[Scan]
initial_time=2016-01-28T16:41:39
final_time=2016-01-28T16:41:58
ip_count=19
run=1026
dataset=2
scan=134
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.1706E-1
ql1_imon=1.3803E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.98805E-9
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=4.27997E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-6.54221E-11
mult1=-9.66486E-9
mult2=-2.73698E-9
rf_tmon=-4.17323E-3
rf_agc=3.3663E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.67997E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65347E0
bslens_imon=2.72377E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19876E1
lens5a_imon=1.98506E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.05248E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53645E1
cs_ef1b_imon=3.11077E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04576E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04962E1
cs_ea1_imon=1.26168E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43745E0
lens1_imon=2.59918E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64537E1
os_ef1alow_imon=2.96909E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03755E1
cs_ea2_imon=1.42598E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84543E1
cs_ef1a_imon=3.01191E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.27857E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.115E1
os_restr1_imon=4.29675E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15429E1
os_ea1_imon=2.40048E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63817E1
os_ef1bup_imon=3.08002E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24626E0
cs_ionrep_imon=9.66561E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93545E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01724E1
cs_anode1_imon=2.05518E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.2534E-8
tplens_vset=1.4E-1
tplens_vmon=1.62067E0
tplens_imon=-2.54645E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26927E1
iondef3_imon=1.49917E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26838E1
iondef2_imon=1.56964E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02887E2
lens6_imon=2.984E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.95823E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25924E0
ionrepsh_imon=9.58774E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33788E1
lens5b_imon=2.17778E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.11972E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3994E0
os_ea2_imon=-5.54432E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00451E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70875E1
cs_ef2a_imon=3.18317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05586E0
os_ef2alow_imon=-2.66174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90721E-1
os_ef2bup_imon=-5.37466E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1087E1
os_restr2_imon=3.39646E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.30434E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01796E1
cs_anode2_imon=2.0836E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72927E1
iondef1_imon=1.08531E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67872E1
iondef4_imon=1.07627E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.41787E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.89292E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12106E0
cs_ionaccel_imon=-1.13986E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47339E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56295E1
einzel_imon=7.66449E-6
window_vset=0.0E0
window_vmon=1.90625E-1
window_imon=-1.06591E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86363E1
mask2_imon=-7.54523E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.61771E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.90133E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.59824E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39699E0
defgridb_imon=6.20832E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.43471E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07323E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62605E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3067E1
cs_fil1_imon=9.23186E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32635E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65351E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28884E-2
os_fil2_imon=-2.5874E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86926E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.87921E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33987E-1
cs_fil2_imon=-2.67822E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38273E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22039E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.17633E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40059E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95163E-1
res40_imon=-2.32701E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16512E-1	-7.98464E-1	-9.13196E0	-9.14166E0	4.69685E-3	9.34124E-2	2.73021E1	-3.2659E1	-3.26915E1	2.67962E1	2.15661E-9	2.52029E-3	2.52029E-3	6.31332E-3	2.17807E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.1656E-1	-7.98678E-1	-9.13188E0	-9.1419E0	5.19753E-3	9.30786E-2	2.73137E1	-3.26542E1	-3.25409E1	2.67914E1	2.16085E-9	2.52169E-3	2.52169E-3	6.29128E-3	2.16806E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16488E-1	-7.98583E-1	-9.13177E0	-9.14192E0	5.22137E-3	9.32932E-2	2.73051E1	-3.26718E1	-3.28253E1	2.68163E1	2.156E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.18108E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16298E-1	-7.98655E-1	-9.13172E0	-9.1418E0	5.00679E-3	9.30548E-2	2.73153E1	-3.26567E1	-3.26585E1	2.6813E1	2.15546E-9	2.52025E-3	2.52025E-3	6.30212E-3	2.17464E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.1656E-1	-7.98607E-1	-9.13179E0	-9.14142E0	4.79221E-3	9.37223E-2	2.73315E1	-3.2635E1	-3.25906E1	2.67944E1	2.15894E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.18011E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.1656E-1	-7.98869E-1	-9.13198E0	-9.14147E0	4.60148E-3	9.34839E-2	2.72945E1	-3.2688E1	-3.27086E1	2.68028E1	2.15665E-9	2.52243E-3	2.52243E-3	6.31012E-3	2.17777E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.16393E-1	-7.98917E-1	-9.13177E0	-9.14183E0	5.14984E-3	9.34601E-2	2.73099E1	-3.26933E1	-3.26212E1	2.67966E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16607E-1	-7.98726E-1	-9.13172E0	-9.1418E0	5.07832E-3	9.31978E-2	2.72797E1	-3.26354E1	-3.2613E1	2.67998E1	2.16081E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.18011E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16298E-1	-7.98821E-1	-9.1316E0	-9.14152E0	4.673E-3	9.3317E-2	2.73159E1	-3.26494E1	-3.26494E1	2.67854E1	2.15441E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.16991E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16464E-1	-7.98488E-1	-9.13174E0	-9.14164E0	4.72069E-3	9.3317E-2	2.73231E1	-3.26675E1	-3.25858E1	2.67926E1	2.15894E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.17822E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16417E-1	-7.98297E-1	-9.13138E0	-9.14149E0	5.00679E-3	9.35316E-2	2.72967E1	-3.26675E1	-3.25491E1	2.6795E1	2.15987E-9	2.52264E-3	2.52264E-3	6.32386E-3	2.17917E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.16369E-1	-7.98368E-1	-9.13143E0	-9.14185E0	4.88758E-3	9.34362E-2	2.73363E1	-3.26807E1	-3.27294E1	2.67938E1	2.15987E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.1839E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09657E0	-8.16274E-1	-7.9844E-1	-9.13126E0	-9.1418E0	4.98295E-3	9.33886E-2	2.72738E1	-3.26719E1	-3.27703E1	2.68026E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09734E0	-8.1625E-1	-7.98154E-1	-9.13167E0	-9.14183E0	4.81606E-3	9.3317E-2	2.72994E1	-3.26476E1	-3.28143E1	2.67855E1	2.15919E-9	2.52772E-3	2.52772E-3	6.31761E-3	2.17307E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16703E-1	-7.9844E-1	-9.13143E0	-9.14195E0	4.98295E-3	9.34601E-2	2.72943E1	-3.26536E1	-3.27564E1	2.68082E1	2.1607E-9	2.52222E-3	2.52222E-3	6.29581E-3	2.1751E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16846E-1	-7.98345E-1	-9.13165E0	-9.14209E0	4.93526E-3	9.35316E-2	2.72859E1	-3.26621E1	-3.27408E1	2.68202E1	2.15613E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.17066E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16751E-1	-7.98345E-1	-9.13177E0	-9.14209E0	4.48227E-3	9.31501E-2	2.73399E1	-3.27027E1	-3.26885E1	2.68082E1	2.16081E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.1858E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16512E-1	-7.98368E-1	-9.1315E0	-9.14183E0	4.60148E-3	9.35793E-2	2.73039E1	-3.26603E1	-3.25761E1	2.68208E1	2.15716E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.16991E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16393E-1	-7.98464E-1	-9.13146E0	-9.14223E0	4.93526E-3	9.3317E-2	2.73327E1	-3.26561E1	-3.25623E1	2.68064E1	2.15706E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.17633E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.1706E-1	-7.98321E-1	-9.13119E0	-9.14197E0	4.69685E-3	9.32217E-2	2.72927E1	-3.26838E1	-3.26927E1	2.67872E1	2.15706E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.17633E-2
