[Scan]
initial_time=2016-01-28T16:09:56
final_time=2016-01-28T16:10:16
ip_count=19
run=1026
dataset=1
scan=63
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.8564E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-5.72622E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.20147E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.42478E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.4283E-8
mult1=-9.52578E-9
mult2=-2.54929E-9
rf_tmon=-5.97243E-3
rf_agc=3.25603E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.99372E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63595E0
bslens_imon=2.80942E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19915E1
lens5a_imon=1.95898E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12412E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53755E1
cs_ef1b_imon=3.10454E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02047E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04871E1
cs_ea1_imon=1.2391E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10014E0
lens1_imon=1.43507E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6533E1
os_ef1alow_imon=2.95953E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0393E1
cs_ea2_imon=1.39561E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84315E1
cs_ef1a_imon=3.00914E-5
olens2_vset=0.0E0
olens2_vmon=1.16825E-3
olens2_imon=1.02387E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11289E1
os_restr1_imon=4.30618E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15728E1
os_ea1_imon=2.44292E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63613E1
os_ef1bup_imon=3.08202E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24236E0
cs_ionrep_imon=9.56828E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01974E1
cs_anode1_imon=2.03416E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99976E1
olens4_imon=4.3853E-9
tplens_vset=0.0E0
tplens_vmon=-1.60769E0
tplens_imon=-3.32512E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.02322E1
iondef3_imon=8.82465E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98562E1
iondef2_imon=9.2023E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02883E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=8.2289E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29233E0
ionrepsh_imon=9.3814E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33353E1
lens5b_imon=2.1587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74406E1
cs_ef2b_imon=3.12018E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.25534E0
os_ea2_imon=-4.57099E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06032E2
lens4b_imon=2.00354E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71283E1
cs_ef2a_imon=3.18314E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05806E0
os_ef2alow_imon=-2.79461E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.7898E-1
os_ef2bup_imon=-5.33223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10958E1
os_restr2_imon=3.36707E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23102E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01739E1
cs_anode2_imon=2.09407E-5
iondef1_vset=1.6E1
iondef1_vmon=1.59151E1
iondef1_imon=4.84175E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49935E1
iondef4_imon=5.11588E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.68466E-8
olens1_vset=0.0E0
olens1_vmon=1.21593E-3
olens1_imon=1.23412E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14159E0
cs_ionaccel_imon=-1.02782E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.4718E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56106E1
einzel_imon=7.63823E-6
window_vset=0.0E0
window_vmon=1.8148E-1
window_imon=-1.26441E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39115E-4
mask2_vset=0.0E0
mask2_vmon=-1.86179E1
mask2_imon=-8.14128E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.78902E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.64048E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=6.92859E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39374E0
defgridb_imon=5.92021E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33159E1
os_fil1_imon=9.41504E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07336E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60817E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30499E1
cs_fil1_imon=9.22609E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.26368E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6311E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.45599E-2
os_fil2_imon=-2.90871E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87397E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.78686E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36575E-1
cs_fil2_imon=-2.86419E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.2918E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21451E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40077E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.20171E-1
res40_imon=-2.65724E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.49E2	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80027E1	-1.14441E-3	-8.80001E1	9.53674E-5	4.69685E-3	9.36031E-2	1.57861E1	-1.98224E1	-1.98609E1	1.501E1	2.15872E-9	2.5199E-3	2.5199E-3	6.3016E-3	2.16512E-2
2.0E0	1.7E2	0.0E0	3.16E2	1.6E2	-7.47149E-2	-8.80023E1	-1.35899E-3	-8.80003E1	7.15256E-5	4.76837E-3	9.3627E-2	1.5835E1	-1.98337E1	-2.00883E1	1.50029E1	2.15808E-9	2.52276E-3	2.52276E-3	6.28056E-3	2.16621E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80028E1	-1.14441E-3	-8.80003E1	4.76837E-4	4.8399E-3	9.33409E-2	1.57973E1	-1.9849E1	-1.99273E1	1.49843E1	2.16074E-9	2.51838E-3	2.51838E-3	6.31879E-3	2.15858E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80025E1	-1.26362E-3	-8.80004E1	3.33786E-4	4.81606E-3	9.35078E-2	1.57825E1	-1.98711E1	-2.00291E1	1.50094E1	2.15754E-9	2.51523E-3	2.51523E-3	6.33253E-3	2.16715E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80027E1	-1.3113E-3	-8.80002E1	2.6226E-4	5.07832E-3	9.35793E-2	1.58315E1	-1.98605E1	-1.99644E1	1.49836E1	2.15613E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.16313E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80027E1	-1.09673E-3	-8.80003E1	3.33786E-4	5.126E-3	9.34601E-2	1.57926E1	-1.98328E1	-1.99461E1	1.50016E1	2.158E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.16878E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80026E1	-8.82149E-4	-8.80003E1	2.86102E-4	5.14984E-3	9.36031E-2	1.58179E1	-1.9835E1	-2.00201E1	1.50238E1	2.159E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.16436E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80028E1	-7.86781E-4	-8.80003E1	2.6226E-4	5.07832E-3	9.36747E-2	1.57743E1	-1.98611E1	-1.99744E1	1.49871E1	2.15425E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.16125E-2
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.44059E-2	-8.80027E1	-1.21593E-3	-8.80003E1	3.33786E-4	5.126E-3	9.33886E-2	1.57879E1	-1.98368E1	-1.98639E1	1.5031E1	2.15624E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.17361E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.44059E-2	-8.8003E1	-1.12057E-3	-8.80003E1	5.48363E-4	4.81606E-3	9.34839E-2	1.57732E1	-1.98569E1	-2.00045E1	1.50291E1	2.15332E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.18011E-2
1.4E1	9.0E0	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.8003E1	-1.43051E-3	-8.80002E1	1.43051E-4	5.07832E-3	9.36985E-2	1.58004E1	-1.98739E1	-1.99695E1	1.50057E1	2.158E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.16125E-2
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80029E1	-1.19209E-3	-8.80003E1	2.38419E-5	4.98295E-3	9.36508E-2	1.58124E1	-1.98612E1	-1.98796E1	1.49764E1	2.15833E-9	2.52117E-3	2.52117E-3	6.32652E-3	2.17517E-2
1.6E1	1.8E1	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80028E1	-1.40667E-3	-8.80004E1	1.90735E-4	5.10216E-3	9.33647E-2	1.58445E1	-1.98753E1	-1.99732E1	1.4986E1	2.15409E-9	2.51693E-3	2.51693E-3	6.31299E-3	2.15612E-2
1.7E1	4.9E1	0.0E0	6.87E2	4.7E2	-7.42513E-2	-8.80024E1	-1.3113E-3	-8.8E1	4.76837E-5	5.14984E-3	9.32693E-2	1.57477E1	-1.98653E1	-1.99909E1	1.5001E1	2.15808E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.16621E-2
1.8E1	1.73E2	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80027E1	-1.23978E-3	-8.8E1	1.90735E-4	5.29289E-3	9.35078E-2	1.58256E1	-1.98653E1	-1.99437E1	1.5013E1	2.15716E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.16621E-2
1.9E1	3.55E2	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80024E1	-1.00136E-3	-8.80001E1	1.43051E-4	5.03063E-3	9.36031E-2	1.57861E1	-1.98428E1	-1.98711E1	1.49926E1	2.15808E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.17176E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80028E1	-1.26362E-3	-8.80002E1	4.76837E-5	4.76837E-3	9.35793E-2	1.57885E1	-1.98881E1	-2.0002E1	1.50154E1	2.15716E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.18477E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.45602E-2	-8.80027E1	-1.14441E-3	-8.79999E1	3.57628E-4	4.76837E-3	9.29594E-2	1.58105E1	-1.9856E1	-1.98936E1	1.50036E1	2.15409E-9	2.52473E-3	2.52473E-3	6.31299E-3	2.18108E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80026E1	-1.33514E-3	-8.80002E1	2.38419E-4	5.19753E-3	9.31025E-2	1.5808E1	-1.98524E1	-2.00391E1	1.49849E1	2.15632E-9	2.5266E-3	2.5266E-3	6.31113E-3	2.17209E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80028E1	-9.05991E-4	-8.80001E1	2.6226E-4	4.76837E-3	9.32693E-2	1.59151E1	-1.98562E1	-2.02322E1	1.49935E1					
