[Scan]
initial_time=2016-01-28T16:11:16
final_time=2016-01-28T16:11:36
ip_count=19
run=1026
dataset=1
scan=66
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.45602E-2
qbias_imon=-3.78849E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-5.54883E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.14367E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.42156E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.42519E-8
mult1=-9.57182E-9
mult2=-2.7226E-9
rf_tmon=-3.10048E-3
rf_agc=3.38443E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=5.90444E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.59183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.98019E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.04985E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53832E1
cs_ef1b_imon=3.09767E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.01966E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0488E1
cs_ea1_imon=1.25523E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05998E0
lens1_imon=1.51034E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64488E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04141E1
cs_ea2_imon=1.41349E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=3.00288E-5
olens2_vset=0.0E0
olens2_vmon=9.29832E-4
olens2_imon=1.03555E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=4.31689E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14951E1
os_ea1_imon=2.39656E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.06235E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=9.73684E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=2.0536E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.38833E-9
tplens_vset=0.0E0
tplens_vmon=-1.6174E0
tplens_imon=-4.00285E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.0133E1
iondef3_imon=8.65536E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98741E1
iondef2_imon=9.38356E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=8.21245E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26772E0
ionrepsh_imon=9.42682E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.1763E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28514E0
os_ea2_imon=-6.81471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.0054E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08399E0
os_ef2alow_imon=-2.82853E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64388E-1
os_ef2bup_imon=-5.49186E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.3795E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.31695E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.09721E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57909E1
iondef1_imon=5.12611E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49992E1
iondef4_imon=5.17588E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.6909E-8
olens1_vset=0.0E0
olens1_vmon=1.21593E-3
olens1_imon=1.24085E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-1.03015E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47071E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56129E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=1.63283E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-8.10312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.33594E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.69426E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.06197E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.14271E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33202E1
os_fil1_imon=9.41771E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07221E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61131E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30447E1
cs_fil1_imon=9.2207E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.24337E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6295E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.73447E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.90023E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33443E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21452E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.15515E-2
chamber_ion_pmon=2.159E-9
chamber_cvt_pmon=2.53031E-3
foreline_cvt_pmon=2.53031E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.99827E-1
res40_imon=-2.64833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.45E2	0.0E0	1.47E2	4.1E1	-7.39421E-2	-8.80026E1	-1.14441E-3	-8.80004E1	-2.38419E-5	4.98295E-3	9.32693E-2	1.57779E1	-1.98665E1	-1.9889E1	1.50076E1	2.15533E-9	2.51525E-3	2.51525E-3	6.28592E-3	2.16806E-2
2.0E0	1.68E2	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80028E1	-1.14441E-3	-8.80004E1	1.19209E-4	5.03063E-3	9.3317E-2	1.58165E1	-1.98597E1	-1.97948E1	1.50087E1	2.15925E-9	2.52224E-3	2.52224E-3	6.29738E-3	2.15855E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80027E1	-1.50204E-3	-8.80006E1	-7.15256E-5	4.52995E-3	9.30786E-2	1.5825E1	-1.98546E1	-1.98393E1	1.501E1	2.15752E-9	2.51347E-3	2.51347E-3	6.3074E-3	2.16866E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80028E1	-1.4782E-3	-8.80004E1	9.53674E-5	4.60148E-3	9.34601E-2	1.57926E1	-1.98523E1	-1.99709E1	1.49941E1	2.16088E-9	2.52448E-3	2.52448E-3	6.32328E-3	2.16192E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80026E1	-9.29832E-4	-8.80004E1	9.53674E-5	4.81606E-3	9.3174E-2	1.58246E1	-1.98386E1	-2.00179E1	1.4982E1	2.15519E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.16125E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80026E1	-1.04904E-3	-8.80005E1	1.43051E-4	4.76837E-3	9.33647E-2	1.58174E1	-1.98552E1	-2.00924E1	1.49933E1	2.158E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.16501E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80025E1	-1.21593E-3	-8.80001E1	1.66893E-4	5.07832E-3	9.30786E-2	1.5802E1	-1.98514E1	-1.9909E1	1.49985E1	2.15613E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.16878E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80023E1	-1.09673E-3	-8.80002E1	2.38419E-4	5.19753E-3	9.31025E-2	1.5768E1	-1.98416E1	-1.99324E1	1.49986E1	2.15696E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.16377E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80025E1	-7.62939E-4	-8.80002E1	5.24521E-4	4.95911E-3	9.35078E-2	1.58029E1	-1.98573E1	-2.00105E1	1.50022E1	2.15624E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.16991E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80027E1	-1.0252E-3	-8.8E1	4.52995E-4	4.57764E-3	9.36508E-2	1.58209E1	-1.98682E1	-2.0041E1	1.49976E1	2.15425E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.18011E-2
1.4E1	8.0E0	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80027E1	-1.00136E-3	-8.80002E1	5.24521E-4	4.74453E-3	9.34124E-2	1.57945E1	-1.98627E1	-2.01132E1	1.50172E1	2.15533E-9	2.51203E-3	2.51203E-3	6.32896E-3	2.16621E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80023E1	-1.19209E-3	-8.80004E1	5.00679E-4	5.00679E-3	9.34124E-2	1.58185E1	-1.98558E1	-1.9926E1	1.50022E1	2.15987E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.17444E-2
1.6E1	2.0E1	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80026E1	-1.19209E-3	-8.80004E1	2.38419E-4	4.41074E-3	9.33886E-2	1.57861E1	-1.98224E1	-1.98705E1	1.4986E1	2.15624E-9	2.52599E-3	2.52599E-3	6.35059E-3	2.15883E-2
1.7E1	3.5E1	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80025E1	-1.23978E-3	-8.80003E1	0.0E0	4.81606E-3	9.33647E-2	1.5756E1	-1.98302E1	-2.00117E1	1.50184E1	2.15987E-9	2.52428E-3	2.52428E-3	6.28552E-3	2.16313E-2
1.8E1	2.02E2	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80026E1	-1.26362E-3	-8.80003E1	2.38419E-4	4.50611E-3	9.3174E-2	1.57902E1	-1.98771E1	-1.99526E1	1.49918E1	2.15987E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.16501E-2
1.9E1	3.82E2	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80027E1	-1.38283E-3	-8.79999E1	2.38419E-4	4.57764E-3	9.3174E-2	1.58383E1	-1.98368E1	-1.99282E1	1.50076E1	2.15987E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.16313E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80026E1	-1.14441E-3	-8.8E1	1.19209E-4	4.64916E-3	9.32693E-2	1.58221E1	-1.98458E1	-1.99822E1	1.50214E1	2.16085E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.16067E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80026E1	-7.86781E-4	-8.80002E1	0.0E0	4.50611E-3	9.3627E-2	1.57987E1	-1.98651E1	-1.9841E1	1.50022E1	2.16034E-9	2.5188E-3	2.5188E-3	6.31563E-3	2.16972E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80028E1	-8.82149E-4	-8.80004E1	-2.38419E-5	4.8399E-3	9.31501E-2	1.58186E1	-1.98678E1	-1.99002E1	1.50039E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.45602E-2	-8.80027E1	-8.82149E-4	-8.80002E1	1.90735E-4	4.81606E-3	9.3174E-2	1.57909E1	-1.98741E1	-2.0133E1	1.49992E1	2.159E-9	2.53031E-3	2.53031E-3	6.32356E-3	2.15515E-2
