[Scan]
initial_time=2016-01-28T16:23:26
final_time=2016-01-28T16:23:45
ip_count=19
run=1026
dataset=2
scan=93
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08793E-4
ql1_vset=
ql1_vmon=-8.17823E-1
ql1_imon=1.35582E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=2.01257E-9
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=9.44877E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-9.7239E-11
mult1=-9.87283E-9
mult2=-2.73458E-9
rf_tmon=-4.77078E-3
rf_agc=3.30632E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.70654E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.65311E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19929E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53412E1
cs_ef1b_imon=3.09743E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02092E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05078E1
cs_ea1_imon=1.25018E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43685E0
lens1_imon=2.73963E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6506E1
os_ef1alow_imon=2.99022E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.41241E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84373E1
cs_ef1a_imon=3.01251E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.25581E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11861E1
os_restr1_imon=4.2867E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15768E1
os_ea1_imon=2.38322E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63626E1
os_ef1bup_imon=3.08222E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21064E0
cs_ionrep_imon=9.64672E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93197E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01886E1
cs_anode1_imon=2.02564E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.22737E-8
tplens_vset=1.4E-1
tplens_vmon=1.59457E0
tplens_imon=-4.39939E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26867E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.56057E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.95175E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25751E0
ionrepsh_imon=9.29704E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33333E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74371E1
cs_ef2b_imon=3.10769E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.31218E0
os_ea2_imon=-7.06706E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.16325E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04247E0
os_ef2alow_imon=-2.5524E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81108E-1
os_ef2bup_imon=-5.19916E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=3.37308E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01526E1
cs_anode2_imon=2.10313E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.11166E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.3576E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.80676E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18027E0
cs_ionaccel_imon=-1.00257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5614E1
einzel_imon=7.39769E-6
window_vset=0.0E0
window_vmon=2.17812E-1
window_imon=-1.21487E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.38865E-4
mask2_vset=0.0E0
mask2_vmon=-1.8602E1
mask2_imon=-4.96571E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92591E3
multa_neg_imon=7.58829E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.45273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.93579E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48277E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33227E1
os_fil1_imon=9.43865E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0658E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61794E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30788E1
cs_fil1_imon=9.2405E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.39671E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65016E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.84453E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.67288E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.322E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.348E-1
cs_fil2_imon=-2.25479E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31904E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22326E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.16621E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.31747E-1
res40_imon=-2.5241E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.18515E-1	-7.99489E-1	-9.13107E0	-9.14226E0	4.673E-3	9.34601E-2	2.72802E1	-3.26747E1	-3.2582E1	2.68034E1	2.158E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17444E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.1861E-1	-7.99394E-1	-9.13119E0	-9.14204E0	4.81606E-3	9.33647E-2	2.73094E1	-3.26646E1	-3.26352E1	2.68004E1	2.15624E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.15883E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.1861E-1	-7.99394E-1	-9.13112E0	-9.14214E0	4.81606E-3	9.34124E-2	2.73098E1	-3.26732E1	-3.26189E1	2.68175E1	2.15987E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.16125E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.18443E-1	-7.99322E-1	-9.13112E0	-9.14185E0	4.95911E-3	9.32217E-2	2.73004E1	-3.26614E1	-3.26455E1	2.68046E1	2.159E-9	2.5131E-3	2.5131E-3	6.29665E-3	2.1829E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.18396E-1	-7.99131E-1	-9.13074E0	-9.14187E0	5.19753E-3	9.31263E-2	2.72675E1	-3.26744E1	-3.26858E1	2.67648E1	2.15987E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.18011E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09673E0	-8.18133E-1	-7.99251E-1	-9.13093E0	-9.14209E0	4.98295E-3	9.32932E-2	2.72866E1	-3.26597E1	-3.26387E1	2.68188E1	2.15736E-9	2.52509E-3	2.52509E-3	6.323E-3	2.17205E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09696E0	-8.18205E-1	-7.99155E-1	-9.13091E0	-9.1419E0	4.79221E-3	9.34362E-2	2.72973E1	-3.2653E1	-3.25599E1	2.68484E1	2.15673E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17911E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.18157E-1	-7.99417E-1	-9.13115E0	-9.14195E0	4.81606E-3	9.31978E-2	2.72895E1	-3.26416E1	-3.26861E1	2.68785E1	2.15624E-9	2.52492E-3	2.52492E-3	6.33436E-3	2.16621E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09673E0	-8.1799E-1	-7.99322E-1	-9.13129E0	-9.14166E0	4.98295E-3	9.34362E-2	2.72648E1	-3.2644E1	-3.25515E1	2.68502E1	2.158E-9	2.52538E-3	2.52538E-3	6.34588E-3	2.16878E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.18014E-1	-7.9937E-1	-9.13115E0	-9.14195E0	4.91142E-3	9.3317E-2	2.7308E1	-3.27068E1	-3.27281E1	2.6804E1	2.15425E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17066E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.18086E-1	-7.9937E-1	-9.13112E0	-9.14168E0	4.93526E-3	9.32217E-2	2.72636E1	-3.26332E1	-3.2638E1	2.67968E1	2.15624E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.15699E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.17919E-1	-7.99084E-1	-9.13107E0	-9.14223E0	4.95911E-3	9.31501E-2	2.73151E1	-3.26992E1	-3.25499E1	2.68227E1	2.15982E-9	2.52697E-3	2.52697E-3	6.3074E-3	2.16952E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.1799E-1	-7.99108E-1	-9.13115E0	-9.14183E0	4.74453E-3	9.35316E-2	2.73435E1	-3.26633E1	-3.26518E1	2.68232E1	2.15808E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.1829E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.1811E-1	-7.99179E-1	-9.13115E0	-9.14183E0	5.03063E-3	9.29356E-2	2.73069E1	-3.26944E1	-3.25476E1	2.6834E1	2.15808E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.16991E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.18276E-1	-7.99131E-1	-9.13124E0	-9.14185E0	5.31673E-3	9.30071E-2	2.72967E1	-3.26831E1	-3.265E1	2.68256E1	2.15533E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.1829E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.18229E-1	-7.99155E-1	-9.13119E0	-9.14242E0	5.19753E-3	9.30071E-2	2.73069E1	-3.26649E1	-3.25422E1	2.6786E1	2.15519E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.17444E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.18157E-1	-7.99346E-1	-9.13088E0	-9.14214E0	5.29289E-3	9.34124E-2	2.73249E1	-3.27023E1	-3.27245E1	2.68004E1	2.15519E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.17444E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.18038E-1	-7.99012E-1	-9.13122E0	-9.14211E0	4.93526E-3	9.31025E-2	2.72791E1	-3.26655E1	-3.25464E1	2.6807E1	2.15533E-9	2.52008E-3	2.52008E-3	6.31817E-3	2.17732E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.17919E-1	-7.99322E-1	-9.13131E0	-9.14187E0	5.00679E-3	9.32693E-2	2.73039E1	-3.2659E1	-3.26455E1	2.67662E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.17823E-1	-7.98869E-1	-9.13117E0	-9.1419E0	5.126E-3	9.3317E-2	2.73147E1	-3.26729E1	-3.26867E1	2.68028E1	2.15808E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.16621E-2
