[Scan]
initial_time=2016-01-28T16:39:52
final_time=2016-01-28T16:40:11
ip_count=19
run=1026
dataset=2
scan=130
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08753E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.37189E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=1.97721E-9
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=4.25959E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-6.94752E-11
mult1=-9.94508E-9
mult2=-2.84636E-9
rf_tmon=-4.03777E-3
rf_agc=3.40426E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.67813E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65773E0
bslens_imon=2.4981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19821E1
lens5a_imon=1.98632E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05154E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=3.12001E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04495E1
cs_ea1_imon=1.23E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4002E0
lens1_imon=2.61346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03919E1
cs_ea2_imon=1.40484E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=3.01153E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.27493E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11027E1
os_restr1_imon=4.28734E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15065E1
os_ea1_imon=2.40701E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=9.7044E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93636E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=2.04999E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.23372E-8
tplens_vset=1.4E-1
tplens_vmon=1.60839E0
tplens_imon=-3.85865E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25791E1
iondef3_imon=1.49063E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.56994E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.9844E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.02061E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2527E0
ionrepsh_imon=9.14203E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.19793E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41072E0
os_ea2_imon=-5.55298E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00698E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05636E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93219E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10733E1
os_restr2_imon=3.41337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.28486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.10117E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73261E1
iondef1_imon=1.12005E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67758E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.45829E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.87209E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-1.05538E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.83105E-1
window_imon=-9.14827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.26385E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93747E3
defgrida_imon=6.70147E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.40804E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32036E0
defgridb_imon=6.22562E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3327E1
os_fil1_imon=9.39489E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07131E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6254E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30699E1
cs_fil1_imon=9.22947E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33467E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65459E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47353E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.01007E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.69483E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21991E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.18011E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95332E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.16917E-1	-7.98631E-1	-9.13196E0	-9.14202E0	5.05447E-3	9.35793E-2	2.73623E1	-3.26673E1	-3.25747E1	2.68076E1	2.15425E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.18011E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16703E-1	-7.98416E-1	-9.13191E0	-9.14216E0	4.98295E-3	9.33647E-2	2.72971E1	-3.26621E1	-3.26352E1	2.68232E1	2.15992E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.17361E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16727E-1	-7.98512E-1	-9.13165E0	-9.14187E0	4.98295E-3	9.33886E-2	2.73034E1	-3.26845E1	-3.25698E1	2.68111E1	2.15505E-9	2.51581E-3	2.51581E-3	6.29624E-3	2.17915E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.16727E-1	-7.98702E-1	-9.13174E0	-9.14195E0	5.00679E-3	9.36031E-2	2.72763E1	-3.26639E1	-3.2644E1	2.67914E1	2.15546E-9	2.51393E-3	2.51393E-3	6.31269E-3	2.171E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16917E-1	-7.9844E-1	-9.13167E0	-9.14209E0	5.126E-3	9.35078E-2	2.73234E1	-3.26396E1	-3.26467E1	2.68196E1	2.15791E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.17337E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16655E-1	-7.9844E-1	-9.13162E0	-9.14178E0	4.79221E-3	9.33647E-2	2.72831E1	-3.26695E1	-3.25911E1	2.68346E1	2.15716E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.18104E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16798E-1	-7.98559E-1	-9.13143E0	-9.1419E0	4.95911E-3	9.32932E-2	2.73045E1	-3.26779E1	-3.2626E1	2.67848E1	2.15894E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.1839E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16727E-1	-7.9844E-1	-9.13143E0	-9.1419E0	5.126E-3	9.35316E-2	2.73003E1	-3.26657E1	-3.2736E1	2.67938E1	2.15519E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.16878E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-8.16631E-1	-7.98488E-1	-9.13148E0	-9.14197E0	5.36442E-3	9.36508E-2	2.73003E1	-3.26398E1	-3.25419E1	2.67914E1	2.15716E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.1829E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-8.16417E-1	-7.98202E-1	-9.13153E0	-9.14168E0	5.24521E-3	9.3627E-2	2.72756E1	-3.27051E1	-3.25877E1	2.68117E1	2.15706E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.17633E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09333E0	-8.16631E-1	-7.98512E-1	-9.13138E0	-9.1419E0	4.62532E-3	9.31978E-2	2.73003E1	-3.26777E1	-3.26404E1	2.68142E1	2.15992E-9	2.52707E-3	2.52707E-3	6.29665E-3	2.17176E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16512E-1	-7.98512E-1	-9.13131E0	-9.14197E0	4.79221E-3	9.34124E-2	2.7334E1	-3.26956E1	-3.26148E1	2.68184E1	2.15425E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.17444E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16536E-1	-7.9844E-1	-9.1316E0	-9.14171E0	4.93526E-3	9.33409E-2	2.72476E1	-3.26866E1	-3.25666E1	2.68136E1	2.15987E-9	2.52867E-3	2.52867E-3	6.31288E-3	2.17444E-2
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16298E-1	-7.98368E-1	-9.13141E0	-9.1419E0	5.34058E-3	9.35555E-2	2.73086E1	-3.26732E1	-3.26703E1	2.6816E1	2.15706E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.17066E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16536E-1	-7.98225E-1	-9.1316E0	-9.14185E0	5.4121E-3	9.35316E-2	2.72937E1	-3.26981E1	-3.2632E1	2.6816E1	2.16081E-9	2.51552E-3	2.51552E-3	6.29098E-3	2.17822E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16631E-1	-7.98368E-1	-9.13177E0	-9.14185E0	5.24521E-3	9.35316E-2	2.73069E1	-3.26777E1	-3.26068E1	2.68286E1	2.15624E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.17547E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16464E-1	-7.98297E-1	-9.13169E0	-9.14195E0	5.10216E-3	9.33409E-2	2.73111E1	-3.26164E1	-3.25617E1	2.67866E1	2.15409E-9	2.51581E-3	2.51581E-3	6.29067E-3	2.18494E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16202E-1	-7.98273E-1	-9.13162E0	-9.14187E0	4.86374E-3	9.35555E-2	2.73225E1	-3.26446E1	-3.26398E1	2.6801E1	2.15613E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.17255E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16512E-1	-7.98178E-1	-9.13172E0	-9.14195E0	4.88758E-3	9.35555E-2	2.73033E1	-3.26753E1	-3.27203E1	2.68334E1	2.15624E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.18104E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.1656E-1	-7.98512E-1	-9.13179E0	-9.14168E0	4.98295E-3	9.33647E-2	2.73261E1	-3.26639E1	-3.25791E1	2.67758E1	2.15706E-9	2.51334E-3	2.51334E-3	6.34037E-3	2.18011E-2
