E-1
os_ef2bup_imon=-5.4378E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11039E1
os_restr2_imon=3.3622E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.30325E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.09468E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58261E1
iondef1_imon=4.92784E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50282E1
iondef4_imon=5.17227E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.68509E-8
olens1_vset=0.0E0
olens1_vmon=1.14441E-3
olens1_imon=1.2405E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-1.04817E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55877E1
einzel_imon=7.59414E-6
window_vset=0.0E0
window_vmon=1.50669E-1
window_imon=-1.13827E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.38998E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92578E3
multa_neg_imon=7.14849E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=7.16291E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=8.04973E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34743E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33166E1
os_fil1_imon=9.40912E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07233E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60878E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30489E1
cs_fil1_imon=9.22322E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.26559E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63025E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.51222E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.86595E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.68399E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21424E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.16689E-2
chamber_ion_pmon=2.15613E-9
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.36177E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=221
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.45E2	0.0E0	1.47E2	4.1E1	-7.39421E-2	-8.80025E1	-1.00136E-3	-8.80005E1	2.86102E-4	4.98295E-3	9.32217E-2	1.57969E1	-1.98338E1	-1.98152E1	1.5004E1	2.158E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.17255E-2
2.0E0	1.35E2	0.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80027E1	-1.16825E-3	-8.80004E1	3.8147E-4	4.79221E-3	9.31501E-2	1.58448E1	-1.98165E1	-1.99371E1	1.49842E1	2.15613E-9	2.51116E-3	2.51116E-3	6.31288E-3	2.16125E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80027E1	-1.26362E-3	-8.8E1	4.05312E-4	4.74453E-3	9.31025E-2	1.58006E1	-1.98689E1	-1.99564E1	1.50062E1	2.15219E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.15994E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80027E1	-1.57356E-3	-8.80001E1	1.43051E-4	4.93526E-3	9.31263E-2	1.58017E1	-1.98861E1	-1.99979E1	1.50118E1	2.16088E-9	2.52236E-3	2.52236E-3	6.31798E-3	2.16918E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80025E1	-9.77516E-4	-8.80003E1	7.15256E-5	5.05447E-3	9.34362E-2	1.57921E1	-1.9841E1	-2.00958E1	1.50196E1	2.158E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.1575E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80025E1	-1.00136E-3	-8.80005E1	1.90735E-4	5.22137E-3	9.3174E-2	1.57684E1	-1.98659E1	-1.99125E1	1.50136E1	2.15894E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.17633E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80025E1	-1.28746E-3	-8.80001E1	2.86102E-4	5.03063E-3	9.31025E-2	1.58077E1	-1.98717E1	-2.00279E1	1.50058E1	2.159E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.17176E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80023E1	-1.04904E-3	-8.80003E1	4.76837E-5	5.24521E-3	9.31978E-2	1.57761E1	-1.98517E1	-2.0031E1	1.50051E1	2.15894E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.17066E-2
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80026E1	-1.40667E-3	-8.80003E1	2.38419E-5	5.07832E-3	9.31263E-2	1.57584E1	-1.9835E1	-1.98038E1	1.5022E1	2.15624E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.17732E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.42513E-2	-8.80031E1	-1.40667E-3	-8.80001E1	1.90735E-4	4.91142E-3	9.29832E-2	1.57849E1	-1.98621E1	-1.9817E1	1.50064E1	2.15706E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.16689E-2
1.4E1	1.1E1	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.8003E1	-1.19209E-3	-8.80002E1	-3.33786E-4	5.14984E-3	9.34601E-2	1.58101E1	-1.99011E1	-1.9802E1	1.50058E1	2.15519E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.17444E-2
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80029E1	-9.53674E-4	-8.80003E1	-1.43051E-4	5.14984E-3	9.32932E-2	1.58203E1	-1.98434E1	-1.97641E1	1.50503E1	2.15613E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.16878E-2
1.6E1	2.4E1	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80025E1	-1.40667E-3	-8.80003E1	-3.09944E-4	4.98295E-3	9.35078E-2	1.57512E1	-1.98212E1	-1.98452E1	1.49956E1	2.15519E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.16501E-2
1.7E1	4.6E1	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80023E1	-1.54972E-3	-8.80001E1	-1.19209E-4	5.29289E-3	9.35316E-2	1.57934E1	-1.98714E1	-1.98445E1	1.50094E1	2.16081E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.15938E-2
1.8E1	1.95E2	0.0E0	7.27E2	5.0E2	-7.40192E-2	-8.80026E1	-1.54972E-3	-8.80007E1	-2.38419E-5	4.91142E-3	9.33647E-2	1.58333E1	-1.98552E1	-2.00142E1	1.50061E1	2.15571E-9	2.5216E-3	2.5216E-3	6.34322E-3	2.17307E-2
1.9E1	3.23E2	1.0E0	7.68E2	5.29E2	-7.44831E-2	-8.80028E1	-1.43051E-3	-8.80005E1	-2.38419E-5	5.10216E-3	9.36985E-2	1.58161E1	-1.99179E1	-2.01336E1	1.50166E1	2.15661E-9	2.52502E-3	2.52502E-3	6.31332E-3	2.15773E-2
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-7.45602E-2	-8.8003E1	-1.43051E-3	-8.79999E1	0.0E0	4.55379E-3	9.39846E-2	1.57602E1	-1.98404E1	-2.00099E1	1.49902E1	2.15613E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.17255E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.80028E1	-1.54972E-3	-8.80004E1	-1.19209E-4	4.72069E-3	9.377E-2	1.58569E1	-1.98476E1	-2.01354E1	1.50034E1	2.158E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.17255E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80029E1	-1.57356E-3	-8.80002E1	2.6226E-4	4.98295E-3	9.35078E-2	1.57741E1	-1.98909E1	-2.00826E1	1.49908E1	2.15992E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.16621E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.45602E-2	-8.80029E1	-1.23978E-3	-8.80003E1	1.90735E-4	4.72069E-3	9.38654E-2	1.58261E1	-1.98799E1	-1.9924E1	1.50282E1	2.15613E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.16689E-2
