[Scan]
initial_time=2016-01-28T16:09:29
final_time=2016-01-28T16:09:49
ip_count=19
run=1026
dataset=1
scan=62
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.85523E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.30159E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.22228E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.46586E-9
ql4_vset=
ql4_vmon=-1.90735E-4
ql4_imon=1.42291E-8
mult1=-1.02087E-8
mult2=-2.69778E-9
rf_tmon=-3.04062E-3
rf_agc=3.36925E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=6.06775E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66361E0
bslens_imon=2.51367E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.98024E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.04938E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53268E1
cs_ef1b_imon=3.0918E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02106E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04866E1
cs_ea1_imon=1.24601E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04573E0
lens1_imon=1.48524E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64371E1
os_ef1alow_imon=2.96942E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03825E1
cs_ea2_imon=1.42011E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84363E1
cs_ef1a_imon=2.99263E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.02921E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11167E1
os_restr1_imon=4.31488E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15171E1
os_ea1_imon=2.40299E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63872E1
os_ef1bup_imon=3.07047E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23618E0
cs_ionrep_imon=9.71637E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93435E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01672E1
cs_anode1_imon=2.04313E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.40708E-9
tplens_vset=0.0E0
tplens_vmon=-1.61572E0
tplens_imon=-3.98992E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00051E1
iondef3_imon=8.5704E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98647E1
iondef2_imon=9.37846E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98496E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=8.34501E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2876E0
ionrepsh_imon=9.06626E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33597E1
lens5b_imon=2.18629E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74545E1
cs_ef2b_imon=3.12212E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21476E0
os_ea2_imon=-9.05862E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.17526E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08512E0
os_ef2alow_imon=-2.6342E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69562E-1
os_ef2bup_imon=-5.40745E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11055E1
os_restr2_imon=3.37025E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.29487E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01778E1
cs_anode2_imon=2.10114E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58002E1
iondef1_imon=5.20229E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49929E1
iondef4_imon=5.18405E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.68601E-8
olens1_vset=0.0E0
olens1_vmon=1.23978E-3
olens1_imon=1.23711E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17069E0
cs_ionaccel_imon=-1.05483E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47222E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56187E1
einzel_imon=7.56059E-6
window_vset=0.0E0
window_vmon=1.86409E-1
window_imon=-1.10348E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39017E-4
mask2_vset=0.0E0
mask2_vmon=-1.86257E1
mask2_imon=-6.61857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.7146E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93686E3
defgrida_imon=6.48048E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.32894E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45564E0
defgridb_imon=5.97729E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33171E1
os_fil1_imon=9.41516E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06905E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61116E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3045E1
cs_fil1_imon=9.22984E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.36435E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62697E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4891E-2
os_fil2_imon=-2.79349E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.75339E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34089E-1
cs_fil2_imon=-2.37557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04889E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21372E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.17066E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56266E-1
res40_imon=-2.49198E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.29E2	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80023E1	-1.21593E-3	-8.80002E1	3.09944E-4	5.10216E-3	9.34839E-2	1.58156E1	-1.9844E1	-2.00416E1	1.50045E1	2.15894E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.17255E-2
2.0E0	1.58E2	0.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80024E1	-1.09673E-3	-8.80004E1	2.38419E-5	5.26905E-3	9.3627E-2	1.57958E1	-1.98484E1	-1.9882E1	1.49735E1	2.158E-9	2.52757E-3	2.52757E-3	6.28552E-3	2.16689E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.44831E-2	-8.80024E1	-1.04904E-3	-8.80006E1	3.8147E-4	4.76837E-3	9.34362E-2	1.5815E1	-1.98753E1	-2.00275E1	1.50091E1	2.156E-9	2.51915E-3	2.51915E-3	6.29067E-3	2.15994E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80025E1	-1.23978E-3	-8.80006E1	1.90735E-4	4.64916E-3	9.38892E-2	1.57885E1	-1.98591E1	-1.9814E1	1.50094E1	2.15365E-9	2.52236E-3	2.52236E-3	6.31798E-3	2.17464E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80025E1	-1.09673E-3	-8.8E1	2.38419E-4	4.52995E-3	9.36985E-2	1.57808E1	-1.98912E1	-2.00682E1	1.50118E1	2.15613E-9	2.52099E-3	2.52099E-3	6.3514E-3	2.17633E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.80023E1	-9.53674E-4	-8.79999E1	4.29153E-4	4.86374E-3	9.35555E-2	1.58029E1	-1.98555E1	-1.98963E1	1.49986E1	2.16081E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.17255E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80027E1	-9.77516E-4	-8.80001E1	1.90735E-4	4.81606E-3	9.35555E-2	1.58191E1	-1.98284E1	-1.99708E1	1.50082E1	2.15624E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.16991E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.80028E1	-1.12057E-3	-8.79999E1	3.57628E-4	4.76837E-3	9.3174E-2	1.58155E1	-1.98368E1	-2.00177E1	1.5022E1	2.15791E-9	2.51581E-3	2.51581E-3	6.29067E-3	2.16569E-2
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80025E1	-1.14441E-3	-8.79998E1	2.38419E-5	5.36442E-3	9.35793E-2	1.57981E1	-1.98254E1	-1.99089E1	1.50046E1	2.15624E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.16621E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80028E1	-1.00136E-3	-8.80001E1	1.90735E-4	4.86374E-3	9.33647E-2	1.58077E1	-1.98909E1	-2.00153E1	1.50194E1	2.15987E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.15563E-2
1.4E1	8.0E0	0.0E0	5.66E2	3.82E2	-7.42513E-2	-8.80027E1	-5.00679E-4	-8.80001E1	-3.09944E-4	5.126E-3	9.32455E-2	1.57702E1	-1.98541E1	-1.9998E1	1.50277E1	2.15706E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.16313E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80025E1	-7.86781E-4	-8.79999E1	2.38419E-4	4.72069E-3	9.34124E-2	1.58062E1	-1.98563E1	-1.99022E1	1.50122E1	2.15613E-9	2.52647E-3	2.52647E-3	6.29098E-3	2.18201E-2
1.6E1	1.8E1	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80027E1	-7.62939E-4	-8.8E1	3.09944E-4	4.8399E-3	9.34124E-2	1.58101E1	-1.98537E1	-1.99732E1	1.5022E1	2.15982E-9	2.52362E-3	2.52362E-3	6.29624E-3	2.1676E-2
1.7E1	5.2E1	0.0E0	6.87E2	4.7E2	-7.44059E-2	-8.80027E1	-5.96046E-4	-8.79999E1	7.15256E-5	5.10216E-3	9.34601E-2	1.57999E1	-1.98891E1	-2.00117E1	1.50262E1	2.15613E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.16878E-2
1.8E1	2.09E2	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80026E1	-1.12057E-3	-8.79997E1	2.38419E-4	4.95911E-3	9.35793E-2	1.58044E1	-1.9857E1	-1.99809E1	1.49918E1	2.15987E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.16313E-2
1.9E1	3.12E2	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80028E1	-1.23978E-3	-8.79999E1	-9.53674E-5	4.93526E-3	9.34839E-2	1.58209E1	-1.98633E1	-1.98386E1	1.5013E1	2.15716E-9	2.52815E-3	2.52815E-3	6.32356E-3	2.15148E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80026E1	-1.43051E-3	-8.79998E1	1.19209E-4	5.126E-3	9.31978E-2	1.57897E1	-1.98747E1	-1.99967E1	1.50208E1	2.15145E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.16689E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80024E1	-1.19209E-3	-8.79997E1	-2.38419E-5	4.79221E-3	9.33886E-2	1.58221E1	-1.9811E1	-1.99455E1	1.49908E1	2.15533E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.16806E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80027E1	-7.86781E-4	-8.79999E1	-1.90735E-4	5.19753E-3	9.36985E-2	1.58407E1	-1.98483E1	-1.99402E1	1.50208E1	2.16081E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.1877E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80023E1	-1.04904E-3	-8.8E1	-1.90735E-4	4.72069E-3	9.33647E-2	1.58002E1	-1.98647E1	-2.00051E1	1.49929E1	2.15894E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17066E-2
