[Scan]
initial_time=2016-01-28T16:42:32
final_time=2016-01-28T16:42:51
ip_count=19
run=1026
dataset=2
scan=136
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08731E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=1.37774E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=1.98954E-9
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=4.34828E-10
ql4_vset=
ql4_vmon=-9.14156E0
ql4_imon=-6.38366E-11
mult1=-9.57029E-9
mult2=-2.72522E-9
rf_tmon=-4.01986E-3
rf_agc=3.34743E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=1.68554E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66515E0
bslens_imon=2.66926E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19967E1
lens5a_imon=1.98584E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05135E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53655E1
cs_ef1b_imon=3.11348E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02078E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05695E1
cs_ea1_imon=1.25545E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38164E0
lens1_imon=2.52131E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.97847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04106E1
cs_ea2_imon=1.41118E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84239E1
cs_ef1a_imon=3.01374E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.27513E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11103E1
os_restr1_imon=4.28887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15494E1
os_ea1_imon=2.40983E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63764E1
os_ef1bup_imon=3.08429E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25664E0
cs_ionrep_imon=9.85639E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93319E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01687E1
cs_anode1_imon=2.05445E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.25238E-8
tplens_vset=1.4E-1
tplens_vmon=1.61223E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27009E1
iondef3_imon=1.4797E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26354E1
iondef2_imon=1.56146E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98404E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.98115E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2826E0
ionrepsh_imon=9.2607E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33749E1
lens5b_imon=2.19764E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74859E1
cs_ef2b_imon=3.13497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43898E0
os_ea2_imon=-7.8414E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00728E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.18443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08024E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87288E-1
os_ef2bup_imon=-5.31482E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10671E1
os_restr2_imon=3.38553E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29967E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01964E1
cs_anode2_imon=2.10189E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73134E1
iondef1_imon=1.10672E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68007E1
iondef4_imon=1.09152E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.40144E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.8912E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13622E0
cs_ionaccel_imon=-1.18738E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56277E1
einzel_imon=7.68379E-6
window_vset=0.0E0
window_vmon=1.73569E-1
window_imon=-1.03331E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39177E-4
mask2_vset=0.0E0
mask2_vmon=-1.86641E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.55541E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.43024E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.04149E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49119E0
defgridb_imon=6.02533E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33276E1
os_fil1_imon=9.44035E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07491E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62696E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30737E1
cs_fil1_imon=9.23371E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31019E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65585E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40027E-2
os_fil2_imon=-2.62092E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85926E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.55485E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.63443E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3457E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22139E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.17732E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.00147E-1
res40_imon=-2.42399E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16417E-1	-7.98917E-1	-9.132E0	-9.1424E0	4.62532E-3	9.32932E-2	2.73508E1	-3.2653E1	-3.24416E1	2.6796E1	2.15442E-9	2.51347E-3	2.51347E-3	6.32555E-3	2.15624E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.16345E-1	-7.98512E-1	-9.13165E0	-9.14218E0	4.88758E-3	9.32455E-2	2.72813E1	-3.26666E1	-3.26823E1	2.68051E1	2.15519E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.17066E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16607E-1	-7.98631E-1	-9.13172E0	-9.14209E0	4.74453E-3	9.32932E-2	2.72957E1	-3.26585E1	-3.2554E1	2.68157E1	2.1532E-9	2.52699E-3	2.52699E-3	6.29816E-3	2.17532E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.17013E-1	-7.98678E-1	-9.13169E0	-9.14214E0	4.81606E-3	9.34601E-2	2.72889E1	-3.26669E1	-3.2471E1	2.6804E1	2.15257E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.15883E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.16655E-1	-7.98464E-1	-9.13169E0	-9.14183E0	4.91142E-3	9.31978E-2	2.73124E1	-3.26462E1	-3.26187E1	2.68063E1	2.15987E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.17822E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-8.16488E-1	-7.98512E-1	-9.13162E0	-9.14171E0	4.673E-3	9.31501E-2	2.73201E1	-3.26404E1	-3.2614E1	2.67839E1	2.156E-9	2.52585E-3	2.52585E-3	6.30182E-3	2.17722E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.1656E-1	-7.98416E-1	-9.13174E0	-9.14176E0	4.76837E-3	9.33886E-2	2.73297E1	-3.26615E1	-3.25653E1	2.6802E1	2.15894E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.16689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16464E-1	-7.98655E-1	-9.13157E0	-9.14156E0	4.60148E-3	9.33409E-2	2.72922E1	-3.26585E1	-3.28263E1	2.68233E1	2.158E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.17822E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16536E-1	-7.98798E-1	-9.13146E0	-9.14152E0	4.8399E-3	9.32932E-2	2.72847E1	-3.26756E1	-3.27233E1	2.68045E1	2.15658E-9	2.52058E-3	2.52058E-3	6.31761E-3	2.16605E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.16607E-1	-7.98607E-1	-9.13167E0	-9.14202E0	4.76837E-3	9.35078E-2	2.72919E1	-3.265E1	-3.25671E1	2.6804E1	2.15971E-9	2.52918E-3	2.52918E-3	6.31321E-3	2.18111E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16774E-1	-7.98345E-1	-9.13143E0	-9.14207E0	4.88758E-3	9.33409E-2	2.72974E1	-3.2698E1	-3.25841E1	2.6786E1	2.15987E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.16878E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.17132E-1	-7.98059E-1	-9.13112E0	-9.14192E0	4.79221E-3	9.34839E-2	2.73092E1	-3.26776E1	-3.26457E1	2.67972E1	2.159E-9	2.51847E-3	2.51847E-3	6.34518E-3	2.17547E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16727E-1	-7.98535E-1	-9.13143E0	-9.14197E0	5.10216E-3	9.31978E-2	2.73183E1	-3.26476E1	-3.25846E1	2.6795E1	2.15726E-9	2.52448E-3	2.52448E-3	6.31269E-3	2.17464E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16774E-1	-7.97868E-1	-9.13155E0	-9.14202E0	5.03063E-3	9.32932E-2	2.72919E1	-3.26903E1	-3.24331E1	2.68214E1	2.15706E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.17633E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16679E-1	-7.98082E-1	-9.13153E0	-9.14192E0	5.19753E-3	9.32932E-2	2.73556E1	-3.26735E1	-3.26422E1	2.681E1	2.15987E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.17633E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.16488E-1	-7.98154E-1	-9.13129E0	-9.14199E0	4.93526E-3	9.34601E-2	2.72642E1	-3.26567E1	-3.28147E1	2.68154E1	2.15894E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.17633E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16512E-1	-7.98154E-1	-9.13112E0	-9.14199E0	4.57764E-3	9.35793E-2	2.73141E1	-3.26687E1	-3.26284E1	2.68105E1	2.15894E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.1839E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.16822E-1	-7.98082E-1	-9.1316E0	-9.14178E0	4.91142E-3	9.34601E-2	2.72886E1	-3.2659E1	-3.24602E1	2.68076E1	2.158E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.17444E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.16727E-1	-7.98202E-1	-9.13155E0	-9.14197E0	5.26905E-3	9.33886E-2	2.7298E1	-3.26573E1	-3.26797E1	2.68304E1	2.15624E-9	2.52384E-3	2.52384E-3	6.29665E-3	2.17732E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16822E-1	-7.98488E-1	-9.13167E0	-9.14156E0	5.34058E-3	9.32932E-2	2.73134E1	-3.26354E1	-3.27009E1	2.68007E1	2.15716E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.17732E-2
