[Scan]
initial_time=2016-01-28T16:19:26
final_time=2016-01-28T16:19:45
ip_count=19
run=1026
dataset=2
scan=84
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08863E-4
ql1_vset=
ql1_vmon=-8.19588E-1
ql1_imon=1.36602E-8
ql2_vset=
ql2_vmon=-7.99417E-1
ql2_imon=1.98982E-9
ql3_vset=
ql3_vmon=-9.13086E0
ql3_imon=2.45664E-9
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-2.22492E-10
mult1=-9.87283E-9
mult2=-2.86233E-9
rf_tmon=-5.0051E-3
rf_agc=3.36941E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.65976E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66614E0
bslens_imon=2.40437E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19833E1
lens5a_imon=1.99028E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12441E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=3.1074E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05162E1
cs_ea1_imon=1.2455E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42423E0
lens1_imon=2.77928E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64266E1
os_ef1alow_imon=2.95279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.42106E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=3.01694E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.23565E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=2.42215E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.09659E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23588E0
cs_ionrep_imon=9.49892E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.05071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.22154E-8
tplens_vset=1.4E-1
tplens_vmon=1.58255E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26753E1
iondef3_imon=1.51623E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.55877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02881E2
lens6_imon=2.98418E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.93102E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=9.44124E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.16909E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29356E0
os_ea2_imon=-5.26458E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00536E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05095E0
os_ef2alow_imon=-2.67356E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.40797E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.30181E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72715E1
iondef1_imon=1.07462E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68069E1
iondef4_imon=1.08269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.29792E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.72839E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.00493E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=1.83105E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.99565E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.33737E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.14849E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46773E0
defgridb_imon=6.00932E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.437E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07203E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61549E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30725E1
cs_fil1_imon=9.23037E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31545E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62463E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.28204E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21862E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31879E-3
inlet_lpb_pmon=2.16834E-2
chamber_ion_pmon=2.15879E-9
chamber_cvt_pmon=2.51952E-3
foreline_cvt_pmon=2.51952E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.67411E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.19874E-1	-7.98893E-1	-9.13072E0	-9.14199E0	5.26905E-3	9.30071E-2	2.72781E1	-3.2653E1	-3.26176E1	2.68262E1	2.15706E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.17255E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.20065E-1	-7.99274E-1	-9.13088E0	-9.14195E0	5.05447E-3	9.30309E-2	2.73087E1	-3.26687E1	-3.26164E1	2.67788E1	2.15987E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17822E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.19969E-1	-7.9906E-1	-9.13103E0	-9.14199E0	5.38826E-3	9.30786E-2	2.73139E1	-3.26531E1	-3.26236E1	2.67966E1	2.16081E-9	2.51443E-3	2.51443E-3	6.34037E-3	2.16313E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.19969E-1	-7.99227E-1	-9.13103E0	-9.14216E0	5.10216E-3	9.30786E-2	2.73269E1	-3.26384E1	-3.2649E1	2.68036E1	2.159E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.17547E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.19969E-1	-7.99394E-1	-9.13091E0	-9.14187E0	5.38826E-3	9.30786E-2	2.72964E1	-3.26642E1	-3.27031E1	2.67968E1	2.15624E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.17732E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0965E0	-8.20184E-1	-7.99203E-1	-9.13081E0	-9.14183E0	5.26905E-3	9.36508E-2	2.72597E1	-3.26319E1	-3.26608E1	2.68215E1	2.15997E-9	2.52236E-3	2.52236E-3	6.31269E-3	2.17464E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.19945E-1	-7.99227E-1	-9.13095E0	-9.14192E0	5.05447E-3	9.34362E-2	2.73183E1	-3.26236E1	-3.2626E1	2.68016E1	2.15808E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.17547E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.19969E-1	-7.99489E-1	-9.13088E0	-9.14187E0	4.69685E-3	9.32455E-2	2.73159E1	-3.26422E1	-3.27948E1	2.68208E1	2.158E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17633E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.19564E-1	-7.99131E-1	-9.13093E0	-9.14164E0	5.03063E-3	9.3317E-2	2.73143E1	-3.26652E1	-3.26432E1	2.67932E1	2.15706E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.15563E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.19588E-1	-7.99036E-1	-9.13095E0	-9.14183E0	5.03063E-3	9.34124E-2	2.72662E1	-3.26673E1	-3.26248E1	2.6807E1	2.15409E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.17722E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.19707E-1	-7.99251E-1	-9.13107E0	-9.1419E0	5.05447E-3	9.34601E-2	2.72961E1	-3.26506E1	-3.27756E1	2.6798E1	2.15808E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.17361E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.19516E-1	-7.9937E-1	-9.13091E0	-9.14214E0	5.126E-3	9.33647E-2	2.72833E1	-3.26679E1	-3.28614E1	2.68184E1	2.15613E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.17822E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.19659E-1	-7.99584E-1	-9.13062E0	-9.14185E0	5.34058E-3	9.31263E-2	2.72907E1	-3.26573E1	-3.26212E1	2.6801E1	2.15624E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.16621E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.19278E-1	-7.99227E-1	-9.13069E0	-9.14195E0	5.22137E-3	9.33409E-2	2.72782E1	-3.2615E1	-3.24571E1	2.6813E1	2.16081E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.17444E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.19349E-1	-7.9937E-1	-9.13079E0	-9.14207E0	5.126E-3	9.31501E-2	2.72797E1	-3.26708E1	-3.24897E1	2.67914E1	2.15409E-9	2.51915E-3	2.51915E-3	6.33538E-3	2.17722E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.19564E-1	-7.99346E-1	-9.13067E0	-9.14183E0	5.31673E-3	9.28402E-2	2.73087E1	-3.26633E1	-3.27203E1	2.67992E1	2.16269E-9	2.53031E-3	2.53031E-3	6.30202E-3	2.17732E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.1954E-1	-7.99441E-1	-9.13057E0	-9.14207E0	5.55515E-3	9.30786E-2	2.73177E1	-3.26663E1	-3.25245E1	2.68023E1	2.15847E-9	2.51935E-3	2.51935E-3	6.32386E-3	2.17066E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.19516E-1	-7.9937E-1	-9.1306E0	-9.14209E0	5.24521E-3	9.32217E-2	2.73107E1	-3.26786E1	-3.26831E1	2.6794E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.19373E-1	-7.99251E-1	-9.13103E0	-9.14178E0	5.29289E-3	9.32693E-2	2.72889E1	-3.26959E1	-3.25723E1	2.67932E1	2.15745E-9	2.51956E-3	2.51956E-3	6.32784E-3	2.18011E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.19588E-1	-7.99417E-1	-9.13086E0	-9.14202E0	5.19753E-3	9.3174E-2	2.72715E1	-3.26609E1	-3.26753E1	2.68069E1	2.15879E-9	2.51952E-3	2.51952E-3	6.31879E-3	2.16834E-2
