[Scan]
initial_time=2016-01-28T16:31:26
final_time=2016-01-28T16:31:45
ip_count=19
run=1026
dataset=2
scan=111
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=1.38198E-8
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=2.04984E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=5.38433E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=-7.17044E-11
mult1=-9.63202E-9
mult2=-2.70264E-9
rf_tmon=-3.92962E-3
rf_agc=3.41086E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=1.71906E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68096E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19624E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05026E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=3.10307E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.01965E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05354E1
cs_ea1_imon=1.24536E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45869E0
lens1_imon=2.54326E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.41454E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=3.02559E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.24878E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.29707E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1553E1
os_ea1_imon=2.4116E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24679E0
cs_ionrep_imon=9.615E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93452E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.07234E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.21379E-8
tplens_vset=1.4E-1
tplens_vmon=1.59601E0
tplens_imon=-3.48439E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2492E1
iondef3_imon=1.514E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.55789E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.98879E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.258E0
ionrepsh_imon=9.40263E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33752E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39485E0
os_ea2_imon=-7.0238E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06055E2
lens4b_imon=2.00584E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.76366E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2145E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10997E1
os_restr2_imon=3.40725E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.30141E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.09721E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73141E1
iondef1_imon=1.08573E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.0708E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=6.35685E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.7853E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0971E0
cs_ionaccel_imon=-1.03736E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47161E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.45358E-6
window_vset=0.0E0
window_vmon=1.26643E-1
window_imon=-1.05178E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86716E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9269E3
multa_neg_imon=7.16927E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.73746E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.50197E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25496E0
defgridb_imon=6.22778E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33252E1
os_fil1_imon=9.3857E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07605E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61775E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3061E1
cs_fil1_imon=9.21649E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31965E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63837E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4332E-2
os_fil2_imon=-2.97231E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.17206E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21871E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.16806E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.68923E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.17037E-1	-7.98512E-1	-9.13165E0	-9.14195E0	5.29289E-3	9.30071E-2	2.73027E1	-3.2652E1	-3.26431E1	2.6796E1	2.15808E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.17361E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16798E-1	-7.98488E-1	-9.13115E0	-9.14195E0	5.19753E-3	9.32217E-2	2.72877E1	-3.26488E1	-3.25533E1	2.68178E1	2.158E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.18011E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16703E-1	-7.99155E-1	-9.13141E0	-9.14164E0	5.03063E-3	9.30309E-2	2.7347E1	-3.26638E1	-3.26402E1	2.6801E1	2.158E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.17255E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16584E-1	-7.98965E-1	-9.13143E0	-9.14185E0	5.07832E-3	9.33647E-2	2.7301E1	-3.26638E1	-3.25245E1	2.67946E1	2.15726E-9	2.52342E-3	2.52342E-3	6.32858E-3	2.18011E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16679E-1	-7.99012E-1	-9.13141E0	-9.14195E0	5.17368E-3	9.33647E-2	2.7266E1	-3.26603E1	-3.26272E1	2.68288E1	2.158E-9	2.52428E-3	2.52428E-3	6.29098E-3	2.18011E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16965E-1	-7.98774E-1	-9.13169E0	-9.14221E0	5.126E-3	9.31978E-2	2.72799E1	-3.26464E1	-3.27005E1	2.67656E1	2.15613E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.16501E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16822E-1	-7.99155E-1	-9.13177E0	-9.14207E0	5.03063E-3	9.32455E-2	2.72919E1	-3.26639E1	-3.26194E1	2.68238E1	2.15425E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.17633E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.1706E-1	-7.98988E-1	-9.1316E0	-9.14204E0	4.98295E-3	9.31501E-2	2.73033E1	-3.265E1	-3.2587E1	2.68106E1	2.15706E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.17444E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.17227E-1	-7.99203E-1	-9.13157E0	-9.14207E0	5.05447E-3	9.32693E-2	2.73144E1	-3.26527E1	-3.27233E1	2.68665E1	2.15808E-9	2.52599E-3	2.52599E-3	6.33436E-3	2.17176E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.17227E-1	-7.98798E-1	-9.13091E0	-9.14209E0	5.17368E-3	9.31978E-2	2.7291E1	-3.26805E1	-3.24699E1	2.68022E1	2.15533E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.17732E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.17394E-1	-7.99084E-1	-9.13136E0	-9.14233E0	4.76837E-3	9.34601E-2	2.73345E1	-3.26861E1	-3.24494E1	2.6795E1	2.158E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.17444E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.17299E-1	-7.98893E-1	-9.13134E0	-9.14221E0	5.126E-3	9.34601E-2	2.72889E1	-3.26837E1	-3.25641E1	2.67962E1	2.15425E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.17822E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.17156E-1	-7.99131E-1	-9.13138E0	-9.14197E0	5.17368E-3	9.31025E-2	2.73339E1	-3.26452E1	-3.26296E1	2.68052E1	2.15795E-9	2.51898E-3	2.51898E-3	6.30187E-3	2.1663E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17299E-1	-7.99084E-1	-9.13157E0	-9.1419E0	5.05447E-3	9.33886E-2	2.73303E1	-3.26909E1	-3.27636E1	2.67962E1					
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.17275E-1	-7.99012E-1	-9.13169E0	-9.14228E0	4.72069E-3	9.35316E-2	2.73399E1	-3.26296E1	-3.27678E1	2.67956E1	2.15425E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.18011E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.17156E-1	-7.99036E-1	-9.13124E0	-9.14164E0	4.72069E-3	9.34839E-2	2.73193E1	-3.2636E1	-3.25971E1	2.67788E1	2.15613E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17633E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.17108E-1	-7.99227E-1	-9.13112E0	-9.14197E0	4.86374E-3	9.34362E-2	2.72997E1	-3.26855E1	-3.24476E1	2.67833E1	2.15716E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.16991E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.17108E-1	-7.98869E-1	-9.13134E0	-9.14211E0	4.64916E-3	9.36031E-2	2.72937E1	-3.26657E1	-3.2507E1	2.6819E1	2.15519E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.18011E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16894E-1	-7.98655E-1	-9.13115E0	-9.14202E0	4.60148E-3	9.3627E-2	2.72886E1	-3.26708E1	-3.24479E1	2.67908E1	2.15706E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.17822E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16965E-1	-7.98798E-1	-9.13141E0	-9.14207E0	4.91142E-3	9.35555E-2	2.73141E1	-3.26747E1	-3.2492E1	2.68016E1	2.15808E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.16806E-2
