[Scan]
initial_time=2016-01-28T16:40:45
final_time=2016-01-28T16:41:05
ip_count=19
run=1026
dataset=2
scan=132
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.37866E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=1.99844E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=4.27794E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-7.65562E-11
mult1=-9.67509E-9
mult2=-2.6922E-9
rf_tmon=-5.20499E-3
rf_agc=3.25555E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.6802E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67093E0
bslens_imon=2.44769E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19571E1
lens5a_imon=1.99395E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05206E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=3.10554E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04565E2
lens23_imon=1.02195E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05401E1
cs_ea1_imon=1.25067E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41326E0
lens1_imon=2.70961E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64869E1
os_ef1alow_imon=2.97279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03749E1
cs_ea2_imon=1.4057E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.00789E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.2708E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11622E1
os_restr1_imon=4.28713E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15317E1
os_ea1_imon=2.42469E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63711E1
os_ef1bup_imon=3.08365E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26331E0
cs_ionrep_imon=9.46988E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93509E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01792E1
cs_anode1_imon=2.06088E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=3.25188E-8
tplens_vset=1.4E-1
tplens_vmon=1.6143E0
tplens_imon=-1.92705E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.4963E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26454E1
iondef2_imon=1.56285E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98204E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=4.01276E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27569E0
ionrepsh_imon=9.33538E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33286E1
lens5b_imon=2.16738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74692E1
cs_ef2b_imon=3.12396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44677E0
os_ea2_imon=-5.785E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71194E1
cs_ef2a_imon=3.18513E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04355E0
os_ef2alow_imon=-2.62324E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92597E-1
os_ef2bup_imon=-5.36869E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10892E1
os_restr2_imon=3.40685E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23096E2
cs_ionfoca_imon=6.30105E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02058E1
cs_anode2_imon=2.10363E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72689E1
iondef1_imon=1.09706E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67951E1
iondef4_imon=1.0687E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.44672E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.86455E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11277E0
cs_ionaccel_imon=-1.00029E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.4724E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.66699E-6
window_vset=0.0E0
window_vmon=1.76562E-1
window_imon=-1.00724E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39237E-4
mask2_vset=0.0E0
mask2_vmon=-1.86448E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.66124E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.56403E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.17988E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22248E0
defgridb_imon=6.03665E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.41934E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07121E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62638E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30661E1
cs_fil1_imon=9.23891E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34012E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.652E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23059E-2
os_fil2_imon=-2.66919E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86023E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.84302E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34146E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.92948E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22046E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3023E-3
inlet_lpb_pmon=2.17835E-2
chamber_ion_pmon=2.15658E-9
chamber_cvt_pmon=2.51854E-3
foreline_cvt_pmon=2.51854E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.4435E-1
res40_imon=-2.5155E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16846E-1	-7.98297E-1	-9.1316E0	-9.14166E0	4.673E-3	9.35793E-2	2.72909E1	-3.26738E1	-3.26048E1	2.67962E1	2.15894E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.18201E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16894E-1	-7.98535E-1	-9.13174E0	-9.14149E0	4.74453E-3	9.32693E-2	2.73167E1	-3.26554E1	-3.25819E1	2.68196E1	2.15997E-9	2.51709E-3	2.51709E-3	6.32328E-3	2.17829E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09309E0	-8.16822E-1	-7.98368E-1	-9.13148E0	-9.14168E0	4.43459E-3	9.3317E-2	2.72839E1	-3.26815E1	-3.26508E1	2.6822E1	2.15753E-9	2.52209E-3	2.52209E-3	6.31014E-3	2.17255E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.16751E-1	-7.98273E-1	-9.13136E0	-9.14164E0	4.76837E-3	9.33886E-2	2.73092E1	-3.26366E1	-3.2649E1	2.68146E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16846E-1	-7.98225E-1	-9.13143E0	-9.14202E0	4.8399E-3	9.32455E-2	2.72871E1	-3.2626E1	-3.26224E1	2.68154E1	2.16177E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.18104E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-8.16631E-1	-7.98631E-1	-9.13157E0	-9.14183E0	4.76837E-3	9.29356E-2	2.72945E1	-3.26738E1	-3.26378E1	2.6795E1	2.158E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.18011E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16607E-1	-7.98607E-1	-9.1316E0	-9.14183E0	4.673E-3	9.32693E-2	2.72898E1	-3.26658E1	-3.26346E1	2.67962E1	2.16081E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.17822E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09348E0	-8.16822E-1	-7.98559E-1	-9.1316E0	-9.14168E0	4.76837E-3	9.33886E-2	2.7301E1	-3.2639E1	-3.26207E1	2.67776E1	2.158E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.16689E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16607E-1	-7.98655E-1	-9.13148E0	-9.14145E0	4.74453E-3	9.33409E-2	2.7301E1	-3.2652E1	-3.25824E1	2.67879E1	2.15808E-9	2.52815E-3	2.52815E-3	6.31278E-3	2.16991E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16584E-1	-7.98297E-1	-9.13174E0	-9.14142E0	4.95911E-3	9.35793E-2	2.73014E1	-3.2648E1	-3.27289E1	2.68188E1	2.16081E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.17444E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.16774E-1	-7.98321E-1	-9.13169E0	-9.14156E0	4.91142E-3	9.32693E-2	2.73129E1	-3.2653E1	-3.25894E1	2.68034E1	2.15519E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.17822E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16536E-1	-7.98631E-1	-9.13148E0	-9.14135E0	4.91142E-3	9.31978E-2	2.73033E1	-3.26773E1	-3.26107E1	2.67984E1	2.16081E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.16878E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.1625E-1	-7.98774E-1	-9.13179E0	-9.14187E0	5.05447E-3	9.3317E-2	2.73009E1	-3.26573E1	-3.26561E1	2.6819E1	2.159E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.17918E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16369E-1	-7.98726E-1	-9.13174E0	-9.14176E0	4.98295E-3	9.35793E-2	2.72582E1	-3.26494E1	-3.2644E1	2.68136E1	2.158E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.18201E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09634E0	-8.16631E-1	-7.98583E-1	-9.13146E0	-9.14145E0	4.74453E-3	9.34839E-2	2.73311E1	-3.26703E1	-3.26408E1	2.67938E1	2.158E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.1839E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16488E-1	-7.98702E-1	-9.13143E0	-9.1414E0	4.93526E-3	9.3317E-2	2.72865E1	-3.26651E1	-3.25641E1	2.68226E1	2.15808E-9	2.53354E-3	2.53354E-3	6.30202E-3	2.17176E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.16822E-1	-7.98178E-1	-9.13148E0	-9.14149E0	5.29289E-3	9.32693E-2	2.73208E1	-3.2652E1	-3.26412E1	2.68039E1	2.15613E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.18201E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16679E-1	-7.98202E-1	-9.13141E0	-9.14166E0	5.03063E-3	9.36747E-2	2.72634E1	-3.26777E1	-3.26651E1	2.68063E1	2.15754E-9	2.52123E-3	2.52123E-3	6.31242E-3	2.18271E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16584E-1	-7.98512E-1	-9.13157E0	-9.1419E0	4.91142E-3	9.34839E-2	2.73107E1	-3.26579E1	-3.25846E1	2.68132E1	2.15762E-9	2.51911E-3	2.51911E-3	6.31332E-3	2.17807E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16655E-1	-7.98416E-1	-9.13146E0	-9.1418E0	5.05447E-3	9.34839E-2	2.72689E1	-3.26454E1	-3.26248E1	2.67951E1	2.15658E-9	2.51854E-3	2.51854E-3	6.3023E-3	2.17835E-2
