[Scan]
initial_time=2016-01-28T16:42:58
final_time=2016-01-28T16:43:18
ip_count=19
run=1026
dataset=2
scan=137
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08744E-4
ql1_vset=
ql1_vmon=-8.16584E-1
ql1_imon=1.37964E-8
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=1.97542E-9
ql3_vset=
ql3_vmon=-9.13162E0
ql3_imon=4.08971E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-4.83036E-11
mult1=-9.98405E-9
mult2=-2.76637E-9
rf_tmon=-6.59773E-3
rf_agc=3.10498E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.69808E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6421E0
bslens_imon=2.53775E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19959E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04952E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53538E1
cs_ef1b_imon=3.1092E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04796E1
cs_ea1_imon=1.24982E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43444E0
lens1_imon=2.69637E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03618E1
cs_ea2_imon=1.4106E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=3.01478E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.28199E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.29022E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15149E1
os_ea1_imon=2.43117E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63449E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24909E0
cs_ionrep_imon=9.81255E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.04207E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.25511E-8
tplens_vset=1.4E-1
tplens_vmon=1.58375E0
tplens_imon=-4.29124E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26909E1
iondef3_imon=1.5119E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.57715E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98584E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=3.97556E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25751E0
ionrepsh_imon=9.07353E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33501E1
lens5b_imon=2.18603E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45638E0
os_ea2_imon=-7.13916E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.18272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01028E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10739E1
os_restr2_imon=3.39247E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.31118E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.10261E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72485E1
iondef1_imon=1.09445E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.43538E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.89271E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-1.11305E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56171E1
einzel_imon=7.60495E-6
window_vset=0.0E0
window_vmon=1.86709E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-7.88688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.4996E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.38281E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28427E0
defgridb_imon=6.13189E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33252E1
os_fil1_imon=9.42102E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07906E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62683E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30771E1
cs_fil1_imon=9.23181E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28241E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65183E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.76001E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26836E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22068E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.00137E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.1687E-1	-7.9844E-1	-9.13169E0	-9.14185E0	5.17368E-3	9.34601E-2	2.72756E1	-3.26531E1	-3.26449E1	2.68099E1	2.158E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.17444E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09356E0	-8.16441E-1	-7.98607E-1	-9.13157E0	-9.14176E0	5.26905E-3	9.30786E-2	2.73231E1	-3.26915E1	-3.27203E1	2.67957E1	2.15636E-9	2.52236E-3	2.52236E-3	6.31269E-3	2.17829E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16512E-1	-7.98392E-1	-9.13157E0	-9.14185E0	5.31673E-3	9.30786E-2	2.73051E1	-3.26978E1	-3.279E1	2.68151E1	2.15887E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.17722E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16298E-1	-7.98297E-1	-9.13167E0	-9.14192E0	5.26905E-3	9.36747E-2	2.72849E1	-3.26793E1	-3.26829E1	2.6804E1	2.15365E-9	2.52025E-3	2.52025E-3	6.32858E-3	2.171E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.1656E-1	-7.98297E-1	-9.13148E0	-9.14192E0	5.24521E-3	9.33647E-2	2.73237E1	-3.26549E1	-3.25791E1	2.67992E1	2.15982E-9	2.52139E-3	2.52139E-3	6.27954E-3	2.18108E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16417E-1	-7.98416E-1	-9.13153E0	-9.14187E0	5.43594E-3	9.32217E-2	2.72915E1	-3.26337E1	-3.27576E1	2.68094E1	2.159E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.1829E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16226E-1	-7.98512E-1	-9.13134E0	-9.14197E0	5.126E-3	9.33886E-2	2.72775E1	-3.26446E1	-3.26398E1	2.6816E1	2.15425E-9	2.52428E-3	2.52428E-3	6.34037E-3	2.18011E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09665E0	-8.16345E-1	-7.98535E-1	-9.13138E0	-9.14183E0	5.31673E-3	9.33647E-2	2.72898E1	-3.26714E1	-3.26195E1	2.68285E1	2.15332E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.1839E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16321E-1	-7.98273E-1	-9.13167E0	-9.14199E0	5.26905E-3	9.35793E-2	2.72973E1	-3.26639E1	-3.25058E1	2.67914E1	2.15624E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.17547E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16298E-1	-7.98631E-1	-9.1316E0	-9.14185E0	5.48363E-3	9.38416E-2	2.72895E1	-3.26747E1	-3.25281E1	2.68016E1	2.158E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.18011E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.1625E-1	-7.98512E-1	-9.13153E0	-9.14171E0	5.19753E-3	9.35316E-2	2.73231E1	-3.265E1	-3.26921E1	2.67896E1	2.158E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.17255E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.16178E-1	-7.98535E-1	-9.13165E0	-9.14178E0	5.17368E-3	9.35316E-2	2.72943E1	-3.26591E1	-3.27918E1	2.68082E1	2.158E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.17444E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.16274E-1	-7.98225E-1	-9.13146E0	-9.14197E0	5.17368E-3	9.3627E-2	2.72919E1	-3.2638E1	-3.27137E1	2.681E1	2.15894E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17633E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16774E-1	-7.98464E-1	-9.13157E0	-9.14202E0	4.93526E-3	9.37462E-2	2.72967E1	-3.26651E1	-3.25936E1	2.67986E1	2.15238E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.17822E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16441E-1	-7.98106E-1	-9.13196E0	-9.14209E0	5.05447E-3	9.36985E-2	2.72985E1	-3.26657E1	-3.26398E1	2.68004E1	2.15613E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.17255E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.16655E-1	-7.9813E-1	-9.13167E0	-9.1418E0	5.53131E-3	9.36747E-2	2.73075E1	-3.26691E1	-3.26762E1	2.68142E1	2.15808E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.17361E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.1656E-1	-7.98106E-1	-9.1315E0	-9.14185E0	5.34058E-3	9.36747E-2	2.72937E1	-3.26428E1	-3.28045E1	2.6804E1	2.15894E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.17255E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16131E-1	-7.98631E-1	-9.13134E0	-9.14204E0	5.17368E-3	9.35555E-2	2.72974E1	-3.26602E1	-3.27133E1	2.68001E1	2.158E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.1858E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.16298E-1	-7.98678E-1	-9.13143E0	-9.14228E0	5.126E-3	9.38416E-2	2.73357E1	-3.26573E1	-3.26518E1	2.67998E1	2.15578E-9	2.52276E-3	2.52276E-3	6.31548E-3	2.17083E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16584E-1	-7.98368E-1	-9.13162E0	-9.14211E0	4.95911E-3	9.37462E-2	2.72485E1	-3.26638E1	-3.26909E1	2.68028E1					
