[Scan]
initial_time=2016-01-28T16:24:46
final_time=2016-01-28T16:25:05
ip_count=19
run=1026
dataset=2
scan=96
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.17442E-1
ql1_imon=1.36781E-8
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=2.01014E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=8.73339E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-1.09434E-10
mult1=-9.43937E-9
mult2=-2.79047E-9
rf_tmon=-4.48238E-3
rf_agc=3.31894E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=1.71839E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66794E0
bslens_imon=2.45484E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20091E1
lens5a_imon=1.98848E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53664E1
cs_ef1b_imon=3.11064E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05066E1
cs_ea1_imon=1.2437E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42844E0
lens1_imon=2.90185E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04183E1
cs_ea2_imon=1.40628E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.00216E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.24861E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.29815E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15354E1
os_ea1_imon=2.40413E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63263E1
os_ef1bup_imon=3.07244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2545E0
cs_ionrep_imon=9.7044E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91844E2
cs_nozzle_imon=1.93561E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=2.05756E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.22002E-8
tplens_vset=1.4E-1
tplens_vmon=1.62461E0
tplens_imon=-4.07495E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26518E1
iondef3_imon=1.49821E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26386E1
iondef2_imon=1.58472E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.95563E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28995E0
ionrepsh_imon=9.3403E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33712E1
lens5b_imon=2.19648E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.33381E0
os_ea2_imon=-7.8241E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.76727E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.50988E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11021E1
os_restr2_imon=3.39932E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.09973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73556E1
iondef1_imon=1.11139E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.36709E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.82642E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-1.1599E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56171E1
einzel_imon=7.47881E-6
window_vset=0.0E0
window_vmon=1.89112E-1
window_imon=-9.97719E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92676E3
multa_neg_imon=7.41165E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.25446E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.13767E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.1391E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.36912E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07503E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62293E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30776E1
cs_fil1_imon=9.23836E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29442E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63574E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40904E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77292E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.27689E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.53983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3945E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21808E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.17633E-2
chamber_ion_pmon=2.15519E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.39781E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.18038E-1	-7.99012E-1	-9.1311E0	-9.14156E0	5.17368E-3	9.32217E-2	2.73523E1	-3.26992E1	-3.26248E1	2.68052E1	2.15425E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.16313E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.17966E-1	-7.98869E-1	-9.13117E0	-9.14202E0	4.98295E-3	9.37939E-2	2.7302E1	-3.26536E1	-3.26352E1	2.6828E1	2.159E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.16436E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.17895E-1	-7.98726E-1	-9.13124E0	-9.14242E0	4.98295E-3	9.33409E-2	2.72802E1	-3.2648E1	-3.2659E1	2.68094E1	2.15696E-9	2.5147E-3	2.5147E-3	6.29067E-3	2.1676E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.17537E-1	-7.9906E-1	-9.13105E0	-9.14218E0	4.98295E-3	9.31263E-2	2.73216E1	-3.2675E1	-3.26278E1	2.68148E1	2.16088E-9	2.51603E-3	2.51603E-3	6.29157E-3	2.16192E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.17466E-1	-7.98845E-1	-9.13103E0	-9.14211E0	5.03063E-3	9.35793E-2	2.73466E1	-3.26591E1	-3.25858E1	2.67956E1	2.15808E-9	2.52169E-3	2.52169E-3	6.28592E-3	2.18477E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17728E-1	-7.98941E-1	-9.13095E0	-9.14216E0	5.07832E-3	9.35078E-2	2.73039E1	-3.26831E1	-3.27143E1	2.68314E1	2.15519E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.16501E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.17823E-1	-7.98869E-1	-9.13117E0	-9.14195E0	5.05447E-3	9.32932E-2	2.73093E1	-3.26248E1	-3.26464E1	2.68082E1	2.158E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.17633E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.17466E-1	-7.9906E-1	-9.13115E0	-9.14199E0	4.88758E-3	9.3317E-2	2.73351E1	-3.26446E1	-3.25767E1	2.67887E1	2.158E-9	2.52264E-3	2.52264E-3	6.31288E-3	2.16595E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.17585E-1	-7.99131E-1	-9.13136E0	-9.1418E0	5.29289E-3	9.30071E-2	2.72945E1	-3.2613E1	-3.26826E1	2.68082E1					
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.17561E-1	-7.99036E-1	-9.13129E0	-9.14204E0	5.45979E-3	9.3317E-2	2.72835E1	-3.265E1	-3.25293E1	2.68124E1	2.15992E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.17918E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.17704E-1	-7.99084E-1	-9.13115E0	-9.14207E0	5.07832E-3	9.32693E-2	2.73428E1	-3.26484E1	-3.27157E1	2.68028E1	2.15425E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.17255E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.17513E-1	-7.99012E-1	-9.13105E0	-9.14195E0	5.24521E-3	9.3317E-2	2.72647E1	-3.26358E1	-3.2533E1	2.68148E1	2.15238E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.17066E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.17585E-1	-7.99155E-1	-9.13091E0	-9.14235E0	5.36442E-3	9.3317E-2	2.7324E1	-3.26762E1	-3.27228E1	2.68136E1	2.15519E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.18011E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.17823E-1	-7.9906E-1	-9.13124E0	-9.14216E0	5.45979E-3	9.34839E-2	2.73171E1	-3.26699E1	-3.25539E1	2.68076E1	2.159E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.17918E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.17823E-1	-7.99227E-1	-9.13103E0	-9.14223E0	5.14984E-3	9.33886E-2	2.7261E1	-3.26652E1	-3.26658E1	2.6792E1	2.15894E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.17633E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.178E-1	-7.99131E-1	-9.13112E0	-9.14228E0	5.31673E-3	9.33647E-2	2.73039E1	-3.2659E1	-3.25611E1	2.68169E1	2.15696E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.18108E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.17657E-1	-7.99108E-1	-9.13134E0	-9.14228E0	5.50747E-3	9.34362E-2	2.73132E1	-3.26538E1	-3.27257E1	2.68112E1	2.15624E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.17918E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.1737E-1	-7.99298E-1	-9.13143E0	-9.14211E0	5.48363E-3	9.35316E-2	2.72823E1	-3.26651E1	-3.25749E1	2.68148E1	2.15636E-9	2.52131E-3	2.52131E-3	6.31269E-3	2.18194E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.17394E-1	-7.9906E-1	-9.13134E0	-9.1423E0	5.4121E-3	9.33886E-2	2.73147E1	-3.26693E1	-3.26386E1	2.67833E1	2.158E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.1839E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.17442E-1	-7.98821E-1	-9.13115E0	-9.14202E0	5.50747E-3	9.33647E-2	2.73556E1	-3.26386E1	-3.26518E1	2.68022E1	2.15519E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17633E-2
