[Scan]
initial_time=2016-01-28T16:43:25
final_time=2016-01-28T16:43:45
ip_count=19
run=1026
dataset=2
scan=138
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.16751E-1
ql1_imon=1.3797E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=1.98112E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=3.93665E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-5.8949E-11
mult1=-8.99683E-9
mult2=-2.48804E-9
rf_tmon=-3.83599E-3
rf_agc=3.44486E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.6953E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62303E0
bslens_imon=2.58101E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20207E1
lens5a_imon=1.98456E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.05137E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=3.1005E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04645E2
lens23_imon=1.02032E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0511E1
cs_ea1_imon=1.24563E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40636E0
lens1_imon=2.75946E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65014E1
os_ef1alow_imon=2.97603E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04001E1
cs_ea2_imon=1.42813E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84104E1
cs_ef1a_imon=3.01252E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.28799E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11191E1
os_restr1_imon=4.28765E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1532E1
os_ea1_imon=2.39579E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6352E1
os_ef1bup_imon=3.07253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2325E0
cs_ionrep_imon=9.71476E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93412E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01788E1
cs_anode1_imon=2.04756E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.2527E-8
tplens_vset=1.4E-1
tplens_vmon=1.62521E0
tplens_imon=-1.15944E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.4983E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25911E1
iondef2_imon=1.58711E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98427E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.94454E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24669E0
ionrepsh_imon=9.46332E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33767E1
lens5b_imon=2.18125E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74819E1
cs_ef2b_imon=3.11794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44203E0
os_ea2_imon=-5.01223E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00574E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71109E1
cs_ef2a_imon=3.19011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06942E0
os_ef2alow_imon=-2.6186E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96072E-1
os_ef2bup_imon=-5.29049E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10894E1
os_restr2_imon=3.40581E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23098E2
cs_ionfoca_imon=6.31226E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01666E1
cs_anode2_imon=2.10067E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73277E1
iondef1_imon=1.07489E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.40333E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.90634E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11663E0
cs_ionaccel_imon=-1.16305E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47283E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5627E1
einzel_imon=7.57026E-6
window_vset=0.0E0
window_vmon=1.83706E-1
window_imon=-1.08196E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39007E-4
mask2_vset=0.0E0
mask2_vmon=-1.86466E1
mask2_imon=-6.56243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.15975E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.56764E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.16381E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49254E0
defgridb_imon=6.20669E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33266E1
os_fil1_imon=9.42657E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07944E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62477E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30746E1
cs_fil1_imon=9.22945E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34803E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65209E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.27201E-2
os_fil2_imon=-2.66146E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73763E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.89261E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35041E-1
cs_fil2_imon=-2.16817E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02134E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22098E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=2.1829E-2
chamber_ion_pmon=2.15992E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40062E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50808E-1
res40_imon=-2.51319E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16178E-1	-7.98583E-1	-9.13165E0	-9.14204E0	4.88758E-3	9.37223E-2	2.7265E1	-3.26679E1	-3.24886E1	2.68112E1	2.15945E-9	2.52283E-3	2.52283E-3	6.30111E-3	2.17251E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0934E0	-8.16417E-1	-7.98202E-1	-9.13146E0	-9.14183E0	5.05447E-3	9.3627E-2	2.72727E1	-3.26548E1	-3.25917E1	2.68154E1	2.15716E-9	2.52599E-3	2.52599E-3	6.31817E-3	2.1829E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.16417E-1	-7.98297E-1	-9.13165E0	-9.14171E0	4.72069E-3	9.38416E-2	2.73159E1	-3.26488E1	-3.27107E1	2.68046E1	2.15791E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.17529E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.16655E-1	-7.98416E-1	-9.13136E0	-9.14192E0	4.98295E-3	9.377E-2	2.73329E1	-3.26463E1	-3.27239E1	2.68209E1	2.15706E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.17444E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.1687E-1	-7.98512E-1	-9.13141E0	-9.14197E0	5.05447E-3	9.36985E-2	2.72829E1	-3.26536E1	-3.26573E1	2.68202E1	2.15907E-9	2.52131E-3	2.52131E-3	6.31798E-3	2.16374E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.17013E-1	-7.98416E-1	-9.13148E0	-9.14207E0	5.07832E-3	9.35793E-2	2.7285E1	-3.26502E1	-3.25269E1	2.67914E1	2.15613E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.18011E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.17013E-1	-7.98607E-1	-9.13172E0	-9.1418E0	4.74453E-3	9.35793E-2	2.73093E1	-3.26512E1	-3.245E1	2.68034E1	2.15808E-9	2.52492E-3	2.52492E-3	6.33436E-3	2.17918E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.1718E-1	-7.9844E-1	-9.13172E0	-9.14183E0	4.93526E-3	9.33647E-2	2.73129E1	-3.26603E1	-3.25329E1	2.68172E1	2.15706E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.18011E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16822E-1	-7.98464E-1	-9.13169E0	-9.14187E0	4.93526E-3	9.3317E-2	2.72636E1	-3.26609E1	-3.25034E1	2.68142E1	2.15613E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17822E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16894E-1	-7.98631E-1	-9.13136E0	-9.14183E0	4.79221E-3	9.34124E-2	2.73424E1	-3.26687E1	-3.24458E1	2.68022E1	2.15706E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.18201E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16822E-1	-7.9844E-1	-9.13196E0	-9.14156E0	5.00679E-3	9.36985E-2	2.72733E1	-3.26813E1	-3.25707E1	2.68052E1	2.15613E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.18011E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09657E0	-8.16607E-1	-7.98488E-1	-9.13165E0	-9.1418E0	4.8399E-3	9.36985E-2	2.72414E1	-3.26975E1	-3.26747E1	2.67746E1	2.15706E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.16501E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09673E0	-8.16298E-1	-7.98678E-1	-9.13153E0	-9.14178E0	5.00679E-3	9.35793E-2	2.73526E1	-3.26278E1	-3.25629E1	2.6801E1	2.15613E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.16501E-2
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.16488E-1	-7.98798E-1	-9.1315E0	-9.14187E0	4.86374E-3	9.34601E-2	2.72496E1	-3.26874E1	-3.26903E1	2.68047E1	2.158E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.17822E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16631E-1	-7.98368E-1	-9.13157E0	-9.14195E0	5.05447E-3	9.35793E-2	2.73057E1	-3.26891E1	-3.2638E1	2.68142E1	2.15808E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.18663E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16536E-1	-7.98392E-1	-9.13179E0	-9.14173E0	5.00679E-3	9.35793E-2	2.72739E1	-3.26873E1	-3.25323E1	2.6804E1	2.15847E-9	2.51389E-3	2.51389E-3	6.33762E-3	2.17633E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16655E-1	-7.98416E-1	-9.13172E0	-9.14221E0	4.81606E-3	9.35316E-2	2.73139E1	-3.26697E1	-3.27522E1	2.68196E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.1625E-1	-7.98249E-1	-9.13179E0	-9.14197E0	5.00679E-3	9.32932E-2	2.72817E1	-3.26518E1	-3.27281E1	2.6792E1	2.15716E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.16621E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16512E-1	-7.98249E-1	-9.13162E0	-9.14223E0	5.14984E-3	9.32217E-2	2.72809E1	-3.26655E1	-3.25623E1	2.67931E1	2.15519E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17822E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16751E-1	-7.98297E-1	-9.13141E0	-9.14168E0	5.10216E-3	9.3627E-2	2.73277E1	-3.25911E1	-3.26236E1	2.68076E1	2.15992E-9	2.51954E-3	2.51954E-3	6.28592E-3	2.1829E-2
