[Scan]
initial_time=2016-01-28T16:21:13
final_time=2016-01-28T16:21:32
ip_count=19
run=1026
dataset=2
scan=88
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.18682E-1
ql1_imon=1.33752E-8
ql2_vset=
ql2_vmon=-7.99465E-1
ql2_imon=1.97614E-9
ql3_vset=
ql3_vmon=-9.1306E0
ql3_imon=1.45986E-9
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-1.37138E-10
mult1=-9.44025E-9
mult2=-2.75657E-9
rf_tmon=-4.50948E-3
rf_agc=3.28018E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.67537E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.45844E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20193E1
lens5a_imon=1.9773E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=3.09839E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.0206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05162E1
cs_ea1_imon=1.23396E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40621E0
lens1_imon=2.62067E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64446E1
os_ef1alow_imon=2.99027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.39727E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=2.99856E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.25759E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.28481E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=2.40341E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63443E1
os_ef1bup_imon=3.06992E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26291E0
cs_ionrep_imon=9.82697E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93366E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=2.04963E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.23114E-8
tplens_vset=1.4E-1
tplens_vmon=1.59697E0
tplens_imon=-4.47149E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26496E1
iondef3_imon=1.48451E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26714E1
iondef2_imon=1.57571E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=3.95325E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26051E0
ionrepsh_imon=9.25739E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33598E1
lens5b_imon=2.16945E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.11244E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30197E0
os_ea2_imon=-6.38212E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00414E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71528E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54777E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11033E1
os_restr2_imon=3.38526E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02055E1
cs_anode2_imon=2.09252E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72744E1
iondef1_imon=1.08111E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.06755E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.35599E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.80466E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-1.11305E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47075E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.50404E-6
window_vset=0.0E0
window_vmon=1.99923E-1
window_imon=-1.15629E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92597E3
multa_neg_imon=7.46212E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.43831E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.03313E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50984E0
defgridb_imon=6.20399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33255E1
os_fil1_imon=9.47237E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07263E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61456E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30781E1
cs_fil1_imon=9.2431E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32626E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64747E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22848E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.46637E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.68999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.29549E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21821E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.18201E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.07946E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.19039E-1	-7.99084E-1	-9.13074E0	-9.14187E0	4.93526E-3	9.32217E-2	2.72981E1	-3.26816E1	-3.26938E1	2.6807E1	2.158E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.17633E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09665E0	-8.18825E-1	-7.99513E-1	-9.13103E0	-9.14207E0	5.38826E-3	9.30548E-2	2.73014E1	-3.26548E1	-3.25728E1	2.68057E1	2.15441E-9	2.52707E-3	2.52707E-3	6.30202E-3	2.17918E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.19206E-1	-7.99322E-1	-9.13098E0	-9.14195E0	5.53131E-3	9.30548E-2	2.72986E1	-3.26602E1	-3.27263E1	2.67966E1	2.15124E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.17722E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.18849E-1	-7.98988E-1	-9.131E0	-9.14202E0	5.48363E-3	9.27925E-2	2.73261E1	-3.26903E1	-3.27275E1	2.68028E1	2.16085E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.16436E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.18968E-1	-7.99561E-1	-9.13115E0	-9.1419E0	5.26905E-3	9.29832E-2	2.72943E1	-3.2647E1	-3.25725E1	2.68094E1	2.15238E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.15938E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09657E0	-8.18968E-1	-7.9968E-1	-9.13081E0	-9.14211E0	5.31673E-3	9.33647E-2	2.72839E1	-3.26301E1	-3.27045E1	2.6807E1	2.15894E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.1839E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.18896E-1	-7.99537E-1	-9.13074E0	-9.1418E0	5.45979E-3	9.35793E-2	2.72811E1	-3.26789E1	-3.25269E1	2.68136E1	2.15808E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.17547E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.18539E-1	-7.99298E-1	-9.13076E0	-9.14178E0	5.31673E-3	9.38416E-2	2.72696E1	-3.26627E1	-3.26783E1	2.68094E1	2.15519E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.17255E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.18968E-1	-7.98941E-1	-9.13079E0	-9.14152E0	5.07832E-3	9.34124E-2	2.72561E1	-3.2649E1	-3.25245E1	2.68128E1	2.15332E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.16313E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.18825E-1	-7.99227E-1	-9.13053E0	-9.14183E0	5.00679E-3	9.35793E-2	2.72991E1	-3.26615E1	-3.26398E1	2.67872E1	2.16085E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.16067E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.18896E-1	-7.99036E-1	-9.13067E0	-9.14204E0	4.95911E-3	9.35078E-2	2.72998E1	-3.26644E1	-3.25924E1	2.68202E1	2.15441E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.16621E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.18872E-1	-7.99561E-1	-9.13043E0	-9.14209E0	4.98295E-3	9.32932E-2	2.73016E1	-3.2649E1	-3.24921E1	2.67937E1	2.15613E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.16689E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.18968E-1	-7.99561E-1	-9.13057E0	-9.1418E0	5.36442E-3	9.36985E-2	2.72861E1	-3.2656E1	-3.27233E1	2.67857E1	2.15716E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.16436E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.1923E-1	-7.99298E-1	-9.13084E0	-9.1418E0	4.91142E-3	9.33647E-2	2.72909E1	-3.2662E1	-3.25511E1	2.68163E1	2.15696E-9	2.52585E-3	2.52585E-3	6.30182E-3	2.17337E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.18753E-1	-7.99346E-1	-9.13086E0	-9.14166E0	4.76837E-3	9.31501E-2	2.73284E1	-3.2675E1	-3.26232E1	2.68304E1	2.16085E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.16067E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.18491E-1	-7.99441E-1	-9.13081E0	-9.14164E0	5.03063E-3	9.3317E-2	2.72243E1	-3.26648E1	-3.26362E1	2.68343E1	2.15913E-9	2.52093E-3	2.52093E-3	6.33341E-3	2.15957E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.18586E-1	-7.99298E-1	-9.13093E0	-9.14185E0	4.76837E-3	9.33886E-2	2.73399E1	-3.26579E1	-3.26398E1	2.6777E1	2.15277E-9	2.51758E-3	2.51758E-3	6.3074E-3	2.16712E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.18849E-1	-7.99727E-1	-9.13053E0	-9.14183E0	5.10216E-3	9.30786E-2	2.7334E1	-3.2652E1	-3.2711E1	2.6813E1	2.15897E-9	2.51755E-3	2.51755E-3	6.3074E-3	2.16748E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.18682E-1	-7.99513E-1	-9.13064E0	-9.1418E0	4.98295E-3	9.32217E-2	2.72853E1	-3.26603E1	-3.25647E1	2.68418E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.18682E-1	-7.99465E-1	-9.1306E0	-9.14176E0	4.95911E-3	9.31501E-2	2.72744E1	-3.26714E1	-3.26496E1	2.68082E1	2.15706E-9	2.51334E-3	2.51334E-3	6.29645E-3	2.18201E-2
