[Scan]
initial_time=2016-01-28T16:29:39
final_time=2016-01-28T16:29:58
ip_count=19
run=1026
dataset=2
scan=107
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.17037E-1
ql1_imon=1.38727E-8
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=1.99846E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=6.08754E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-1.20914E-10
mult1=-1.01496E-8
mult2=-2.70758E-9
rf_tmon=-4.60976E-3
rf_agc=3.30613E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.6726E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.47601E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5369E1
cs_ef1b_imon=3.09269E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02181E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05059E1
cs_ea1_imon=1.23934E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41562E0
lens1_imon=2.5468E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64701E1
os_ef1alow_imon=2.97731E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03926E1
cs_ea2_imon=1.40463E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84209E1
cs_ef1a_imon=3.00094E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.24177E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11222E1
os_restr1_imon=4.30207E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.41903E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63682E1
os_ef1bup_imon=3.0694E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23617E0
cs_ionrep_imon=9.72118E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01925E1
cs_anode1_imon=2.05254E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.2097E-8
tplens_vset=1.4E-1
tplens_vmon=1.61194E0
tplens_imon=-2.8473E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26083E1
iondef3_imon=1.48887E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.57063E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02871E2
lens6_imon=2.98102E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.03073E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26803E0
ionrepsh_imon=9.22212E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33829E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74559E1
cs_ef2b_imon=3.11979E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.33586E0
os_ea2_imon=-6.3867E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00386E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71229E1
cs_ef2a_imon=3.18721E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05688E0
os_ef2alow_imon=-2.67536E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89701E-1
os_ef2bup_imon=-5.29918E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.37974E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.30141E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02058E1
cs_anode2_imon=2.1078E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72591E1
iondef1_imon=1.0914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68099E1
iondef4_imon=1.07113E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.3845E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.75517E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13593E0
cs_ionaccel_imon=-1.01419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47035E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.7782E-6
window_vset=0.0E0
window_vmon=1.95676E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39251E-4
mask2_vset=0.0E0
mask2_vmon=-1.86396E1
mask2_imon=-8.09154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.97979E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.56049E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.15865E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38489E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33262E1
os_fil1_imon=9.43329E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0741E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61819E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30671E1
cs_fil1_imon=9.2458E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28335E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63959E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28124E-2
os_fil2_imon=-2.69235E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86023E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.29861E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34022E-1
cs_fil2_imon=-2.368E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.48146E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2188E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.18201E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.52757E-3
foreline_cvt_pmon=2.52757E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.43191E-1
res40_imon=-2.5155E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.17418E-1	-7.99012E-1	-9.1311E0	-9.14176E0	5.05447E-3	9.33886E-2	2.72992E1	-3.26455E1	-3.26236E1	2.6804E1	2.159E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.17361E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.17156E-1	-7.98965E-1	-9.13143E0	-9.14207E0	5.00679E-3	9.32932E-2	2.72474E1	-3.26729E1	-3.26464E1	2.68118E1	2.15533E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.17361E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09356E0	-8.17132E-1	-7.98726E-1	-9.13117E0	-9.14207E0	5.03063E-3	9.33886E-2	2.73225E1	-3.26324E1	-3.26689E1	2.68001E1	2.158E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.17255E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.17299E-1	-7.98988E-1	-9.13105E0	-9.14218E0	5.17368E-3	9.33647E-2	2.72957E1	-3.2672E1	-3.25918E1	2.68163E1	2.15817E-9	2.51919E-3	2.51919E-3	6.29684E-3	2.171E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.17323E-1	-7.98893E-1	-9.13115E0	-9.14183E0	5.14984E-3	9.32693E-2	2.73009E1	-3.26705E1	-3.27366E1	2.68202E1	2.15808E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.17361E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.17299E-1	-7.98941E-1	-9.13095E0	-9.14209E0	4.88758E-3	9.34362E-2	2.73057E1	-3.26518E1	-3.24944E1	2.68196E1	2.16081E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.17255E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-8.16941E-1	-7.98845E-1	-9.13103E0	-9.14216E0	5.07832E-3	9.32455E-2	2.72546E1	-3.2653E1	-3.259E1	2.68226E1	2.15425E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.16878E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.17037E-1	-7.98512E-1	-9.13098E0	-9.14192E0	5.19753E-3	9.32217E-2	2.729E1	-3.2659E1	-3.27731E1	2.68294E1	2.15145E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.15938E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.17037E-1	-7.98678E-1	-9.13122E0	-9.14185E0	4.95911E-3	9.34601E-2	2.72772E1	-3.26487E1	-3.28045E1	2.68076E1	2.15571E-9	2.52364E-3	2.52364E-3	6.32273E-3	2.1678E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16917E-1	-7.98774E-1	-9.13098E0	-9.1419E0	5.19753E-3	9.33647E-2	2.7265E1	-3.2662E1	-3.2613E1	2.68172E1	2.16168E-9	2.51793E-3	2.51793E-3	6.28377E-3	2.18421E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.17108E-1	-7.98702E-1	-9.13098E0	-9.14187E0	5.05447E-3	9.33886E-2	2.73249E1	-3.26663E1	-3.24752E1	2.67914E1	2.15519E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.1839E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.17227E-1	-7.98821E-1	-9.13079E0	-9.14199E0	4.91142E-3	9.31501E-2	2.73021E1	-3.26573E1	-3.26458E1	2.68166E1	2.159E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.18104E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16822E-1	-7.98941E-1	-9.13103E0	-9.14183E0	5.10216E-3	9.33886E-2	2.72733E1	-3.26663E1	-3.26693E1	2.68046E1	2.15987E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.17444E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.1706E-1	-7.98726E-1	-9.13103E0	-9.14214E0	4.93526E-3	9.3317E-2	2.72973E1	-3.26771E1	-3.26212E1	2.6798E1	2.15332E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.18201E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.1706E-1	-7.98988E-1	-9.13079E0	-9.14187E0	5.4121E-3	9.34839E-2	2.73004E1	-3.26508E1	-3.27487E1	2.68147E1	2.15894E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.1575E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16917E-1	-7.9906E-1	-9.13136E0	-9.14211E0	5.17368E-3	9.33647E-2	2.72775E1	-3.26945E1	-3.27077E1	2.68123E1	2.16085E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.16621E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.17013E-1	-7.99036E-1	-9.13138E0	-9.14192E0	5.00679E-3	9.33886E-2	2.73111E1	-3.26476E1	-3.26843E1	2.68346E1	2.158E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.18011E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.1706E-1	-7.98821E-1	-9.13146E0	-9.14202E0	4.55379E-3	9.30548E-2	2.73464E1	-3.26307E1	-3.28195E1	2.68172E1	2.15706E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.17066E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.1706E-1	-7.99131E-1	-9.1315E0	-9.14199E0	4.74453E-3	9.31263E-2	2.73051E1	-3.265E1	-3.27173E1	2.68076E1	2.15808E-9	2.5131E-3	2.5131E-3	6.32896E-3	2.17176E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.17037E-1	-7.98988E-1	-9.13138E0	-9.14176E0	5.07832E-3	9.32693E-2	2.72591E1	-3.26573E1	-3.26083E1	2.68099E1	2.15706E-9	2.52757E-3	2.52757E-3	6.3074E-3	2.18201E-2
