[Scan]
initial_time=2016-01-28T16:24:19
final_time=2016-01-28T16:24:39
ip_count=19
run=1026
dataset=2
scan=95
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-8.17895E-1
ql1_imon=1.36825E-8
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=1.95608E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=8.36408E-10
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=-8.64744E-11
mult1=-9.33101E-9
mult2=-2.67869E-9
rf_tmon=-5.24543E-3
rf_agc=3.27388E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.67781E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65786E0
bslens_imon=2.46246E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.96868E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12436E2
lens4a_imon=2.05227E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53599E1
cs_ef1b_imon=3.09517E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.01953E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05025E1
cs_ea1_imon=1.23568E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39003E0
lens1_imon=2.50364E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.63897E1
os_ef1alow_imon=2.97578E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0409E1
cs_ea2_imon=1.39254E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84419E1
cs_ef1a_imon=3.01171E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.2517E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11236E1
os_restr1_imon=4.30178E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15456E1
os_ea1_imon=2.4093E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63679E1
os_ef1bup_imon=3.07796E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=9.68762E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01859E1
cs_anode1_imon=2.0465E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.22062E-8
tplens_vset=1.4E-1
tplens_vmon=1.60649E0
tplens_imon=-3.86419E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25876E1
iondef3_imon=1.4895E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26861E1
iondef2_imon=1.56811E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.98383E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=3.98929E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27269E0
ionrepsh_imon=9.28331E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33589E1
lens5b_imon=2.16484E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74913E1
cs_ef2b_imon=3.12736E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.32073E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00428E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71039E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0452E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94513E-1
os_ef2bup_imon=-5.31388E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10992E1
os_restr2_imon=3.39982E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29966E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0164E1
cs_anode2_imon=2.08804E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.08444E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6796E1
iondef4_imon=1.08316E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.41409E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.81608E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12328E0
cs_ionaccel_imon=-9.50035E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.4702E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5605E1
einzel_imon=7.72901E-6
window_vset=0.0E0
window_vmon=1.42745E-1
window_imon=-1.12219E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39035E-4
mask2_vset=0.0E0
mask2_vmon=-1.86144E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.28423E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.82376E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.32166E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32129E0
defgridb_imon=6.10499E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33255E1
os_fil1_imon=9.43443E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06013E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62031E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3079E1
cs_fil1_imon=9.24917E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.40989E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64591E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39813E-2
os_fil2_imon=-2.6625E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90968E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.22156E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36106E-1
cs_fil2_imon=-2.21963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.80671E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22176E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34553E-3
inlet_lpb_pmon=2.17122E-2
chamber_ion_pmon=2.15804E-9
chamber_cvt_pmon=2.5246E-3
foreline_cvt_pmon=2.5246E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.74355E-1
res40_imon=-2.54812E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.17728E-1	-7.99155E-1	-9.13126E0	-9.14209E0	5.26905E-3	9.32932E-2	2.72698E1	-3.26996E1	-3.25936E1	2.67833E1	2.15782E-9	2.52066E-3	2.52066E-3	6.3245E-3	2.16443E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.17728E-1	-7.98845E-1	-9.13119E0	-9.14214E0	4.91142E-3	9.33409E-2	2.73075E1	-3.26505E1	-3.2514E1	2.68063E1	2.15726E-9	2.52025E-3	2.52025E-3	6.3074E-3	2.17829E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.1799E-1	-7.98988E-1	-9.131E0	-9.14228E0	5.07832E-3	9.34362E-2	2.73262E1	-3.26613E1	-3.26431E1	2.6811E1	2.16078E-9	2.52473E-3	2.52473E-3	6.29624E-3	2.17915E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.17919E-1	-7.99131E-1	-9.1311E0	-9.14221E0	5.03063E-3	9.34362E-2	2.73375E1	-3.26452E1	-3.27017E1	2.6804E1	2.16002E-9	2.52613E-3	2.52613E-3	6.30221E-3	2.18101E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.1799E-1	-7.98941E-1	-9.13105E0	-9.14211E0	4.93526E-3	9.31501E-2	2.72739E1	-3.265E1	-3.25653E1	2.68136E1	2.158E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.1839E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.17776E-1	-7.98965E-1	-9.13146E0	-9.14211E0	5.03063E-3	9.30071E-2	2.72986E1	-3.26626E1	-3.26396E1	2.67995E1	2.158E-9	2.52757E-3	2.52757E-3	6.34588E-3	2.17633E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.17919E-1	-7.99084E-1	-9.13141E0	-9.14233E0	4.8399E-3	9.29594E-2	2.73169E1	-3.26673E1	-3.25623E1	2.68136E1	2.15992E-9	2.51739E-3	2.51739E-3	6.26985E-3	2.1885E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.18062E-1	-7.99179E-1	-9.13146E0	-9.14218E0	5.17368E-3	9.31501E-2	2.72895E1	-3.26681E1	-3.26765E1	2.68142E1	2.159E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.17361E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.18276E-1	-7.99155E-1	-9.13136E0	-9.14207E0	5.45979E-3	9.34839E-2	2.73069E1	-3.26773E1	-3.25664E1	2.68354E1	2.15706E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.18011E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.18062E-1	-7.99179E-1	-9.13146E0	-9.14202E0	5.43594E-3	9.35078E-2	2.7299E1	-3.26346E1	-3.27264E1	2.682E1	2.15533E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.16436E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.18157E-1	-7.99108E-1	-9.13124E0	-9.14209E0	5.14984E-3	9.32932E-2	2.73092E1	-3.26856E1	-3.25906E1	2.68088E1	2.15791E-9	2.51581E-3	2.51581E-3	6.32978E-3	2.17337E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.18324E-1	-7.99036E-1	-9.13117E0	-9.1419E0	5.03063E-3	9.33886E-2	2.72528E1	-3.26416E1	-3.26585E1	2.68112E1	2.159E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.16436E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.17823E-1	-7.99179E-1	-9.13131E0	-9.14202E0	4.81606E-3	9.33647E-2	2.72943E1	-3.26561E1	-3.24962E1	2.68094E1	2.15894E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.16689E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.18133E-1	-7.99203E-1	-9.13112E0	-9.14207E0	5.34058E-3	9.32455E-2	2.73334E1	-3.26543E1	-3.26632E1	2.68024E1	2.15706E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.17633E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.18014E-1	-7.99131E-1	-9.13131E0	-9.14209E0	5.50747E-3	9.31978E-2	2.72941E1	-3.27025E1	-3.25317E1	2.6798E1	2.159E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.18104E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.18014E-1	-7.98988E-1	-9.13136E0	-9.14209E0	5.43594E-3	9.31978E-2	2.73069E1	-3.26807E1	-3.27227E1	2.6816E1	2.15791E-9	2.52027E-3	2.52027E-3	6.29624E-3	2.17529E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.18062E-1	-7.98965E-1	-9.13131E0	-9.14209E0	5.36442E-3	9.31025E-2	2.73299E1	-3.26496E1	-3.26048E1	2.68052E1	2.16081E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.17633E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.17943E-1	-7.98965E-1	-9.13153E0	-9.14214E0	4.91142E-3	9.29117E-2	2.73039E1	-3.26729E1	-3.2766E1	2.6789E1	2.159E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.16991E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.1799E-1	-7.99179E-1	-9.13131E0	-9.14214E0	4.95911E-3	9.30786E-2	2.72845E1	-3.26531E1	-3.26065E1	2.67931E1	2.15894E-9	2.5199E-3	2.5199E-3	6.3514E-3	2.17066E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.17895E-1	-7.98821E-1	-9.13112E0	-9.14223E0	5.05447E-3	9.31501E-2	2.73045E1	-3.26861E1	-3.25876E1	2.6796E1	2.15804E-9	2.5246E-3	2.5246E-3	6.34553E-3	2.17122E-2
