[Scan]
initial_time=2016-01-28T16:10:49
final_time=2016-01-28T16:11:09
ip_count=19
run=1026
dataset=1
scan=65
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.75409E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-5.68295E-10
ql2_vset=
ql2_vmon=-1.23978E-3
ql2_imon=1.21896E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.37491E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.42266E-8
mult1=-9.32059E-9
mult2=-2.87069E-9
rf_tmon=-5.70937E-3
rf_agc=3.21149E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=6.05917E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65198E0
bslens_imon=2.52469E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1997E1
lens5a_imon=1.97987E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.0477E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53478E1
cs_ef1b_imon=3.09803E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04571E2
lens23_imon=1.02216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05208E1
cs_ea1_imon=1.2394E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06961E0
lens1_imon=1.53299E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03892E1
cs_ea2_imon=1.40652E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=3.00649E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.03099E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.30968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15453E1
os_ea1_imon=2.40777E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21904E0
cs_ionrep_imon=9.60251E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93358E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=2.04927E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.39981E-9
tplens_vset=0.0E0
tplens_vmon=-1.59919E0
tplens_imon=-3.76954E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00125E1
iondef3_imon=8.77242E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98512E1
iondef2_imon=9.48497E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02848E2
lens6_imon=2.98283E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=8.28493E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26801E0
ionrepsh_imon=9.36377E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33541E1
lens5b_imon=2.18004E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26189E0
os_ea2_imon=-8.76479E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00542E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71017E1
cs_ef2a_imon=3.17371E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05276E0
os_ef2alow_imon=-2.69879E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60784E-1
os_ef2bup_imon=-5.36933E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.36869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.30332E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.09865E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57925E1
iondef1_imon=4.9158E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49981E1
iondef4_imon=5.18669E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.68442E-8
olens1_vset=0.0E0
olens1_vmon=1.04904E-3
olens1_imon=1.23911E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.12746E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47179E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=1.54874E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.6742E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.44375E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=6.98001E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39436E0
defgridb_imon=5.88179E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3316E1
os_fil1_imon=9.3866E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0671E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61295E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3045E1
cs_fil1_imon=9.22953E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.26739E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62764E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37084E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.60893E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.6059E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21424E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.16252E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.81226E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.26E2	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80022E1	-1.26362E-3	-8.8E1	0.0E0	4.72069E-3	9.36031E-2	1.58067E1	-1.98647E1	-1.98918E1	1.4986E1	2.15987E-9	2.52867E-3	2.52867E-3	6.31288E-3	2.16501E-2
2.0E0	1.74E2	0.0E0	3.16E2	1.6E2	-7.19325E-2	-8.80024E1	-1.43051E-3	-8.80004E1	-1.43051E-4	5.17368E-3	9.31501E-2	1.58209E1	-1.98326E1	-1.98452E1	1.49956E1	2.15987E-9	2.51662E-3	2.51662E-3	6.3514E-3	2.16313E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80024E1	-1.33514E-3	-8.8E1	-1.90735E-4	4.76837E-3	9.31263E-2	1.57554E1	-1.98641E1	-2.0018E1	1.50033E1	2.15894E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.16313E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80028E1	-1.12057E-3	-8.80001E1	1.90735E-4	4.79221E-3	9.34124E-2	1.58029E1	-1.98903E1	-2.00111E1	1.50112E1	2.15726E-9	2.51393E-3	2.51393E-3	6.32858E-3	2.17282E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80027E1	-1.35899E-3	-8.80003E1	2.38419E-4	5.126E-3	9.32932E-2	1.57802E1	-1.98611E1	-2.00204E1	1.50118E1	2.158E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.16501E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80026E1	-1.64509E-3	-8.80001E1	4.76837E-5	5.36442E-3	9.31501E-2	1.58353E1	-1.98338E1	-1.98416E1	1.5004E1	2.15425E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.17066E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80028E1	-1.38283E-3	-8.80003E1	-1.19209E-4	5.05447E-3	9.30786E-2	1.58323E1	-1.98651E1	-1.97954E1	1.50394E1	2.16081E-9	2.52099E-3	2.52099E-3	6.34588E-3	2.16125E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80026E1	-1.45435E-3	-8.80003E1	9.53674E-5	5.07832E-3	9.3317E-2	1.57849E1	-1.98531E1	-1.98867E1	1.50286E1	2.15613E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.16501E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80025E1	-1.52588E-3	-8.80004E1	4.05312E-4	5.19753E-3	9.31978E-2	1.58038E1	-1.98514E1	-1.9961E1	1.50046E1	2.15425E-9	2.51334E-3	2.51334E-3	6.31288E-3	2.16878E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80026E1	-1.64509E-3	-8.80001E1	5.72205E-4	4.98295E-3	9.3174E-2	1.58073E1	-1.98458E1	-2.00493E1	1.49987E1	2.15613E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.16501E-2
1.4E1	1.6E1	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80024E1	-1.14441E-3	-8.80006E1	4.52995E-4	4.86374E-3	9.34124E-2	1.57801E1	-1.98513E1	-2.00796E1	1.50004E1	2.15716E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.16067E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80025E1	-1.04904E-3	-8.80004E1	2.86102E-4	5.00679E-3	9.31025E-2	1.58329E1	-1.9835E1	-1.99924E1	1.49896E1	2.15314E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.16569E-2
1.6E1	2.9E1	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80025E1	-1.23978E-3	-8.80001E1	2.14577E-4	4.88758E-3	9.31263E-2	1.58067E1	-1.98446E1	-1.98411E1	1.49912E1	2.15808E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.15699E-2
1.7E1	4.4E1	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80027E1	-1.16825E-3	-8.80003E1	2.14577E-4	5.10216E-3	9.3174E-2	1.58107E1	-1.98999E1	-2.00724E1	1.4983E1	2.15624E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.16436E-2
1.8E1	1.85E2	0.0E0	7.27E2	5.0E2	-7.40967E-2	-8.80025E1	-1.33514E-3	-8.79999E1	1.43051E-4	4.673E-3	9.31501E-2	1.58239E1	-1.98669E1	-2.01174E1	1.50034E1	2.156E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.16377E-2
1.9E1	3.48E2	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80026E1	-1.35899E-3	-8.8E1	1.43051E-4	4.86374E-3	9.33647E-2	1.57807E1	-1.98392E1	-1.99762E1	1.50106E1	2.15706E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.16689E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80026E1	-1.45435E-3	-8.8E1	2.86102E-4	4.81606E-3	9.33647E-2	1.58227E1	-1.98909E1	-1.99252E1	1.50437E1	2.15894E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.16313E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80026E1	-1.35899E-3	-8.8E1	2.14577E-4	5.10216E-3	9.34362E-2	1.58145E1	-1.98672E1	-2.00781E1	1.499E1	2.15992E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.17176E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80026E1	-1.4782E-3	-8.80002E1	1.90735E-4	5.07832E-3	9.35555E-2	1.57686E1	-1.99137E1	-2.0133E1	1.5016E1	2.15533E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.16252E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80029E1	-1.23978E-3	-8.80003E1	1.90735E-4	4.79221E-3	9.32693E-2	1.57925E1	-1.98512E1	-2.00125E1	1.49981E1	2.15716E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.16252E-2
