[Scan]
initial_time=2016-01-28T16:12:09
final_time=2016-01-28T16:12:29
ip_count=19
run=1026
dataset=1
scan=68
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.74987E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.71311E-10
ql2_vset=
ql2_vmon=-1.21593E-3
ql2_imon=1.23646E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.428E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.41903E-8
mult1=-9.13177E-9
mult2=-2.68125E-9
rf_tmon=-5.32354E-3
rf_agc=3.25754E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=5.97262E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67335E0
bslens_imon=2.55938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19809E1
lens5a_imon=1.98271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=3.10199E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.01937E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05084E1
cs_ea1_imon=1.25163E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05097E0
lens1_imon=1.54639E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.39835E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.99567E-5
olens2_vset=0.0E0
olens2_vmon=9.05991E-4
olens2_imon=1.03455E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=4.3104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=2.40954E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24849E0
cs_ionrep_imon=9.74045E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.9324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.05828E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.45533E-9
tplens_vset=0.0E0
tplens_vmon=-1.59337E0
tplens_imon=-3.6063E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99775E1
iondef3_imon=8.7599E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98404E1
iondef2_imon=9.43403E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=8.02231E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=9.3403E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33363E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74465E1
cs_ef2b_imon=3.11749E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26171E0
os_ea2_imon=-5.40878E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00428E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03173E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5778E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11021E1
os_restr2_imon=3.37625E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30217E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.08964E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58283E1
iondef1_imon=5.37846E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49972E1
iondef4_imon=5.14704E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.68412E-8
olens1_vset=0.0E0
olens1_vmon=1.21593E-3
olens1_imon=1.23868E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-1.19594E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47078E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55973E1
einzel_imon=7.44277E-6
window_vset=0.0E0
window_vmon=1.53072E-1
window_imon=-1.08782E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.39016E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9275E3
multa_neg_imon=6.75555E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.64379E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.09441E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=5.85791E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33188E1
os_fil1_imon=9.41549E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07215E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60869E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30493E1
cs_fil1_imon=9.22658E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29262E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6317E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.89946E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.68999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2151E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.16991E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.572E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=230
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.39E2	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80026E1	-1.21593E-3	-8.80003E1	1.90735E-4	4.88758E-3	9.3317E-2	1.58376E1	-1.98507E1	-2.00258E1	1.49983E1	2.15613E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.18011E-2
2.0E0	1.78E2	0.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80028E1	-1.07288E-3	-8.80001E1	4.76837E-5	5.03063E-3	9.31025E-2	1.5784E1	-1.98654E1	-1.98905E1	1.49945E1	2.15832E-9	2.52364E-3	2.52364E-3	6.3023E-3	2.1678E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80027E1	-9.77516E-4	-8.8E1	7.15256E-5	4.69685E-3	9.29832E-2	1.58044E1	-1.98541E1	-2.00039E1	1.50112E1	2.15762E-9	2.52029E-3	2.52029E-3	6.30149E-3	2.16787E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80026E1	-9.53674E-4	-8.80001E1	1.66893E-4	4.74453E-3	9.33409E-2	1.57608E1	-1.98837E1	-1.99167E1	1.50334E1	2.15624E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.16067E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80032E1	-8.82149E-4	-8.80005E1	2.6226E-4	4.93526E-3	9.33647E-2	1.58017E1	-1.98927E1	-1.99149E1	1.50052E1	2.15519E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.1575E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80024E1	-7.15256E-4	-8.80003E1	1.90735E-4	4.55379E-3	9.36031E-2	1.57837E1	-1.9857E1	-2.01006E1	1.49999E1	2.15791E-9	2.52139E-3	2.52139E-3	6.32418E-3	2.16952E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80025E1	-8.34465E-4	-8.80002E1	3.57628E-4	4.64916E-3	9.35078E-2	1.58056E1	-1.98551E1	-1.9931E1	1.50147E1	2.159E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.15699E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80024E1	-1.0252E-3	-8.80006E1	3.33786E-4	5.07832E-3	9.33647E-2	1.58451E1	-1.98541E1	-1.98859E1	1.50074E1	2.158E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.16878E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80024E1	-1.07288E-3	-8.80005E1	4.29153E-4	4.98295E-3	9.35316E-2	1.5768E1	-1.99047E1	-1.99654E1	1.50118E1	2.15716E-9	2.52599E-3	2.52599E-3	6.33436E-3	2.16067E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.42513E-2	-8.80023E1	-1.21593E-3	-8.80005E1	5.00679E-4	5.19753E-3	9.34124E-2	1.58197E1	-1.98517E1	-1.98706E1	1.49926E1	2.15894E-9	2.51443E-3	2.51443E-3	6.29645E-3	2.17822E-2
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-7.43285E-2	-8.80025E1	-1.3113E-3	-8.80003E1	2.6226E-4	5.00679E-3	9.32932E-2	1.57616E1	-1.98661E1	-1.99879E1	1.5022E1	2.15425E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.17255E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80024E1	-1.09673E-3	-8.80002E1	3.09944E-4	4.98295E-3	9.31025E-2	1.58103E1	-1.98263E1	-1.99307E1	1.50004E1	2.158E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.16125E-2
1.6E1	2.1E1	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80026E1	-9.53674E-4	-8.80005E1	-4.76837E-5	4.95911E-3	9.32932E-2	1.58365E1	-1.98693E1	-1.99197E1	1.50034E1	2.159E-9	2.52599E-3	2.52599E-3	6.32356E-3	2.17918E-2
1.7E1	4.2E1	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80026E1	-8.58307E-4	-8.80001E1	7.15256E-5	4.72069E-3	9.3317E-2	1.58329E1	-1.99648E1	-2.00147E1	1.50294E1	2.15706E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.16689E-2
1.8E1	1.88E2	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80027E1	-1.19209E-3	-8.80003E1	-2.38419E-5	4.76837E-3	9.34601E-2	1.58315E1	-1.98582E1	-1.99797E1	1.50527E1	2.15706E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.16313E-2
1.9E1	3.41E2	1.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80026E1	-1.3113E-3	-8.80005E1	9.53674E-5	4.88758E-3	9.33647E-2	1.58275E1	-1.9826E1	-1.99774E1	1.50058E1	2.15808E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.17547E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80028E1	-8.82149E-4	-8.80003E1	2.14577E-4	5.03063E-3	9.30786E-2	1.57218E1	-1.97713E1	-1.99089E1	1.50136E1	2.15887E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.17915E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80025E1	-1.04904E-3	-8.80003E1	3.8147E-4	5.05447E-3	9.30548E-2	1.58427E1	-1.98387E1	-1.99632E1	1.5016E1	2.15716E-9	2.52815E-3	2.52815E-3	6.30202E-3	2.16991E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80025E1	-9.53674E-4	-8.80006E1	-9.53674E-5	5.29289E-3	9.3317E-2	1.57318E1	-1.98924E1	-1.99614E1	1.50074E1	2.15441E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.17361E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80023E1	-1.21593E-3	-8.80003E1	2.38419E-5	4.93526E-3	9.32693E-2	1.58283E1	-1.98404E1	-1.99775E1	1.49972E1	2.15716E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.16991E-2
