[Scan]
initial_time=2016-01-28T16:16:09
final_time=2016-01-28T16:16:29
ip_count=19
run=1026
dataset=1
scan=77
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.80546E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.16295E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.24421E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.41386E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.41733E-8
mult1=-9.66815E-9
mult2=-2.79446E-9
rf_tmon=-5.97844E-3
rf_agc=3.23602E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=6.34241E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65247E0
bslens_imon=2.53466E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20071E1
lens5a_imon=1.96853E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53217E1
cs_ef1b_imon=3.1061E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02165E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04955E1
cs_ea1_imon=1.25024E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06966E0
lens1_imon=1.37063E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64745E1
os_ef1alow_imon=2.95508E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.38969E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84511E1
cs_ef1a_imon=3.01346E-5
olens2_vset=0.0E0
olens2_vmon=1.33514E-3
olens2_imon=1.04244E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11149E1
os_restr1_imon=4.31193E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15286E1
os_ea1_imon=2.40554E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63772E1
os_ef1bup_imon=3.09014E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25607E0
cs_ionrep_imon=9.76914E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93162E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01886E1
cs_anode1_imon=2.04701E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.3824E-9
tplens_vset=0.0E0
tplens_vmon=-1.63878E0
tplens_imon=-3.01921E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00339E1
iondef3_imon=8.43428E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98266E1
iondef2_imon=9.54269E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02897E2
lens6_imon=2.98417E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=7.89332E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26931E0
ionrepsh_imon=9.37583E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3383E1
lens5b_imon=2.18067E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74696E1
cs_ef2b_imon=3.12595E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27064E0
os_ea2_imon=-6.19745E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00595E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71232E1
cs_ef2a_imon=3.17966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05845E0
os_ef2alow_imon=-2.70066E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69962E-1
os_ef2bup_imon=-5.28125E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10825E1
os_restr2_imon=3.36844E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.30008E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01685E1
cs_anode2_imon=2.09333E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58353E1
iondef1_imon=5.02958E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50166E1
iondef4_imon=5.25127E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.69316E-8
olens1_vset=0.0E0
olens1_vmon=1.38283E-3
olens1_imon=1.24932E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15933E0
cs_ionaccel_imon=-1.10094E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5623E1
einzel_imon=7.69562E-6
window_vset=0.0E0
window_vmon=2.02951E-1
window_imon=-9.29676E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86376E1
mask2_imon=-6.18293E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=6.5909E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.5472E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.07161E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24658E0
defgridb_imon=6.0506E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33216E1
os_fil1_imon=9.38541E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0801E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61433E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30641E1
cs_fil1_imon=9.23763E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29522E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63868E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44405E-2
os_fil2_imon=-2.6393E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90819E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.48594E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34266E-1
cs_fil2_imon=-2.56145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.58383E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21679E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.16878E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.39276E-1
res40_imon=-2.40485E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.07E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80026E1	-1.00136E-3	-8.80001E1	1.19209E-4	5.07832E-3	9.33647E-2	1.57837E1	-1.98546E1	-1.99703E1	1.50112E1	2.15587E-9	2.52066E-3	2.52066E-3	6.3531E-3	2.17618E-2
2.0E0	1.52E2	0.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80025E1	-1.07288E-3	-8.80002E1	1.43051E-4	4.95911E-3	9.32217E-2	1.58095E1	-1.98801E1	-2.00543E1	1.49974E1	2.15706E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.16125E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80025E1	-9.29832E-4	-8.80002E1	2.14577E-4	5.03063E-3	9.32455E-2	1.58274E1	-1.98577E1	-1.98742E1	1.50265E1	2.15441E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.17918E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80028E1	-1.12057E-3	-8.80003E1	-7.15256E-5	4.64916E-3	9.32693E-2	1.57835E1	-1.98559E1	-1.98672E1	1.50078E1	2.15754E-9	2.52023E-3	2.52023E-3	6.3074E-3	2.18445E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80028E1	-1.04904E-3	-8.8E1	-4.76837E-5	4.86374E-3	9.33886E-2	1.57903E1	-1.98609E1	-1.99083E1	1.50058E1	2.15872E-9	2.52222E-3	2.52222E-3	6.32483E-3	2.18513E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80029E1	-1.12057E-3	-8.8E1	2.38419E-5	5.00679E-3	9.31978E-2	1.58001E1	-1.98484E1	-1.97706E1	1.50138E1	2.15519E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.15938E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80025E1	-1.14441E-3	-8.79998E1	2.38419E-4	5.26905E-3	9.31501E-2	1.57997E1	-1.98505E1	-1.98936E1	1.50169E1	2.15519E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.16125E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.14689E-2	-8.80029E1	-1.3113E-3	-8.80001E1	1.43051E-4	5.48363E-3	9.32693E-2	1.58221E1	-1.98567E1	-2.00069E1	1.49998E1	2.15706E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.17255E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.80025E1	-1.4782E-3	-8.8E1	7.15256E-5	5.38826E-3	9.30786E-2	1.58197E1	-1.98507E1	-1.98458E1	1.50136E1	2.158E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.1896E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80024E1	-9.53674E-4	-8.80002E1	2.38419E-5	4.98295E-3	9.32693E-2	1.58338E1	-1.98881E1	-1.98202E1	1.50028E1	2.15716E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.17176E-2
1.4E1	1.1E1	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80028E1	-1.0252E-3	-8.8E1	2.86102E-4	4.95911E-3	9.33886E-2	1.58297E1	-1.98564E1	-1.98588E1	1.49896E1	2.15409E-9	2.51804E-3	2.51804E-3	6.33538E-3	2.17915E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.8003E1	-1.19209E-3	-8.80002E1	3.57628E-4	5.07832E-3	9.3174E-2	1.58678E1	-1.98446E1	-1.9844E1	1.50046E1	2.15992E-9	2.52599E-3	2.52599E-3	6.29128E-3	2.15883E-2
1.6E1	2.1E1	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80022E1	-9.53674E-4	-8.80002E1	-9.53674E-5	5.14984E-3	9.32217E-2	1.5815E1	-1.99001E1	-1.99514E1	1.50226E1	2.15894E-9	2.52209E-3	2.52209E-3	6.36244E-3	2.17444E-2
1.7E1	4.0E1	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80024E1	-6.19888E-4	-8.80002E1	9.53674E-5	5.03063E-3	9.33886E-2	1.58161E1	-1.98525E1	-1.99204E1	1.50052E1	2.15425E-9	2.51662E-3	2.51662E-3	6.34588E-3	2.15938E-2
1.8E1	1.63E2	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80025E1	-1.07288E-3	-8.79998E1	-1.43051E-4	5.05447E-3	9.3317E-2	1.58191E1	-1.98483E1	-1.98464E1	1.50184E1	2.15613E-9	2.5188E-3	2.5188E-3	6.34588E-3	2.16689E-2
1.9E1	3.84E2	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80026E1	-8.34465E-4	-8.80004E1	1.66893E-4	5.03063E-3	9.35078E-2	1.58675E1	-1.98871E1	-1.99732E1	1.50046E1	2.15808E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.16806E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.40192E-2	-8.80027E1	-6.4373E-4	-8.80004E1	-4.76837E-5	4.93526E-3	9.37939E-2	1.58398E1	-1.98605E1	-2.009E1	1.50022E1	2.15425E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.18011E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.45602E-2	-8.80027E1	-8.10623E-4	-8.80003E1	0.0E0	5.07832E-3	9.35316E-2	1.57943E1	-1.98517E1	-1.9903E1	1.49923E1	2.15716E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.18477E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.45602E-2	-8.80027E1	-8.82149E-4	-8.80004E1	2.38419E-4	4.76837E-3	9.33886E-2	1.57656E1	-1.98681E1	-1.97828E1	1.50154E1	2.15726E-9	2.52342E-3	2.52342E-3	6.32328E-3	2.17829E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80026E1	-7.39098E-4	-8.80002E1	0.0E0	4.79221E-3	9.32217E-2	1.58353E1	-1.98266E1	-2.00339E1	1.50166E1	2.158E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.16878E-2
