[Scan]
initial_time=2016-01-28T16:08:36
final_time=2016-01-28T16:08:55
ip_count=19
run=1026
dataset=1
scan=60
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.87215E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.17428E-10
ql2_vset=
ql2_vmon=-1.19209E-3
ql2_imon=1.20742E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.44157E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.43076E-8
mult1=-9.85401E-9
mult2=-2.67034E-9
rf_tmon=-4.58026E-3
rf_agc=3.28431E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=6.21808E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60899E0
bslens_imon=2.24595E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19807E1
lens5a_imon=1.97554E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53534E1
cs_ef1b_imon=3.08504E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04917E1
cs_ea1_imon=1.24571E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06899E0
lens1_imon=1.53807E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64157E1
os_ef1alow_imon=2.9714E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.40286E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84626E1
cs_ef1a_imon=3.00789E-5
olens2_vset=0.0E0
olens2_vmon=9.05991E-4
olens2_imon=1.03069E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1106E1
os_restr1_imon=4.31354E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.4169E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.08678E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=9.48404E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01798E1
cs_anode1_imon=2.05254E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.42783E-9
tplens_vset=0.0E0
tplens_vmon=-1.62197E0
tplens_imon=-4.08609E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.01431E1
iondef3_imon=8.88234E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98883E1
iondef2_imon=9.32123E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98356E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.04389E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28336E0
ionrepsh_imon=9.23628E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33988E1
lens5b_imon=2.17799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74658E1
cs_ef2b_imon=3.13543E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.25446E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71038E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04877E0
os_ef2alow_imon=-2.4877E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.35835E-1
os_ef2bup_imon=-5.36869E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10701E1
os_restr2_imon=3.37835E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.29397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01896E1
cs_anode2_imon=2.09529E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57755E1
iondef1_imon=5.0704E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50028E1
iondef4_imon=5.28992E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.68359E-8
olens1_vset=0.0E0
olens1_vmon=8.82149E-4
olens1_imon=1.23318E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15736E0
cs_ionaccel_imon=-1.14278E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47348E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56428E1
einzel_imon=7.62876E-6
window_vset=0.0E0
window_vmon=1.71928E-1
window_imon=-1.1254E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82659E2
mask1_imon=2.39105E-4
mask2_vset=0.0E0
mask2_vmon=-1.86211E1
mask2_imon=-7.67451E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=8.00457E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.61004E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.02769E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47052E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33166E1
os_fil1_imon=9.40862E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06698E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60872E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30459E1
cs_fil1_imon=9.22588E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35054E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62817E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48385E-2
os_fil2_imon=-2.51859E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95869E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.88203E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34146E-1
cs_fil2_imon=-2.2232E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28102E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21507E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32916E-3
inlet_lpb_pmon=2.17777E-2
chamber_ion_pmon=2.15619E-9
chamber_cvt_pmon=2.51538E-3
foreline_cvt_pmon=2.51538E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94538E-1
res40_imon=-2.61976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.15E2	0.0E0	1.47E2	4.1E1	-7.53334E-2	-8.80024E1	-1.09673E-3	-8.80001E1	-5.24521E-4	5.38826E-3	9.38416E-2	1.5802E1	-1.98434E1	-2.00611E1	1.49824E1	2.15808E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.17547E-2
2.0E0	1.58E2	0.0E0	3.16E2	1.6E2	-7.44059E-2	-8.80025E1	-1.19209E-3	-8.80002E1	-2.38419E-5	4.88758E-3	9.377E-2	1.58332E1	-1.98863E1	-1.98777E1	1.50172E1	2.15349E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.16436E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.41738E-2	-8.80025E1	-1.23978E-3	-8.80002E1	-2.38419E-4	4.93526E-3	9.37223E-2	1.57844E1	-1.98602E1	-1.9917E1	1.49889E1	2.15887E-9	2.51804E-3	2.51804E-3	6.30182E-3	2.18108E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40967E-2	-8.80025E1	-1.35899E-3	-8.80003E1	-2.38419E-4	5.19753E-3	9.34362E-2	1.58299E1	-1.98723E1	-2.01234E1	1.50118E1	2.15907E-9	2.51709E-3	2.51709E-3	6.29157E-3	2.18194E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.44059E-2	-8.80027E1	-1.28746E-3	-8.79998E1	-1.43051E-4	5.07832E-3	9.31978E-2	1.58011E1	-1.98699E1	-1.99191E1	1.50178E1	2.158E-9	2.52757E-3	2.52757E-3	6.29098E-3	2.17444E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80026E1	-9.53674E-4	-8.79997E1	-4.76837E-5	5.00679E-3	9.37462E-2	1.58209E1	-1.98603E1	-1.99822E1	1.50226E1	2.16081E-9	2.52538E-3	2.52538E-3	6.33486E-3	2.17822E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80025E1	-1.14441E-3	-8.80003E1	3.57628E-4	5.43594E-3	9.34601E-2	1.58215E1	-1.98591E1	-1.99324E1	1.50376E1	2.15987E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.18011E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80028E1	-1.12057E-3	-8.80001E1	1.66893E-4	5.67436E-3	9.34124E-2	1.58053E1	-1.98332E1	-2.00387E1	1.5016E1	2.15332E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.16501E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.47149E-2	-8.80025E1	-9.77516E-4	-8.79997E1	1.90735E-4	5.14984E-3	9.33886E-2	1.57716E1	-1.9805E1	-1.99282E1	1.50244E1	2.15519E-9	2.51443E-3	2.51443E-3	6.26916E-3	2.16125E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.80025E1	-1.0252E-3	-8.8E1	5.24521E-4	5.05447E-3	9.34839E-2	1.58089E1	-1.98945E1	-2.00267E1	1.49902E1	2.15706E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.16689E-2
1.4E1	1.1E1	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80027E1	-1.21593E-3	-8.80002E1	3.57628E-4	5.03063E-3	9.36031E-2	1.57987E1	-1.98404E1	-1.99504E1	1.50004E1	2.158E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17633E-2
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.80026E1	-1.43051E-3	-8.80002E1	2.6226E-4	4.95911E-3	9.35793E-2	1.58179E1	-1.98712E1	-1.9995E1	1.49926E1	2.15987E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.17822E-2
1.6E1	2.4E1	0.0E0	6.47E2	4.41E2	-7.40192E-2	-8.80027E1	-1.43051E-3	-8.80003E1	2.86102E-4	4.8399E-3	9.36985E-2	1.57973E1	-1.98912E1	-1.99089E1	1.50103E1	2.16085E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.17547E-2
1.7E1	4.5E1	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80025E1	-1.26362E-3	-8.80002E1	1.90735E-4	4.91142E-3	9.32693E-2	1.58203E1	-1.98624E1	-1.9942E1	1.50091E1	2.159E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.17176E-2
1.8E1	1.46E2	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80027E1	-1.26362E-3	-8.80004E1	1.43051E-4	4.81606E-3	9.33647E-2	1.58005E1	-1.98416E1	-1.98825E1	1.5004E1	2.156E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.17145E-2
1.9E1	3.53E2	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80025E1	-9.77516E-4	-8.80004E1	1.43051E-4	4.52995E-3	9.34124E-2	1.58044E1	-1.98747E1	-2.00658E1	1.50225E1	2.15519E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.16125E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80027E1	-9.77516E-4	-8.80003E1	2.14577E-4	4.74453E-3	9.3317E-2	1.57981E1	-1.98909E1	-1.98296E1	1.50064E1	2.15808E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.16621E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80024E1	-9.29832E-4	-8.80001E1	-7.15256E-5	4.74453E-3	9.34601E-2	1.58109E1	-1.989E1	-1.98257E1	1.5013E1	2.15572E-9	2.52406E-3	2.52406E-3	6.32099E-3	2.18528E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80027E1	-7.39098E-4	-8.80002E1	9.53674E-5	5.126E-3	9.34839E-2	1.57945E1	-1.98567E1	-2.00868E1	1.5014E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80024E1	-1.19209E-3	-8.79999E1	3.33786E-4	5.26905E-3	9.37462E-2	1.57755E1	-1.98883E1	-2.01431E1	1.50028E1	2.15619E-9	2.51538E-3	2.51538E-3	6.32916E-3	2.17777E-2
