[Scan]
initial_time=2016-01-28T16:14:22
final_time=2016-01-28T16:14:42
ip_count=19
run=1026
dataset=1
scan=73
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.84854E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-5.71179E-10
ql2_vset=
ql2_vmon=-1.12057E-3
ql2_imon=1.21801E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.39762E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.4206E-8
mult1=-9.26292E-9
mult2=-2.66054E-9
rf_tmon=-4.23222E-3
rf_agc=3.34566E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=5.83386E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63729E0
bslens_imon=2.50633E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19719E1
lens5a_imon=1.97142E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53571E1
cs_ef1b_imon=3.10526E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02044E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05092E1
cs_ea1_imon=1.24931E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06777E0
lens1_imon=1.342E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64954E1
os_ef1alow_imon=2.97343E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03733E1
cs_ea2_imon=1.39807E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84299E1
cs_ef1a_imon=3.00538E-5
olens2_vset=0.0E0
olens2_vmon=1.38283E-3
olens2_imon=1.03383E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11399E1
os_restr1_imon=4.31811E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.41622E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63748E1
os_ef1bup_imon=3.08286E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23618E0
cs_ionrep_imon=9.58782E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93372E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01999E1
cs_anode1_imon=2.05067E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.34946E-9
tplens_vset=0.0E0
tplens_vmon=-1.59491E0
tplens_imon=-2.41055E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99785E1
iondef3_imon=8.63652E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98558E1
iondef2_imon=9.33071E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02893E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=7.97367E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24475E0
ionrepsh_imon=9.40784E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33737E1
lens5b_imon=2.17086E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74728E1
cs_ef2b_imon=3.12508E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24659E0
os_ea2_imon=-7.58944E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71117E1
cs_ef2a_imon=3.18567E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08608E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81308E-1
os_ef2bup_imon=-5.36233E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11142E1
os_restr2_imon=3.3689E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.30883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.10281E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57737E1
iondef1_imon=4.77255E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50028E1
iondef4_imon=5.24965E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.68811E-8
olens1_vset=0.0E0
olens1_vmon=9.53674E-4
olens1_imon=1.24475E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13381E0
cs_ionaccel_imon=-1.11019E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47193E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56215E1
einzel_imon=7.7062E-6
window_vset=0.0E0
window_vmon=1.70956E-1
window_imon=-1.11019E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86289E1
mask2_imon=-6.6221E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.57136E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.54292E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.17467E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48935E0
defgridb_imon=6.23439E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33171E1
os_fil1_imon=9.41019E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07097E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60961E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30434E1
cs_fil1_imon=9.22359E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28926E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63202E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56795E-2
os_fil2_imon=-2.70099E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97465E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.78491E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33016E-1
cs_fil2_imon=-2.55411E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28309E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21453E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.16436E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.17783E-1
res40_imon=-2.40639E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.45E2	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80026E1	-1.21593E-3	-8.80002E1	2.6226E-4	4.88758E-3	9.34124E-2	1.58073E1	-1.98452E1	-1.9998E1	1.50099E1	2.15425E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.16689E-2
2.0E0	1.19E2	0.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80028E1	-1.64509E-3	-8.80002E1	2.14577E-4	4.88758E-3	9.32693E-2	1.57946E1	-1.98637E1	-1.99469E1	1.50112E1	2.15519E-9	2.52647E-3	2.52647E-3	6.32386E-3	2.18201E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80024E1	-1.4782E-3	-8.80006E1	1.90735E-4	5.14984E-3	9.36031E-2	1.58244E1	-1.9844E1	-1.9906E1	1.50268E1	2.158E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.16501E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80025E1	-1.19209E-3	-8.80003E1	3.33786E-4	5.03063E-3	9.31978E-2	1.57778E1	-1.98611E1	-2.00487E1	1.50033E1	2.15578E-9	2.51578E-3	2.51578E-3	6.31009E-3	2.16252E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80026E1	-1.3113E-3	-8.80002E1	5.24521E-4	4.93526E-3	9.34839E-2	1.58081E1	-1.98422E1	-1.98698E1	1.50116E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80027E1	-1.23978E-3	-8.80003E1	3.09944E-4	5.00679E-3	9.34124E-2	1.57921E1	-1.98573E1	-2.00339E1	1.501E1	2.15791E-9	2.5147E-3	2.5147E-3	6.29624E-3	2.16377E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80028E1	-1.5974E-3	-8.80001E1	0.0E0	4.673E-3	9.36985E-2	1.5805E1	-1.98375E1	-1.99366E1	1.4997E1	2.15613E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.15376E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80025E1	-1.5974E-3	-8.80003E1	-4.76837E-5	4.98295E-3	9.35316E-2	1.57997E1	-1.98835E1	-2.00446E1	1.50004E1	2.15441E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.15699E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80028E1	-1.14441E-3	-8.80007E1	0.0E0	5.03063E-3	9.37462E-2	1.58059E1	-1.98705E1	-1.99318E1	1.50178E1	2.15808E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.16806E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80028E1	-1.0252E-3	-8.80006E1	2.14577E-4	5.4121E-3	9.35316E-2	1.57795E1	-1.98573E1	-1.9963E1	1.49916E1	2.15992E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.16806E-2
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-7.14689E-2	-8.80028E1	-1.43051E-3	-8.80001E1	7.15256E-5	5.31673E-3	9.31978E-2	1.57723E1	-1.98633E1	-1.99804E1	1.50449E1	2.15314E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.16186E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80028E1	-1.40667E-3	-8.80002E1	9.53674E-5	5.45979E-3	9.35316E-2	1.57514E1	-1.98224E1	-1.99396E1	1.49983E1	2.15987E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.16313E-2
1.6E1	1.2E1	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80032E1	-1.0252E-3	-8.79999E1	0.0E0	5.17368E-3	9.35555E-2	1.58299E1	-1.98473E1	-1.99427E1	1.50226E1	2.15647E-9	2.51575E-3	2.51575E-3	6.3126E-3	2.15957E-2
1.7E1	5.0E1	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80032E1	-1.07288E-3	-8.79999E1	2.6226E-4	5.24521E-3	9.32455E-2	1.57686E1	-1.98711E1	-1.99288E1	1.49973E1	2.15772E-9	2.51874E-3	2.51874E-3	6.33065E-3	2.16712E-2
1.8E1	1.89E2	0.0E0	7.27E2	5.0E2	-7.20871E-2	-8.8003E1	-1.09673E-3	-8.8E1	7.15256E-5	5.24521E-3	9.32217E-2	1.58123E1	-1.98702E1	-2.00039E1	1.49971E1	2.15862E-9	2.52131E-3	2.52131E-3	6.30212E-3	2.16918E-2
1.9E1	3.42E2	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.8003E1	-1.23978E-3	-8.80001E1	4.76837E-5	5.126E-3	9.34601E-2	1.58004E1	-1.9874E1	-1.99608E1	1.50178E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80027E1	-1.00136E-3	-8.79999E1	2.86102E-4	5.14984E-3	9.35078E-2	1.57985E1	-1.98635E1	-1.99709E1	1.5013E1	2.15475E-9	2.52454E-3	2.52454E-3	6.29581E-3	2.16114E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80029E1	-1.04904E-3	-8.79999E1	-2.38419E-5	4.95911E-3	9.32455E-2	1.58233E1	-1.98405E1	-1.99431E1	1.49923E1	2.159E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.16806E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80027E1	-1.0252E-3	-8.79998E1	2.38419E-5	5.03063E-3	9.32932E-2	1.58155E1	-1.98579E1	-1.99234E1	1.50196E1	2.15624E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.14964E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80027E1	-1.12057E-3	-8.80002E1	1.66893E-4	4.95911E-3	9.37462E-2	1.57737E1	-1.98558E1	-1.99785E1	1.50028E1	2.15808E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.16436E-2
