[Scan]
initial_time=2016-01-28T16:15:15
final_time=2016-01-28T16:15:35
ip_count=19
run=1026
dataset=1
scan=75
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.8582E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.15139E-10
ql2_vset=
ql2_vmon=-1.26362E-3
ql2_imon=1.23158E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.39462E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.4268E-8
mult1=-9.67155E-9
mult2=-2.74226E-9
rf_tmon=-4.13595E-3
rf_agc=3.29733E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=6.12783E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65038E0
bslens_imon=2.38385E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19713E1
lens5a_imon=2.0005E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53767E1
cs_ef1b_imon=3.11613E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04568E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05375E1
cs_ea1_imon=1.24991E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06088E0
lens1_imon=1.38431E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64758E1
os_ef1alow_imon=2.96643E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04626E1
cs_ea2_imon=1.40527E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84344E1
cs_ef1a_imon=3.01545E-5
olens2_vset=0.0E0
olens2_vmon=1.45435E-3
olens2_imon=1.02954E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1108E1
os_restr1_imon=4.32274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15187E1
os_ea1_imon=2.42877E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.08095E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24773E0
cs_ionrep_imon=9.81116E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93514E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01759E1
cs_anode1_imon=2.04875E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.40086E-9
tplens_vset=0.0E0
tplens_vmon=-1.62334E0
tplens_imon=2.91551E-9
iondef3_vset=-2.0E1
iondef3_vmon=-1.9983E1
iondef3_imon=8.62444E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98594E1
iondef2_imon=9.33198E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98376E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=8.14652E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28205E0
ionrepsh_imon=9.38065E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34039E1
lens5b_imon=2.17345E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.12025E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23213E0
os_ea2_imon=-5.96061E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00293E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70933E1
cs_ef2a_imon=3.17826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05643E0
os_ef2alow_imon=-2.54437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6582E-1
os_ef2bup_imon=-5.37751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11011E1
os_restr2_imon=3.37137E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.29741E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01796E1
cs_anode2_imon=2.09441E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58295E1
iondef1_imon=5.31135E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50178E1
iondef4_imon=5.16534E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.68306E-8
olens1_vset=0.0E0
olens1_vmon=1.16825E-3
olens1_imon=1.23996E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1657E0
cs_ionaccel_imon=-1.09225E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47207E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56224E1
einzel_imon=7.5793E-6
window_vset=0.0E0
window_vmon=1.78923E-1
window_imon=-1.05483E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39028E-4
mask2_vset=0.0E0
mask2_vmon=-1.86606E1
mask2_imon=-6.24431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92681E3
multa_neg_imon=6.63284E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=7.05587E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.90941E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47745E0
defgridb_imon=6.20981E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3317E1
os_fil1_imon=9.43424E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06899E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60907E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30585E1
cs_fil1_imon=9.24038E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29886E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63099E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.75976E-2
os_fil2_imon=-2.60636E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97206E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.9069E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32744E-1
cs_fil2_imon=-2.36933E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34206E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21491E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.18477E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.14276E-1
res40_imon=-2.41338E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.43E2	0.0E0	1.47E2	4.1E1	-7.33239E-2	-8.8003E1	-1.45435E-3	-8.80004E1	2.38419E-4	4.79221E-3	9.32217E-2	1.58215E1	-1.98625E1	-2.01053E1	1.5023E1	2.15587E-9	2.51498E-3	2.51498E-3	6.34737E-3	2.17618E-2
2.0E0	1.26E2	0.0E0	3.16E2	1.6E2	-7.286E-2	-8.80026E1	-1.16825E-3	-8.80003E1	2.38419E-4	5.19753E-3	9.30071E-2	1.57898E1	-1.9841E1	-2.00107E1	1.49979E1	2.15636E-9	2.52342E-3	2.52342E-3	6.29684E-3	2.16736E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80027E1	-1.40667E-3	-8.80001E1	1.43051E-4	5.24521E-3	9.31501E-2	1.57801E1	-1.98562E1	-1.99092E1	1.50057E1	2.15887E-9	2.52585E-3	2.52585E-3	6.31299E-3	2.17145E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80027E1	-1.07288E-3	-8.80002E1	4.76837E-4	5.38826E-3	9.32932E-2	1.58218E1	-1.98511E1	-1.9954E1	1.50129E1	2.15433E-9	2.52026E-3	2.52026E-3	6.31555E-3	2.15817E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80032E1	-9.53674E-4	-8.80002E1	3.09944E-4	5.05447E-3	9.30786E-2	1.57849E1	-1.98753E1	-2.00826E1	1.5007E1	2.16049E-9	2.51819E-3	2.51819E-3	6.32673E-3	2.1624E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80028E1	-9.05991E-4	-8.80003E1	2.14577E-4	5.05447E-3	9.34362E-2	1.58035E1	-1.98627E1	-2.00015E1	1.50046E1	2.15332E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.16313E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80028E1	-1.21593E-3	-8.80005E1	2.86102E-4	4.95911E-3	9.32217E-2	1.58083E1	-1.98585E1	-1.99185E1	1.50142E1	2.15533E-9	2.52384E-3	2.52384E-3	6.33436E-3	2.15515E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80029E1	-1.04904E-3	-8.80004E1	1.19209E-4	5.126E-3	9.33409E-2	1.57999E1	-1.98759E1	-1.97822E1	1.50076E1	2.15613E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.17066E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80027E1	-1.35899E-3	-8.80002E1	2.38419E-4	5.00679E-3	9.33647E-2	1.57632E1	-1.98266E1	-2.00333E1	1.50286E1	2.15791E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.16186E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80027E1	-1.33514E-3	-8.80003E1	-1.66893E-4	4.69685E-3	9.33409E-2	1.58118E1	-1.98539E1	-2.00412E1	1.50132E1	2.159E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.17176E-2
1.4E1	5.0E0	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80026E1	-1.19209E-3	-8.80004E1	-1.19209E-4	5.10216E-3	9.32932E-2	1.58309E1	-1.98653E1	-2.00074E1	1.49957E1	2.156E-9	2.51359E-3	2.51359E-3	6.31858E-3	2.17529E-2
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80025E1	-1.07288E-3	-8.80004E1	1.43051E-4	5.14984E-3	9.33886E-2	1.57897E1	-1.98501E1	-2.00135E1	1.50148E1	2.15519E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.17444E-2
1.6E1	2.4E1	1.0E0	6.47E2	4.41E2	-7.39421E-2	-8.80027E1	-1.3113E-3	-8.80004E1	2.14577E-4	5.17368E-3	9.3317E-2	1.58251E1	-1.98753E1	-2.00928E1	1.49728E1	2.15613E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.1575E-2
1.7E1	4.4E1	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80026E1	-1.3113E-3	-8.80005E1	9.53674E-5	4.91142E-3	9.35555E-2	1.58125E1	-1.98386E1	-1.98651E1	1.5025E1	2.15613E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.16878E-2
1.8E1	1.9E2	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80023E1	-8.34465E-4	-8.80003E1	4.76837E-4	5.126E-3	9.3317E-2	1.58301E1	-1.98312E1	-1.99432E1	1.49355E1	2.15533E-9	2.51847E-3	2.51847E-3	6.28592E-3	2.1829E-2
1.9E1	3.41E2	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80025E1	-9.77516E-4	-8.80002E1	5.24521E-4	5.07832E-3	9.34601E-2	1.57987E1	-1.98681E1	-1.99143E1	1.50004E1	2.15005E-9	2.51838E-3	2.51838E-3	6.3245E-3	2.17618E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80025E1	-1.04904E-3	-8.79999E1	5.48363E-4	5.14984E-3	9.36031E-2	1.57778E1	-1.98835E1	-2.0077E1	1.50172E1	2.158E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.18011E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80025E1	-1.09673E-3	-8.79999E1	4.05312E-4	5.26905E-3	9.34839E-2	1.57987E1	-1.98705E1	-2.01397E1	1.49884E1	2.15624E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.17361E-2
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80025E1	-8.58307E-4	-8.8E1	3.33786E-4	5.26905E-3	9.32693E-2	1.58486E1	-1.98458E1	-2.01236E1	1.50184E1	2.15706E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.17633E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80026E1	-1.26362E-3	-8.80003E1	4.52995E-4	5.31673E-3	9.31978E-2	1.58295E1	-1.98594E1	-1.9983E1	1.50178E1	2.15533E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.18477E-2
