[Scan]
initial_time=2016-01-28T16:20:20
final_time=2016-01-28T16:20:39
ip_count=19
run=1026
dataset=2
scan=86
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08852E-4
ql1_vset=
ql1_vmon=-8.1923E-1
ql1_imon=1.34247E-8
ql2_vset=
ql2_vmon=-7.99441E-1
ql2_imon=1.97911E-9
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=1.76938E-9
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=-1.50251E-10
mult1=-9.70427E-9
mult2=-2.63078E-9
rf_tmon=-4.60255E-3
rf_agc=3.33816E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.67569E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64601E0
bslens_imon=2.51708E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19772E1
lens5a_imon=1.99484E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04971E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53704E1
cs_ef1b_imon=3.09557E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04831E1
cs_ea1_imon=1.23993E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38735E0
lens1_imon=2.56002E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64942E1
os_ef1alow_imon=2.96277E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04234E1
cs_ea2_imon=1.41456E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=3.01372E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.24964E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11333E1
os_restr1_imon=4.29702E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15433E1
os_ea1_imon=2.40278E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63726E1
os_ef1bup_imon=3.07697E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26307E0
cs_ionrep_imon=9.63962E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93277E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.04064E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.23993E-8
tplens_vset=1.4E-1
tplens_vmon=1.61137E0
tplens_imon=-3.17053E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25425E1
iondef3_imon=1.46752E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.57631E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.9838E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.02157E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26689E0
ionrepsh_imon=9.49934E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33809E1
lens5b_imon=2.16975E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74587E1
cs_ef2b_imon=3.12218E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27405E0
os_ea2_imon=-7.49329E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71033E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07889E0
os_ef2alow_imon=-2.70112E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78662E-1
os_ef2bup_imon=-5.44862E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.40552E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.30272E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01996E1
cs_anode2_imon=2.09531E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.09193E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.07759E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.37811E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.8212E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12442E0
cs_ionaccel_imon=-1.14421E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.472E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.66781E-6
window_vset=0.0E0
window_vmon=1.85932E-1
window_imon=-1.13276E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.38992E-4
mask2_vset=0.0E0
mask2_vmon=-1.86177E1
mask2_imon=-6.49088E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.26067E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.59937E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.40953E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35362E0
defgridb_imon=6.17854E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33263E1
os_fil1_imon=9.39134E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07348E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62187E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30728E1
cs_fil1_imon=9.23159E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3117E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64083E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.19092E-2
os_fil2_imon=-2.86578E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.14928E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36438E-1
cs_fil2_imon=-2.52711E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14576E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21833E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.17255E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40083E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.04589E-1
res40_imon=-2.53513E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=449
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.19731E-1	-7.99584E-1	-9.13072E0	-9.14218E0	5.4121E-3	9.3317E-2	2.72856E1	-3.26797E1	-3.2672E1	2.68198E1	2.1545E-9	2.52106E-3	2.52106E-3	6.32047E-3	2.16363E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09642E0	-8.19278E-1	-7.99513E-1	-9.13055E0	-9.14233E0	4.95911E-3	9.31501E-2	2.72982E1	-3.26598E1	-3.24928E1	2.67997E1	2.15997E-9	2.52131E-3	2.52131E-3	6.3074E-3	2.16374E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09673E0	-8.19278E-1	-7.99298E-1	-9.13093E0	-9.14209E0	4.74453E-3	9.32693E-2	2.73411E1	-3.27045E1	-3.24838E1	2.6801E1	2.15718E-9	2.51562E-3	2.51562E-3	6.32673E-3	2.18456E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09696E0	-8.19278E-1	-7.99274E-1	-9.13091E0	-9.14197E0	4.72069E-3	9.37462E-2	2.73116E1	-3.2682E1	-3.26915E1	2.67862E1	2.15808E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.17361E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09711E0	-8.19135E-1	-7.99346E-1	-9.13069E0	-9.14204E0	4.76837E-3	9.33886E-2	2.72823E1	-3.26356E1	-3.26597E1	2.67866E1	2.15441E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.17176E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09665E0	-8.19135E-1	-7.99346E-1	-9.13081E0	-9.14223E0	5.14984E-3	9.32455E-2	2.72739E1	-3.26529E1	-3.24815E1	2.68064E1	2.15706E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.17822E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09688E0	-8.19135E-1	-7.99346E-1	-9.13098E0	-9.14211E0	5.17368E-3	9.32217E-2	2.72967E1	-3.26549E1	-3.26278E1	2.68028E1	2.15706E-9	2.52867E-3	2.52867E-3	6.33486E-3	2.16878E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.19397E-1	-7.99036E-1	-9.13098E0	-9.14173E0	5.14984E-3	9.32455E-2	2.72871E1	-3.2638E1	-3.26062E1	2.68394E1	2.15425E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.16125E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.19302E-1	-7.99465E-1	-9.13086E0	-9.14211E0	5.24521E-3	9.33647E-2	2.72573E1	-3.26219E1	-3.26785E1	2.68214E1	2.15706E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.17822E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09711E0	-8.18992E-1	-7.99274E-1	-9.13088E0	-9.14195E0	5.17368E-3	9.32455E-2	2.73339E1	-3.26855E1	-3.26536E1	2.67968E1	2.15613E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17066E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.18968E-1	-7.9937E-1	-9.13072E0	-9.14197E0	5.03063E-3	9.35555E-2	2.73165E1	-3.26645E1	-3.2596E1	2.6777E1	2.15706E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.17633E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.19182E-1	-7.99203E-1	-9.13088E0	-9.14164E0	4.86374E-3	9.32932E-2	2.73045E1	-3.26987E1	-3.25173E1	2.68388E1	2.15613E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.1877E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.19206E-1	-7.99465E-1	-9.13081E0	-9.14199E0	5.14984E-3	9.31978E-2	2.73363E1	-3.26404E1	-3.24416E1	2.67914E1	2.16081E-9	2.52867E-3	2.52867E-3	6.31837E-3	2.17444E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.19182E-1	-7.9937E-1	-9.13084E0	-9.14183E0	5.17368E-3	9.30309E-2	2.72927E1	-3.2688E1	-3.2557E1	2.67914E1	2.15987E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.17822E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09657E0	-8.18992E-1	-7.99584E-1	-9.13076E0	-9.14176E0	5.29289E-3	9.32693E-2	2.73165E1	-3.26753E1	-3.26002E1	2.68035E1	2.15533E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.17547E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.18944E-1	-7.99465E-1	-9.13081E0	-9.14176E0	5.79357E-3	9.32217E-2	2.72781E1	-3.26603E1	-3.26188E1	2.68039E1	2.158E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.17444E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0968E0	-8.19254E-1	-7.99656E-1	-9.13045E0	-9.14185E0	5.50747E-3	9.32217E-2	2.73027E1	-3.26897E1	-3.25924E1	2.67899E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.17633E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09711E0	-8.19063E-1	-7.99322E-1	-9.13064E0	-9.14197E0	5.14984E-3	9.34362E-2	2.72721E1	-3.26825E1	-3.25966E1	2.68011E1	2.15613E-9	2.52318E-3	2.52318E-3	6.34588E-3	2.17444E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09704E0	-8.19254E-1	-7.99274E-1	-9.13103E0	-9.14187E0	5.10216E-3	9.34124E-2	2.73075E1	-3.2639E1	-3.25015E1	2.67319E1	2.15624E-9	2.52492E-3	2.52492E-3	6.29665E-3	2.18663E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.1923E-1	-7.99441E-1	-9.13095E0	-9.14216E0	5.05447E-3	9.31263E-2	2.73375E1	-3.26735E1	-3.25425E1	2.68082E1	2.15894E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.17255E-2
