[Scan]
initial_time=2016-01-28T16:33:12
final_time=2016-01-28T16:33:32
ip_count=19
run=1026
dataset=2
scan=115
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08697E-4
ql1_vset=
ql1_vmon=-8.17323E-1
ql1_imon=1.38801E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=1.99883E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=5.07033E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-7.4935E-11
mult1=-1.06675E-8
mult2=-2.89826E-9
rf_tmon=-3.60518E-3
rf_agc=3.40966E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.69495E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66013E0
bslens_imon=2.38995E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19815E1
lens5a_imon=1.97586E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05057E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=3.11244E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.0184E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05481E1
cs_ea1_imon=1.2455E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42423E0
lens1_imon=2.73242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.41565E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.99459E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.26559E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.30247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15107E1
os_ea1_imon=2.40053E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.0692E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27132E0
cs_ionrep_imon=9.58904E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.04963E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.23135E-8
tplens_vset=1.4E-1
tplens_vmon=1.64444E0
tplens_imon=-3.93075E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26146E1
iondef3_imon=1.4672E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26807E1
iondef2_imon=1.57751E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98638E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.96323E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30677E0
ionrepsh_imon=9.40519E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33724E1
lens5b_imon=2.18459E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7491E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41793E0
os_ea2_imon=-6.88681E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00403E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.73843E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.42339E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=3.39932E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30036E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.08856E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72654E1
iondef1_imon=1.08472E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6786E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.40919E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.80915E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-1.09503E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.78875E-6
window_vset=0.0E0
window_vmon=1.83105E-1
window_imon=-1.19233E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86248E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92684E3
multa_neg_imon=7.68923E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.52844E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50073E3
multb_neg_imon=7.70365E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19705E0
defgridb_imon=6.18957E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33249E1
os_fil1_imon=9.44649E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07089E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62327E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30723E1
cs_fil1_imon=9.23902E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34428E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64909E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.08225E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41853E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2207E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.16621E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.00137E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16822E-1	-7.98798E-1	-9.13115E0	-9.14218E0	5.29289E-3	9.3317E-2	2.72931E1	-3.2653E1	-3.27516E1	2.67698E1	2.15332E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.17255E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.1706E-1	-7.9875E-1	-9.13136E0	-9.14185E0	5.24521E-3	9.35078E-2	2.72941E1	-3.26579E1	-3.25663E1	2.68059E1	2.15533E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.17918E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.17132E-1	-7.98535E-1	-9.13117E0	-9.1418E0	5.43594E-3	9.35793E-2	2.72843E1	-3.26762E1	-3.26474E1	2.68148E1	2.15455E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.18011E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.1687E-1	-7.9875E-1	-9.13131E0	-9.14183E0	5.29289E-3	9.34124E-2	2.72974E1	-3.26632E1	-3.24897E1	2.67908E1	2.15982E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.17337E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16917E-1	-7.99227E-1	-9.13143E0	-9.14199E0	4.93526E-3	9.32217E-2	2.73257E1	-3.26726E1	-3.25122E1	2.68004E1	2.15519E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.17633E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16846E-1	-7.99179E-1	-9.13129E0	-9.14192E0	4.76837E-3	9.33647E-2	2.72913E1	-3.26735E1	-3.25617E1	2.68204E1	2.16085E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.17547E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.1706E-1	-7.98893E-1	-9.13141E0	-9.14197E0	4.72069E-3	9.32932E-2	2.72931E1	-3.26567E1	-3.25587E1	2.67968E1	2.14958E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.17633E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16679E-1	-7.98821E-1	-9.13157E0	-9.14199E0	4.69685E-3	9.32932E-2	2.73147E1	-3.26464E1	-3.25755E1	2.68292E1	2.15987E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.17066E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.1656E-1	-7.98869E-1	-9.13119E0	-9.14209E0	4.91142E-3	9.34839E-2	2.73033E1	-3.26609E1	-3.24974E1	2.68232E1	2.15332E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.18011E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16774E-1	-7.98917E-1	-9.13117E0	-9.14197E0	4.74453E-3	9.33886E-2	2.72763E1	-3.26524E1	-3.2495E1	2.68244E1	2.15349E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.15883E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16441E-1	-7.98893E-1	-9.13138E0	-9.14216E0	4.95911E-3	9.32455E-2	2.73315E1	-3.26603E1	-3.25545E1	2.68034E1	2.15519E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.17255E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16798E-1	-7.98845E-1	-9.13122E0	-9.14226E0	4.95911E-3	9.34124E-2	2.73092E1	-3.26632E1	-3.26225E1	2.6813E1	2.15519E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.18011E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16846E-1	-7.98845E-1	-9.13117E0	-9.14192E0	4.79221E-3	9.35078E-2	2.72873E1	-3.26487E1	-3.27699E1	2.68232E1	2.15706E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.17444E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16846E-1	-7.98917E-1	-9.13134E0	-9.1419E0	4.95911E-3	9.34124E-2	2.73315E1	-3.26681E1	-3.26951E1	2.68034E1	2.15409E-9	2.51581E-3	2.51581E-3	6.27954E-3	2.18301E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.17084E-1	-7.99108E-1	-9.1315E0	-9.14218E0	4.76837E-3	9.36031E-2	2.73081E1	-3.26771E1	-3.26242E1	2.6816E1	2.15624E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.17732E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.17084E-1	-7.98368E-1	-9.13138E0	-9.14211E0	4.98295E-3	9.3317E-2	2.73399E1	-3.26591E1	-3.27402E1	2.67962E1	2.15894E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.18201E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.1706E-1	-7.98845E-1	-9.1316E0	-9.14199E0	5.03063E-3	9.31978E-2	2.72862E1	-3.26767E1	-3.26714E1	2.67836E1	2.15894E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.17255E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.17132E-1	-7.98488E-1	-9.13177E0	-9.14211E0	5.03063E-3	9.34839E-2	2.73293E1	-3.2639E1	-3.24673E1	2.67845E1	2.15894E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.16125E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.1718E-1	-7.98702E-1	-9.13157E0	-9.14195E0	5.14984E-3	9.31501E-2	2.73741E1	-3.26113E1	-3.25794E1	2.68358E1	2.15533E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.19223E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.17323E-1	-7.9875E-1	-9.13131E0	-9.1418E0	5.00679E-3	9.31263E-2	2.72654E1	-3.26807E1	-3.26146E1	2.6786E1	2.15808E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.16621E-2
