[Scan]
initial_time=2016-01-28T16:19:53
final_time=2016-01-28T16:20:12
ip_count=19
run=1026
dataset=2
scan=85
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.19564E-1
ql1_imon=1.34854E-8
ql2_vset=
ql2_vmon=-7.99537E-1
ql2_imon=1.9598E-9
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=2.04928E-9
ql4_vset=
ql4_vmon=-9.14245E0
ql4_imon=-1.86038E-10
mult1=-9.71631E-9
mult2=-2.64276E-9
rf_tmon=-3.95967E-3
rf_agc=3.40486E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.66187E-9
bslens_vset=-6.2E0
bslens_vmon=-6.632E0
bslens_imon=2.55034E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.97306E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04983E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53771E1
cs_ef1b_imon=3.10937E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04552E1
cs_ea1_imon=1.22129E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43214E0
lens1_imon=2.67776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64243E1
os_ef1alow_imon=2.97105E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03525E1
cs_ea2_imon=1.40039E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.00789E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.25518E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11158E1
os_restr1_imon=4.29617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15583E1
os_ea1_imon=2.39213E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64023E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=9.47696E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01832E1
cs_anode1_imon=2.04663E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.24292E-8
tplens_vset=1.4E-1
tplens_vmon=1.64379E0
tplens_imon=-4.47542E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26759E1
iondef3_imon=1.491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.554E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02871E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.98191E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26921E0
ionrepsh_imon=9.28229E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33256E1
lens5b_imon=2.17835E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.31109E0
os_ea2_imon=-8.08562E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06056E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71235E1
cs_ef2a_imon=3.17644E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05977E0
os_ef2alow_imon=-2.58848E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79275E-1
os_ef2bup_imon=-5.29918E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1084E1
os_restr2_imon=3.40268E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.30636E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.09876E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.05423E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.09129E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.3078E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.8278E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12493E0
cs_ionaccel_imon=-9.75966E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47105E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5622E1
einzel_imon=7.63919E-6
window_vset=0.0E0
window_vmon=1.7077E-1
window_imon=-1.14973E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86414E1
mask2_imon=-6.97946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.50551E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.79409E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.37455E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47938E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33234E1
os_fil1_imon=9.45965E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06756E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62274E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30684E1
cs_fil1_imon=9.21829E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.27061E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64912E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47119E-2
os_fil2_imon=-2.65181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11508E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.99868E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.64023E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39686E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21934E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.17255E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01488E-1
res40_imon=-2.57806E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.19516E-1	-7.99537E-1	-9.13081E0	-9.14185E0	5.19753E-3	9.35316E-2	2.72325E1	-3.26673E1	-3.2721E1	2.68142E1	2.15992E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.17547E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.19635E-1	-7.99322E-1	-9.13091E0	-9.14183E0	5.17368E-3	9.35078E-2	2.72998E1	-3.26667E1	-3.26001E1	2.67962E1	2.159E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.17918E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.19588E-1	-7.99465E-1	-9.13074E0	-9.14183E0	5.48363E-3	9.30309E-2	2.72833E1	-3.26602E1	-3.25523E1	2.68094E1	2.15716E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.17361E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.19683E-1	-7.99179E-1	-9.13105E0	-9.1418E0	5.43594E-3	9.31025E-2	2.73093E1	-3.26855E1	-3.26693E1	2.68124E1	2.15624E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.17918E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-8.1985E-1	-7.99513E-1	-9.13126E0	-9.14173E0	5.10216E-3	9.31978E-2	2.72841E1	-3.26561E1	-3.26296E1	2.68046E1	2.15894E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.17633E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09642E0	-8.19612E-1	-7.99298E-1	-9.13098E0	-9.14195E0	5.38826E-3	9.27925E-2	2.72986E1	-3.26779E1	-3.26148E1	2.68076E1	2.15992E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.17547E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09673E0	-8.19445E-1	-7.99346E-1	-9.13103E0	-9.1418E0	5.126E-3	9.31025E-2	2.72847E1	-3.26657E1	-3.25888E1	2.67885E1	2.16081E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.17633E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.19445E-1	-7.99346E-1	-9.13112E0	-9.14183E0	5.24521E-3	9.33886E-2	2.72892E1	-3.2659E1	-3.25965E1	2.68082E1	2.15987E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.17633E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.19445E-1	-7.99274E-1	-9.13115E0	-9.1418E0	5.19753E-3	9.34124E-2	2.7367E1	-3.26933E1	-3.2614E1	2.67926E1	2.16085E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.17361E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.19468E-1	-7.99656E-1	-9.13079E0	-9.14185E0	5.34058E-3	9.32455E-2	2.72971E1	-3.26646E1	-3.26487E1	2.68172E1	2.15706E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.17444E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.19349E-1	-7.99561E-1	-9.13093E0	-9.14216E0	5.38826E-3	9.33647E-2	2.73147E1	-3.2642E1	-3.2605E1	2.68184E1	2.15887E-9	2.52921E-3	2.52921E-3	6.32418E-3	2.17529E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.19302E-1	-7.99537E-1	-9.13072E0	-9.14218E0	5.4121E-3	9.34124E-2	2.72703E1	-3.26585E1	-3.28639E1	2.67897E1	2.15847E-9	2.52154E-3	2.52154E-3	6.29508E-3	2.18438E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.19445E-1	-7.99203E-1	-9.13098E0	-9.14202E0	5.48363E-3	9.32455E-2	2.72564E1	-3.26693E1	-3.27173E1	2.68028E1	2.15651E-9	2.52904E-3	2.52904E-3	6.3074E-3	2.16396E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.19659E-1	-7.99346E-1	-9.13103E0	-9.14223E0	5.31673E-3	9.34124E-2	2.72876E1	-3.26516E1	-3.26535E1	2.68144E1	2.15238E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.15938E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.19516E-1	-7.9937E-1	-9.13107E0	-9.14183E0	5.00679E-3	9.3317E-2	2.72901E1	-3.26494E1	-3.27209E1	2.6795E1	2.15879E-9	2.52407E-3	2.52407E-3	6.31879E-3	2.18602E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.19468E-1	-7.99346E-1	-9.13091E0	-9.14187E0	5.26905E-3	9.32217E-2	2.72763E1	-3.26933E1	-3.25185E1	2.67998E1	2.15987E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.17444E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.19707E-1	-7.9906E-1	-9.13074E0	-9.1418E0	5.00679E-3	9.33886E-2	2.73157E1	-3.26384E1	-3.26608E1	2.68064E1	2.15894E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.18011E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.19612E-1	-7.99227E-1	-9.13084E0	-9.14199E0	5.24521E-3	9.34839E-2	2.72862E1	-3.26573E1	-3.24821E1	2.68099E1	2.15519E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.17444E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.19445E-1	-7.99417E-1	-9.13107E0	-9.14214E0	5.07832E-3	9.33647E-2	2.72985E1	-3.26627E1	-3.26735E1	2.67962E1	2.15726E-9	2.52342E-3	2.52342E-3	6.31269E-3	2.17646E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.19564E-1	-7.99537E-1	-9.13119E0	-9.14245E0	5.03063E-3	9.33886E-2	2.73045E1	-3.26573E1	-3.26759E1	2.68196E1	2.15706E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.17255E-2
