[Scan]
initial_time=2016-01-28T16:36:19
final_time=2016-01-28T16:36:38
ip_count=19
run=1026
dataset=2
scan=122
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08836E-4
ql1_vset=
ql1_vmon=-8.16774E-1
ql1_imon=1.38268E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=1.98264E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=4.37558E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-9.9194E-11
mult1=-9.5357E-9
mult2=-2.79446E-9
rf_tmon=-4.03777E-3
rf_agc=3.40846E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.71946E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66267E0
bslens_imon=2.57511E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=1.97377E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.0487E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.11244E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02093E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04787E1
cs_ea1_imon=1.26412E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40029E0
lens1_imon=2.72731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.96684E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.40676E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=3.00865E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.27454E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.39956E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.09587E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23735E0
cs_ionrep_imon=9.66809E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=2.05252E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.2438E-8
tplens_vset=1.4E-1
tplens_vmon=1.61666E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26452E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.57205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98434E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.05065E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27569E0
ionrepsh_imon=9.39555E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.18507E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43084E0
os_ea2_imon=-7.83786E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.17407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=3.40869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.30211E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.09793E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72811E1
iondef1_imon=1.09246E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.40658E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.85626E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10431E0
cs_ionaccel_imon=-1.05538E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=1.68088E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=6.98876E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.57818E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.22944E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23134E0
defgridb_imon=6.27379E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.40354E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06969E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62587E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30707E1
cs_fil1_imon=9.2267E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.37671E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65425E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36988E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.9025E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.47376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22198E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.17547E-2
chamber_ion_pmon=2.15624E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18157E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16822E-1	-7.98965E-1	-9.13098E0	-9.14221E0	5.14984E-3	9.31978E-2	2.72751E1	-3.2641E1	-3.27161E1	2.67968E1	2.15808E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.17176E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16679E-1	-7.98798E-1	-9.13119E0	-9.14202E0	5.31673E-3	9.32217E-2	2.73345E1	-3.26309E1	-3.26854E1	2.68028E1	2.15425E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17066E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16941E-1	-7.98631E-1	-9.13129E0	-9.14192E0	5.36442E-3	9.34601E-2	2.73144E1	-3.26706E1	-3.27164E1	2.67976E1	2.15982E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.17722E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.1687E-1	-7.98583E-1	-9.13148E0	-9.14207E0	5.31673E-3	9.3317E-2	2.72979E1	-3.26506E1	-3.26561E1	2.67994E1	2.15636E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.17646E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16822E-1	-7.98345E-1	-9.13143E0	-9.14183E0	5.03063E-3	9.30309E-2	2.72642E1	-3.26825E1	-3.27414E1	2.68016E1	2.15894E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17822E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.1706E-1	-7.98655E-1	-9.1316E0	-9.1419E0	4.79221E-3	9.32455E-2	2.73123E1	-3.26789E1	-3.26254E1	2.68088E1	2.158E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.17066E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16822E-1	-7.98607E-1	-9.13131E0	-9.14178E0	5.05447E-3	9.31501E-2	2.73003E1	-3.26554E1	-3.26086E1	2.68028E1	2.15519E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.17633E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16894E-1	-7.98774E-1	-9.13153E0	-9.1419E0	4.81606E-3	9.34362E-2	2.73178E1	-3.2644E1	-3.25032E1	2.68233E1	2.158E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.17255E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.17037E-1	-7.9844E-1	-9.13143E0	-9.14149E0	5.126E-3	9.33886E-2	2.73095E1	-3.26535E1	-3.26915E1	2.68207E1	2.15546E-9	2.52131E-3	2.52131E-3	6.3074E-3	2.16374E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16917E-1	-7.9875E-1	-9.13136E0	-9.14218E0	5.22137E-3	9.35316E-2	2.7329E1	-3.26689E1	-3.27087E1	2.67826E1	2.15199E-9	2.52066E-3	2.52066E-3	6.31879E-3	2.17422E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16679E-1	-7.9875E-1	-9.13165E0	-9.14185E0	5.14984E-3	9.3317E-2	2.72966E1	-3.26368E1	-3.26306E1	2.68065E1	2.15791E-9	2.52697E-3	2.52697E-3	6.3074E-3	2.18688E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.17084E-1	-7.98464E-1	-9.13138E0	-9.14218E0	4.93526E-3	9.34124E-2	2.72745E1	-3.26878E1	-3.25819E1	2.67895E1	2.15736E-9	2.51886E-3	2.51886E-3	6.3126E-3	2.17563E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.1687E-1	-7.98321E-1	-9.13134E0	-9.14204E0	5.07832E-3	9.35316E-2	2.72997E1	-3.26428E1	-3.25533E1	2.68088E1	2.16078E-9	2.51804E-3	2.51804E-3	6.31858E-3	2.17722E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16774E-1	-7.98607E-1	-9.13129E0	-9.14233E0	5.126E-3	9.31978E-2	2.73141E1	-3.26645E1	-3.25377E1	2.67902E1	2.15332E-9	2.52209E-3	2.52209E-3	6.34588E-3	2.17444E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16703E-1	-7.98678E-1	-9.13129E0	-9.14214E0	5.126E-3	9.32455E-2	2.72889E1	-3.26807E1	-3.25064E1	2.68286E1	2.16081E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.1858E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.16703E-1	-7.98464E-1	-9.13141E0	-9.1424E0	4.98295E-3	9.34601E-2	2.72793E1	-3.26639E1	-3.2623E1	2.68136E1	2.15425E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.1858E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.16751E-1	-7.98249E-1	-9.13146E0	-9.14223E0	5.05447E-3	9.32932E-2	2.73357E1	-3.26729E1	-3.27756E1	2.67559E1	2.15613E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.18201E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16917E-1	-7.98345E-1	-9.1315E0	-9.14192E0	4.74453E-3	9.32217E-2	2.72733E1	-3.26458E1	-3.27041E1	2.67866E1	2.15894E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.17633E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.16894E-1	-7.98583E-1	-9.13172E0	-9.14173E0	4.88758E-3	9.30786E-2	2.73193E1	-3.26567E1	-3.25505E1	2.68053E1	2.15519E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.17633E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16774E-1	-7.98512E-1	-9.13143E0	-9.14202E0	4.86374E-3	9.31501E-2	2.72811E1	-3.26591E1	-3.26452E1	2.68118E1	2.15624E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.17547E-2
