[Scan]
initial_time=2016-01-28T16:13:29
final_time=2016-01-28T16:13:49
ip_count=19
run=1026
dataset=1
scan=71
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.77221E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-5.78487E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.23045E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.46382E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.41932E-8
mult1=-9.27081E-9
mult2=-2.69665E-9
rf_tmon=-3.90559E-3
rf_agc=3.42829E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=6.06716E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.44402E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19917E1
lens5a_imon=1.97838E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=3.09226E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04934E1
cs_ea1_imon=1.23504E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05157E0
lens1_imon=1.32288E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64993E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04249E1
cs_ea2_imon=1.41277E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=3.00649E-5
olens2_vset=0.0E0
olens2_vmon=9.29832E-4
olens2_imon=1.03323E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.31725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15246E1
os_ea1_imon=2.42612E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24248E0
cs_ionrep_imon=9.52776E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.03233E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.47989E-9
tplens_vset=0.0E0
tplens_vmon=-1.59277E0
tplens_imon=-3.49815E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99246E1
iondef3_imon=8.75269E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98777E1
iondef2_imon=9.25018E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=8.07369E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25931E0
ionrepsh_imon=9.29344E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3352E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2503E0
os_ea2_imon=-7.2473E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08099E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6679E-1
os_ef2bup_imon=-5.45582E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10703E1
os_restr2_imon=3.36472E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.2863E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.09576E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57879E1
iondef1_imon=5.16576E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50106E1
iondef4_imon=5.14344E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=2.68356E-8
olens1_vset=0.0E0
olens1_vmon=1.00136E-3
olens1_imon=1.24306E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11272E0
cs_ionaccel_imon=-9.32847E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47129E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55991E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=1.80102E-1
window_imon=-1.22477E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39315E-4
mask2_vset=0.0E0
mask2_vmon=-1.85984E1
mask2_imon=-7.995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9268E3
multa_neg_imon=7.5198E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.48878E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.03673E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23615E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33191E1
os_fil1_imon=9.38714E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06795E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61199E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30514E1
cs_fil1_imon=9.23025E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30223E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63178E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.71127E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.58671E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21398E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.17822E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09147E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.39E2	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80024E1	-1.14441E-3	-8.80002E1	-4.76837E-5	5.36442E-3	9.31978E-2	1.57814E1	-1.98369E1	-2.00688E1	1.49926E1	2.158E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.17255E-2
2.0E0	1.53E2	0.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80027E1	-8.10623E-4	-8.79999E1	-1.43051E-4	5.10216E-3	9.35078E-2	1.58007E1	-1.98343E1	-1.99836E1	1.50094E1	2.15716E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.17732E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.8003E1	-6.19888E-4	-8.79997E1	1.19209E-4	4.93526E-3	9.30786E-2	1.58109E1	-1.98688E1	-1.99237E1	1.50184E1	2.15696E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.17915E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.8003E1	-1.19209E-3	-8.79997E1	-7.15256E-5	5.31673E-3	9.35078E-2	1.57867E1	-1.98573E1	-2.00946E1	1.49976E1	2.15716E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.16436E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80027E1	-1.26362E-3	-8.80001E1	2.86102E-4	5.03063E-3	9.31978E-2	1.58433E1	-1.988E1	-1.99184E1	1.50046E1	2.158E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.1575E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.8003E1	-1.12057E-3	-8.80002E1	-1.19209E-4	5.29289E-3	9.31263E-2	1.5815E1	-1.987E1	-1.99083E1	1.50132E1	2.15992E-9	2.5131E-3	2.5131E-3	6.30202E-3	2.16436E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.8003E1	-8.34465E-4	-8.8E1	2.14577E-4	5.00679E-3	9.32455E-2	1.57837E1	-1.98561E1	-1.99474E1	1.5011E1	2.15716E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.17732E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80028E1	-9.77516E-4	-8.80001E1	2.38419E-5	5.24521E-3	9.34839E-2	1.58268E1	-1.98511E1	-2.00021E1	1.50201E1	2.15706E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.18011E-2
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80024E1	-1.00136E-3	-8.8E1	1.19209E-4	5.22137E-3	9.34124E-2	1.58089E1	-1.99179E1	-1.99702E1	1.49998E1	2.15441E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.17732E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80027E1	-1.07288E-3	-8.8E1	0.0E0	5.00679E-3	9.34124E-2	1.57807E1	-1.98458E1	-1.9838E1	1.50292E1	2.16081E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.18011E-2
1.4E1	1.5E1	0.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80027E1	-1.07288E-3	-8.80002E1	4.52995E-4	5.126E-3	9.31501E-2	1.5881E1	-1.98537E1	-1.98158E1	1.49962E1	2.16175E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.17633E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80026E1	-1.12057E-3	-8.80002E1	4.76837E-4	5.07832E-3	9.34124E-2	1.57831E1	-1.986E1	-1.98729E1	1.50118E1	2.15519E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.17822E-2
1.6E1	2.4E1	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80024E1	-8.58307E-4	-8.80002E1	3.8147E-4	5.38826E-3	9.34362E-2	1.58066E1	-1.98224E1	-1.99311E1	1.49999E1	2.15716E-9	2.53031E-3	2.53031E-3	6.29128E-3	2.18104E-2
1.7E1	4.5E1	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80028E1	-1.21593E-3	-8.80003E1	5.00679E-4	5.22137E-3	9.3627E-2	1.57567E1	-1.98568E1	-2.01177E1	1.50184E1	2.15558E-9	2.52301E-3	2.52301E-3	6.33341E-3	2.17205E-2
1.8E1	1.83E2	1.0E0	7.27E2	5.0E2	-7.286E-2	-8.80027E1	-1.19209E-3	-8.80002E1	2.6226E-4	5.22137E-3	9.34601E-2	1.58454E1	-1.98428E1	-1.98999E1	1.49918E1	2.15872E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.1751E-2
1.9E1	3.68E2	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80028E1	-1.0252E-3	-8.8E1	4.76837E-5	5.34058E-3	9.36031E-2	1.57561E1	-1.98422E1	-2.00082E1	1.50141E1	2.15832E-9	2.51854E-3	2.51854E-3	6.31761E-3	2.16956E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80026E1	-1.38283E-3	-8.80002E1	9.53674E-5	5.31673E-3	9.33886E-2	1.5862E1	-1.98722E1	-1.9972E1	1.49845E1	2.15772E-9	2.5199E-3	2.5199E-3	6.31902E-3	2.16712E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80027E1	-1.45435E-3	-8.79999E1	-7.15256E-5	4.95911E-3	9.32932E-2	1.58081E1	-1.98666E1	-1.99205E1	1.49969E1	2.15791E-9	2.52473E-3	2.52473E-3	6.28511E-3	2.17529E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80027E1	-1.26362E-3	-8.80001E1	-2.38419E-5	4.93526E-3	9.32455E-2	1.57939E1	-1.98573E1	-2.00225E1	1.49734E1	2.15455E-9	2.52025E-3	2.52025E-3	6.29684E-3	2.17282E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80027E1	-1.04904E-3	-8.8E1	1.43051E-4	5.126E-3	9.34362E-2	1.57879E1	-1.98777E1	-1.99246E1	1.50106E1	2.15894E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.17822E-2
