[Scan]
initial_time=2016-01-28T16:39:25
final_time=2016-01-28T16:39:45
ip_count=19
run=1026
dataset=2
scan=129
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.38401E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=2.02452E-9
ql3_vset=
ql3_vmon=-9.13196E0
ql3_imon=4.4564E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=-6.95586E-11
mult1=-8.99387E-9
mult2=-2.75853E-9
rf_tmon=-5.37161E-3
rf_agc=3.16993E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.65977E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.50079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2022E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12442E2
lens4a_imon=2.05005E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53557E1
cs_ef1b_imon=3.0833E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05071E1
cs_ea1_imon=1.24642E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42683E0
lens1_imon=2.63528E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=2.97939E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04074E1
cs_ea2_imon=1.39932E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83983E1
cs_ef1a_imon=2.99955E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.27862E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10822E1
os_restr1_imon=4.30937E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15807E1
os_ea1_imon=2.39461E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63809E1
os_ef1bup_imon=3.06593E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19842E0
cs_ionrep_imon=9.83444E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.933E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=2.07166E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.24862E-8
tplens_vset=1.4E-1
tplens_vmon=1.6143E0
tplens_imon=-7.2365E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26428E1
iondef3_imon=1.47932E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.5678E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98388E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.07026E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=9.41325E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33882E1
lens5b_imon=2.16844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74907E1
cs_ef2b_imon=3.1264E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42317E0
os_ea2_imon=-5.04173E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.19208E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09684E0
os_ef2alow_imon=-2.59891E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08815E-1
os_ef2bup_imon=-5.50075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10764E1
os_restr2_imon=3.39712E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.28831E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01937E1
cs_anode2_imon=2.10224E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.08503E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.08364E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.47287E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.87391E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10118E0
cs_ionaccel_imon=-1.09065E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47257E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56168E1
einzel_imon=7.53145E-6
window_vset=0.0E0
window_vmon=1.55131E-1
window_imon=-8.61283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.38976E-4
mask2_vset=0.0E0
mask2_vmon=-1.86541E1
mask2_imon=-5.90213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.60815E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.52509E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.3073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50891E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.44164E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06843E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62452E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30664E1
cs_fil1_imon=9.21748E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33201E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65335E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.69235E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97028E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.84048E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31649E-1
cs_fil2_imon=-2.33904E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.61117E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2192E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.1877E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.02068E-1
res40_imon=-2.4182E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16607E-1	-7.98607E-1	-9.13138E0	-9.14223E0	4.98295E-3	9.39369E-2	2.72933E1	-3.26189E1	-3.25977E1	2.67956E1	2.15726E-9	2.51919E-3	2.51919E-3	6.31269E-3	2.16192E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16417E-1	-7.98607E-1	-9.13146E0	-9.14221E0	5.10216E-3	9.34839E-2	2.7291E1	-3.26897E1	-3.26731E1	2.68256E1	2.15706E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.16689E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16584E-1	-7.98464E-1	-9.13146E0	-9.14202E0	5.19753E-3	9.31025E-2	2.73293E1	-3.26496E1	-3.25853E1	2.67699E1	2.15613E-9	2.53087E-3	2.53087E-3	6.31288E-3	2.17066E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16584E-1	-7.98726E-1	-9.13167E0	-9.14185E0	4.88758E-3	9.32932E-2	2.72901E1	-3.26506E1	-3.26621E1	2.684E1	2.15992E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.17547E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.17227E-1	-7.98583E-1	-9.13181E0	-9.14202E0	4.74453E-3	9.3317E-2	2.72827E1	-3.26502E1	-3.25989E1	2.67769E1	2.15425E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.17444E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16536E-1	-7.98512E-1	-9.13169E0	-9.1418E0	5.00679E-3	9.35793E-2	2.73069E1	-3.26693E1	-3.26512E1	2.67818E1	2.15808E-9	2.51525E-3	2.51525E-3	6.35059E-3	2.19036E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.16655E-1	-7.98345E-1	-9.13153E0	-9.14185E0	5.19753E-3	9.33886E-2	2.73363E1	-3.26621E1	-3.2614E1	2.68166E1	2.158E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.18011E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16965E-1	-7.98869E-1	-9.13153E0	-9.14211E0	4.86374E-3	9.3317E-2	2.72739E1	-3.26652E1	-3.27374E1	2.68148E1	2.15696E-9	2.52473E-3	2.52473E-3	6.31299E-3	2.17722E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.17013E-1	-7.98512E-1	-9.13167E0	-9.14183E0	4.95911E-3	9.37939E-2	2.72997E1	-3.26753E1	-3.25509E1	2.68238E1	2.15894E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.17066E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.16941E-1	-7.98583E-1	-9.13167E0	-9.14207E0	4.79221E-3	9.34601E-2	2.73104E1	-3.26543E1	-3.26809E1	2.67848E1	2.15613E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.1858E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16798E-1	-7.98869E-1	-9.13131E0	-9.14195E0	4.88758E-3	9.33647E-2	2.72871E1	-3.26627E1	-3.25479E1	2.68004E1	2.15716E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.16252E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16679E-1	-7.98869E-1	-9.13155E0	-9.14195E0	4.86374E-3	9.34839E-2	2.72555E1	-3.2672E1	-3.2616E1	2.67932E1	2.15894E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.15563E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.16655E-1	-7.98774E-1	-9.13126E0	-9.14185E0	5.38826E-3	9.34124E-2	2.73063E1	-3.26811E1	-3.26884E1	2.68208E1	2.158E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.16501E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.16441E-1	-7.9875E-1	-9.1315E0	-9.14171E0	5.29289E-3	9.33886E-2	2.73252E1	-3.27239E1	-3.26248E1	2.68172E1	2.15145E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.17633E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09371E0	-8.16584E-1	-7.98607E-1	-9.1315E0	-9.14209E0	5.22137E-3	9.30309E-2	2.73269E1	-3.26508E1	-3.26231E1	2.68458E1	2.15533E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.17732E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16441E-1	-7.98774E-1	-9.13134E0	-9.14197E0	5.45979E-3	9.31978E-2	2.73508E1	-3.26675E1	-3.25912E1	2.68082E1	2.158E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.17255E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16703E-1	-7.9875E-1	-9.1316E0	-9.14185E0	5.17368E-3	9.36031E-2	2.73122E1	-3.26891E1	-3.26614E1	2.681E1	2.15349E-9	2.52707E-3	2.52707E-3	6.32356E-3	2.16991E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16917E-1	-7.98726E-1	-9.13157E0	-9.1419E0	4.98295E-3	9.35316E-2	2.73312E1	-3.26567E1	-3.26503E1	2.6807E1	2.158E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.18201E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.16727E-1	-7.98512E-1	-9.13184E0	-9.14195E0	5.03063E-3	9.32932E-2	2.73418E1	-3.2675E1	-3.25507E1	2.6813E1	2.15726E-9	2.51603E-3	2.51603E-3	6.31798E-3	2.17829E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16655E-1	-7.98082E-1	-9.13196E0	-9.14218E0	4.57764E-3	9.3174E-2	2.73033E1	-3.26717E1	-3.26428E1	2.67926E1	2.15894E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.1877E-2
