[Scan]
initial_time=2016-01-28T16:33:39
final_time=2016-01-28T16:33:58
ip_count=19
run=1026
dataset=2
scan=116
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-8.16989E-1
ql1_imon=1.3879E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=1.99714E-9
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=4.45366E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=-7.30872E-11
mult1=-9.91691E-9
mult2=-2.64871E-9
rf_tmon=-4.95012E-3
rf_agc=3.22142E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.70126E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.30329E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1959E1
lens5a_imon=1.97805E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12455E2
lens4a_imon=2.0517E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53768E1
cs_ef1b_imon=3.11233E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.0207E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04962E1
cs_ea1_imon=1.23948E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43161E0
lens1_imon=2.60697E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64589E1
os_ef1alow_imon=2.95858E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03865E1
cs_ea2_imon=1.38743E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84277E1
cs_ef1a_imon=3.0049E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.26464E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11169E1
os_restr1_imon=4.2878E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15261E1
os_ea1_imon=2.43747E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63648E1
os_ef1bup_imon=3.07963E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24496E0
cs_ionrep_imon=9.60332E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93393E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.04234E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.23188E-8
tplens_vset=1.4E-1
tplens_vmon=1.61742E0
tplens_imon=-3.24725E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.28078E1
iondef3_imon=1.49216E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.57081E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98541E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.94908E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27546E0
ionrepsh_imon=9.15169E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33509E1
lens5b_imon=2.19374E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74839E1
cs_ef2b_imon=3.12673E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35657E0
os_ea2_imon=-7.64673E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06061E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71193E1
cs_ef2a_imon=3.18589E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06883E0
os_ef2alow_imon=-2.65396E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77098E-1
os_ef2bup_imon=-5.49143E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=3.40697E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.3024E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.10111E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73112E1
iondef1_imon=1.0892E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.08056E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.44422E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.83026E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1496E0
cs_ionaccel_imon=-1.07758E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47156E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56016E1
einzel_imon=7.62167E-6
window_vset=0.0E0
window_vmon=1.73759E-1
window_imon=-1.05812E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39119E-4
mask2_vset=0.0E0
mask2_vmon=-1.86623E1
mask2_imon=-7.38954E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92602E3
multa_neg_imon=7.34128E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.4536E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.04539E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31904E0
defgridb_imon=6.13045E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33262E1
os_fil1_imon=9.44671E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07297E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62689E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30669E1
cs_fil1_imon=9.24126E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30235E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64778E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16347E-2
os_fil2_imon=-2.6393E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87575E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.91123E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32868E-1
cs_fil2_imon=-2.45117E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24001E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21948E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.17822E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.65971E-1
res40_imon=-2.50216E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.17299E-1	-7.98583E-1	-9.13141E0	-9.14178E0	5.26905E-3	9.32217E-2	2.73242E1	-3.26729E1	-3.2655E1	2.68128E1	2.15864E-9	2.52384E-3	2.52384E-3	6.32518E-3	2.16584E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09317E0	-8.17275E-1	-7.98941E-1	-9.13105E0	-9.14209E0	5.14984E-3	9.32217E-2	2.7297E1	-3.26609E1	-3.27477E1	2.68119E1	2.15546E-9	2.51498E-3	2.51498E-3	6.32328E-3	2.1856E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-8.17275E-1	-7.98774E-1	-9.13131E0	-9.14202E0	5.05447E-3	9.35078E-2	2.7297E1	-3.267E1	-3.2721E1	2.67966E1	2.15879E-9	2.51952E-3	2.51952E-3	6.31879E-3	2.17422E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.17204E-1	-7.98821E-1	-9.13136E0	-9.14214E0	4.79221E-3	9.36031E-2	2.73287E1	-3.26608E1	-3.24591E1	2.67902E1	2.15455E-9	2.52236E-3	2.52236E-3	6.33388E-3	2.17464E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.17084E-1	-7.98726E-1	-9.13153E0	-9.1418E0	5.29289E-3	9.32455E-2	2.72576E1	-3.26669E1	-3.24908E1	2.6819E1	2.15894E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.18201E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.17299E-1	-7.98774E-1	-9.13179E0	-9.14209E0	5.24521E-3	9.32455E-2	2.72473E1	-3.26874E1	-3.25358E1	2.67896E1	2.158E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.16689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.1706E-1	-7.99084E-1	-9.13177E0	-9.14195E0	5.126E-3	9.33647E-2	2.73317E1	-3.26671E1	-3.25611E1	2.68319E1	2.15992E-9	2.51417E-3	2.51417E-3	6.29665E-3	2.17547E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.1737E-1	-7.98869E-1	-9.13138E0	-9.14192E0	5.31673E-3	9.31501E-2	2.7309E1	-3.26344E1	-3.25559E1	2.68244E1	2.15736E-9	2.52093E-3	2.52093E-3	6.34907E-3	2.18281E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.17418E-1	-7.9875E-1	-9.13146E0	-9.1419E0	5.36442E-3	9.34839E-2	2.73022E1	-3.267E1	-3.2783E1	2.68007E1	2.15358E-9	2.51675E-3	2.51675E-3	6.29558E-3	2.17602E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16965E-1	-7.98583E-1	-9.13153E0	-9.14195E0	5.48363E-3	9.34362E-2	2.72973E1	-3.26693E1	-3.28177E1	2.67746E1	2.15349E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.18104E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.17227E-1	-7.98655E-1	-9.13162E0	-9.14192E0	5.24521E-3	9.35316E-2	2.73081E1	-3.26615E1	-3.26224E1	2.6813E1	2.15519E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.16878E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.17299E-1	-7.98512E-1	-9.13141E0	-9.14202E0	4.95911E-3	9.33409E-2	2.73099E1	-3.26314E1	-3.26945E1	2.68106E1	2.15073E-9	2.5131E-3	2.5131E-3	6.30202E-3	2.18663E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.17251E-1	-7.98559E-1	-9.13157E0	-9.14199E0	5.00679E-3	9.3317E-2	2.72951E1	-3.26596E1	-3.25381E1	2.67974E1	2.15145E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.16878E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16941E-1	-7.98678E-1	-9.13191E0	-9.14197E0	5.05447E-3	9.3317E-2	2.73039E1	-3.26395E1	-3.25342E1	2.68094E1	2.15894E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.1575E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.1706E-1	-7.98798E-1	-9.13143E0	-9.14197E0	5.24521E-3	9.33409E-2	2.73033E1	-3.26691E1	-3.25328E1	2.67943E1	2.15238E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.16878E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16894E-1	-7.98702E-1	-9.13165E0	-9.14173E0	5.22137E-3	9.35316E-2	2.72806E1	-3.26762E1	-3.25158E1	2.68088E1	2.15566E-9	2.51607E-3	2.51607E-3	6.32386E-3	2.17727E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.17037E-1	-7.98416E-1	-9.1315E0	-9.14185E0	5.26905E-3	9.32455E-2	2.73122E1	-3.26909E1	-3.25706E1	2.68036E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.1687E-1	-7.98798E-1	-9.13167E0	-9.14183E0	4.86374E-3	9.34601E-2	2.7324E1	-3.26891E1	-3.26225E1	2.67974E1	2.158E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.16689E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09348E0	-8.16846E-1	-7.98678E-1	-9.13186E0	-9.14197E0	5.126E-3	9.28879E-2	2.73135E1	-3.26813E1	-3.26783E1	2.6801E1	2.15533E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.17176E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.16989E-1	-7.98559E-1	-9.13169E0	-9.14183E0	5.17368E-3	9.3174E-2	2.73112E1	-3.26744E1	-3.28078E1	2.68004E1	2.15706E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.17822E-2
