[Scan]
initial_time=2016-01-28T16:13:03
final_time=2016-01-28T16:13:22
ip_count=19
run=1026
dataset=1
scan=70
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.75844E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-5.38099E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.23833E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.46003E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=1.42135E-8
mult1=-9.66486E-9
mult2=-2.73306E-9
rf_tmon=-4.50358E-3
rf_agc=3.40996E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=6.06918E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6538E0
bslens_imon=2.51612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20146E1
lens5a_imon=1.98721E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12444E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53368E1
cs_ef1b_imon=3.11201E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02255E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05204E1
cs_ea1_imon=1.24747E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08617E0
lens1_imon=1.24888E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64658E1
os_ef1alow_imon=2.95969E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03767E1
cs_ea2_imon=1.4242E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84201E1
cs_ef1a_imon=2.99637E-5
olens2_vset=0.0E0
olens2_vmon=9.05991E-4
olens2_imon=1.0335E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11223E1
os_restr1_imon=4.31376E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=2.42654E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63698E1
os_ef1bup_imon=3.07122E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26609E0
cs_ionrep_imon=9.58904E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91854E2
cs_nozzle_imon=1.93363E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02121E1
cs_anode1_imon=2.05698E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.39605E-9
tplens_vset=0.0E0
tplens_vmon=-1.63825E0
tplens_imon=-2.93196E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99166E1
iondef3_imon=8.65387E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98611E1
iondef2_imon=9.38292E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98418E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=7.97379E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24574E0
ionrepsh_imon=9.23788E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33626E1
lens5b_imon=2.15516E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74532E1
cs_ef2b_imon=3.09143E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22411E0
os_ea2_imon=-5.71838E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00516E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71439E1
cs_ef2a_imon=3.18649E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05269E0
os_ef2alow_imon=-2.54812E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47107E-1
os_ef2bup_imon=-5.27272E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11105E1
os_restr2_imon=3.3478E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.29585E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.10002E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58557E1
iondef1_imon=4.81015E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5013E1
iondef4_imon=5.45726E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.68687E-8
olens1_vset=0.0E0
olens1_vmon=1.33514E-3
olens1_imon=1.24251E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18753E0
cs_ionaccel_imon=-1.15962E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02025E2
cs_ionfocb_imon=1.4729E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.39218E-6
window_vset=0.0E0
window_vmon=1.80171E-1
window_imon=-9.23837E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.38991E-4
mask2_vset=0.0E0
mask2_vmon=-1.86419E1
mask2_imon=-8.45243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92602E3
multa_neg_imon=8.44012E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.33313E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.36372E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30904E0
defgridb_imon=6.08121E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33169E1
os_fil1_imon=9.42994E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06961E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61004E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30412E1
cs_fil1_imon=9.22391E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.41987E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63045E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.66874E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.62899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.65971E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33954E-1
cs_fil2_imon=-2.29448E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49176E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21421E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=2.17633E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28622E-1
res40_imon=-2.50695E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.61E2	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80026E1	-1.26362E-3	-8.80005E1	-2.38419E-5	4.95911E-3	9.30548E-2	1.58029E1	-1.98313E1	-1.98712E1	1.50115E1	2.1617E-9	2.5199E-3	2.5199E-3	6.29581E-3	2.16512E-2
2.0E0	1.54E2	0.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80025E1	-1.16825E-3	-8.80001E1	4.76837E-5	4.98295E-3	9.32455E-2	1.5821E1	-1.98893E1	-2.00731E1	1.49848E1	2.15533E-9	2.51203E-3	2.51203E-3	6.34518E-3	2.16621E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80026E1	-1.23978E-3	-8.80003E1	-3.57628E-4	5.14984E-3	9.31978E-2	1.581E1	-1.98787E1	-1.98724E1	1.5001E1	2.15505E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.15994E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80028E1	-1.07288E-3	-8.80005E1	2.38419E-5	5.126E-3	9.34839E-2	1.57975E1	-1.98699E1	-1.9975E1	1.5007E1	2.15726E-9	2.52131E-3	2.52131E-3	6.30212E-3	2.16374E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80027E1	-9.53674E-4	-8.80004E1	-4.29153E-4	4.64916E-3	9.3317E-2	1.57902E1	-1.98853E1	-1.99602E1	1.50298E1	2.15706E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.16125E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80028E1	-1.19209E-3	-8.80001E1	0.0E0	4.74453E-3	9.33886E-2	1.58263E1	-1.98699E1	-1.99618E1	1.49968E1	2.15716E-9	2.52384E-3	2.52384E-3	6.33436E-3	2.16806E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80026E1	-1.26362E-3	-8.80002E1	0.0E0	4.8399E-3	9.35078E-2	1.57891E1	-1.98831E1	-1.993E1	1.50142E1	2.15613E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.17255E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80028E1	-1.33514E-3	-8.8E1	4.76837E-5	4.98295E-3	9.32455E-2	1.57686E1	-1.98567E1	-2.00105E1	1.49842E1	2.15613E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.1575E-2
1.2E1	7.0E0	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80026E1	-1.52588E-3	-8.80002E1	-1.90735E-4	4.98295E-3	9.30071E-2	1.57993E1	-1.98591E1	-1.99955E1	1.50099E1	2.15987E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.17444E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.80027E1	-1.35899E-3	-8.80001E1	-1.66893E-4	4.76837E-3	9.31501E-2	1.58185E1	-1.98657E1	-1.98801E1	1.50146E1	2.158E-9	2.52099E-3	2.52099E-3	6.28006E-3	2.16689E-2
1.4E1	1.1E1	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80028E1	-1.38283E-3	-8.80003E1	4.76837E-5	4.8399E-3	9.28879E-2	1.57938E1	-1.98564E1	-2.00422E1	1.49764E1	2.15706E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.15938E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80028E1	-1.33514E-3	-8.8E1	-9.53674E-5	5.03063E-3	9.30786E-2	1.57921E1	-1.98452E1	-1.99943E1	1.50064E1	2.159E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.17547E-2
1.6E1	2.2E1	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.8003E1	-1.35899E-3	-8.79997E1	4.76837E-5	4.72069E-3	9.31978E-2	1.57595E1	-1.98505E1	-1.99154E1	1.49836E1	2.15706E-9	2.51116E-3	2.51116E-3	6.32936E-3	2.17633E-2
1.7E1	4.3E1	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80029E1	-1.00136E-3	-8.79996E1	1.19209E-4	4.86374E-3	9.3317E-2	1.57188E1	-1.97852E1	-2.00772E1	1.49734E1	2.15992E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.15515E-2
1.8E1	2.11E2	1.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80027E1	-1.23978E-3	-8.79997E1	2.86102E-4	4.86374E-3	9.31263E-2	1.58142E1	-1.98721E1	-1.99265E1	1.49764E1	2.15613E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17822E-2
1.9E1	3.56E2	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80027E1	-1.40667E-3	-8.8E1	2.6226E-4	4.8399E-3	9.31025E-2	1.58179E1	-1.98663E1	-2.00736E1	1.49782E1	2.15841E-9	2.52101E-3	2.52101E-3	6.31157E-3	2.17795E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80028E1	-8.34465E-4	-8.80003E1	1.43051E-4	5.10216E-3	9.29594E-2	1.57771E1	-1.9924E1	-1.9978E1	1.50124E1	2.15566E-9	2.51498E-3	2.51498E-3	6.29098E-3	2.16595E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80028E1	-8.82149E-4	-8.80002E1	-7.15256E-5	5.05447E-3	9.33647E-2	1.57896E1	-1.98517E1	-1.99832E1	1.49926E1	2.158E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.16689E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80026E1	-1.16825E-3	-8.80005E1	-2.38419E-5	5.26905E-3	9.3317E-2	1.5765E1	-1.98483E1	-2.00237E1	1.49976E1	2.15624E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.16621E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80027E1	-1.04904E-3	-8.80003E1	-7.15256E-5	5.29289E-3	9.33647E-2	1.58557E1	-1.98611E1	-1.99166E1	1.5013E1	2.158E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.17633E-2
