[Scan]
initial_time=2016-01-28T16:44:18
final_time=2016-01-28T16:44:38
ip_count=19
run=1026
dataset=2
scan=140
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.37791E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.07086E-9
ql3_vset=
ql3_vmon=-9.13198E0
ql3_imon=3.8861E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-7.29203E-11
mult1=-9.58386E-9
mult2=-2.75254E-9
rf_tmon=-3.05242E-3
rf_agc=3.49858E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.68589E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64975E0
bslens_imon=2.48867E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19638E1
lens5a_imon=1.99264E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05085E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=3.10415E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05013E1
cs_ea1_imon=1.25702E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40001E0
lens1_imon=2.57477E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.96296E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0384E1
cs_ea2_imon=1.42324E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.01333E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.27768E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10977E1
os_restr1_imon=4.27108E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15287E1
os_ea1_imon=2.39358E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63435E1
os_ef1bup_imon=3.08126E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21466E0
cs_ionrep_imon=9.63521E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93308E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.05972E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.24701E-8
tplens_vset=1.4E-1
tplens_vmon=1.65641E0
tplens_imon=-3.9765E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26476E1
iondef3_imon=1.51383E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26741E1
iondef2_imon=1.55763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98413E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=3.97141E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27394E0
ionrepsh_imon=9.28331E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33957E1
lens5b_imon=2.16934E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74323E1
cs_ef2b_imon=3.12858E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43117E0
os_ea2_imon=-6.97139E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.0084E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.18582E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0695E0
os_ef2alow_imon=-2.58855E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09508E-1
os_ef2bup_imon=-5.37802E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11149E1
os_restr2_imon=3.41439E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.28468E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01847E1
cs_anode2_imon=2.10895E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73171E1
iondef1_imon=1.09006E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.07215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.42111E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.89471E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11742E0
cs_ionaccel_imon=-1.06217E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47142E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56151E1
einzel_imon=7.66876E-6
window_vset=0.0E0
window_vmon=1.97379E-1
window_imon=-1.03927E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.39038E-4
mask2_vset=0.0E0
mask2_vmon=-1.86719E1
mask2_imon=-7.03465E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.34038E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.64407E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=6.84248E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41811E0
defgridb_imon=6.09002E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33219E1
os_fil1_imon=9.44099E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07189E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6262E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30625E1
cs_fil1_imon=9.23786E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35145E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64871E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55885E-2
os_fil2_imon=-2.60343E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.75949E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.82267E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33422E-1
cs_fil2_imon=-2.41263E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.26338E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21863E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.18011E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.51007E-3
foreline_cvt_pmon=2.51007E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.16355E-1
res40_imon=-2.48552E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.16345E-1	-7.98655E-1	-9.13134E0	-9.14235E0	4.95911E-3	9.34124E-2	2.73069E1	-3.26726E1	-3.24844E1	2.67931E1	2.15685E-9	2.51838E-3	2.51838E-3	6.31879E-3	2.17815E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16655E-1	-7.98726E-1	-9.13167E0	-9.14209E0	5.126E-3	9.36985E-2	2.72971E1	-3.2675E1	-3.26021E1	2.68013E1	2.15533E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.17361E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16488E-1	-7.98702E-1	-9.13157E0	-9.14216E0	4.86374E-3	9.35316E-2	2.7324E1	-3.26413E1	-3.27658E1	2.68238E1	2.15124E-9	2.5225E-3	2.5225E-3	6.34661E-3	2.16952E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16774E-1	-7.98416E-1	-9.13167E0	-9.14204E0	4.72069E-3	9.35793E-2	2.7298E1	-3.27334E1	-3.2629E1	2.68148E1	2.16178E-9	2.52236E-3	2.52236E-3	6.32858E-3	2.16374E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16894E-1	-7.98392E-1	-9.13153E0	-9.14183E0	5.05447E-3	9.36747E-2	2.73134E1	-3.26838E1	-3.25853E1	2.68105E1	2.15613E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.17255E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.17132E-1	-7.98368E-1	-9.13112E0	-9.14164E0	5.03063E-3	9.35555E-2	2.73003E1	-3.26567E1	-3.24416E1	2.68028E1	2.15624E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.16436E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16822E-1	-7.98392E-1	-9.13129E0	-9.14185E0	5.26905E-3	9.34601E-2	2.72898E1	-3.2667E1	-3.25024E1	2.68119E1	2.159E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.17918E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16727E-1	-7.98535E-1	-9.13146E0	-9.14176E0	5.07832E-3	9.37223E-2	2.72805E1	-3.26567E1	-3.25707E1	2.6831E1	2.15791E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.17915E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16727E-1	-7.98559E-1	-9.13167E0	-9.14159E0	5.17368E-3	9.33886E-2	2.72811E1	-3.26621E1	-3.28117E1	2.68148E1	2.15696E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.18494E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16488E-1	-7.98655E-1	-9.13169E0	-9.1418E0	5.26905E-3	9.33647E-2	2.73165E1	-3.26663E1	-3.27708E1	2.68035E1	2.158E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.1858E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16369E-1	-7.98774E-1	-9.13155E0	-9.1423E0	5.00679E-3	9.33409E-2	2.72845E1	-3.26408E1	-3.26443E1	2.67881E1	2.15349E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.16991E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16441E-1	-7.98464E-1	-9.13196E0	-9.1419E0	4.79221E-3	9.34601E-2	2.73405E1	-3.26627E1	-3.24842E1	2.67986E1	2.15894E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.1858E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.16822E-1	-7.98249E-1	-9.13169E0	-9.14164E0	5.31673E-3	9.34124E-2	2.72691E1	-3.2652E1	-3.2672E1	2.68058E1	2.15987E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.17444E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.16822E-1	-7.98583E-1	-9.13181E0	-9.14173E0	5.26905E-3	9.39369E-2	2.72955E1	-3.26524E1	-3.25924E1	2.67776E1	2.15808E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.18104E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16894E-1	-7.98559E-1	-9.13179E0	-9.14166E0	5.26905E-3	9.37939E-2	2.73159E1	-3.26585E1	-3.25647E1	2.67804E1	2.15613E-9	2.51552E-3	2.51552E-3	6.29645E-3	2.17633E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16894E-1	-7.98249E-1	-9.13212E0	-9.14159E0	5.05447E-3	9.39131E-2	2.73454E1	-3.26795E1	-3.26927E1	2.67986E1	2.15533E-9	2.52923E-3	2.52923E-3	6.3074E-3	2.18104E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.1687E-1	-7.9844E-1	-9.13179E0	-9.14185E0	4.91142E-3	9.38892E-2	2.72986E1	-3.26661E1	-3.26661E1	2.6804E1	2.15706E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.17255E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16822E-1	-7.98345E-1	-9.13179E0	-9.14168E0	5.19753E-3	9.39131E-2	2.73316E1	-3.26349E1	-3.26472E1	2.68267E1	2.15257E-9	2.52815E-3	2.52815E-3	6.33977E-3	2.16806E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16941E-1	-7.98535E-1	-9.13177E0	-9.14185E0	5.126E-3	9.39131E-2	2.73399E1	-3.26644E1	-3.26142E1	2.68118E1	2.15808E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.16806E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.16798E-1	-7.98416E-1	-9.13198E0	-9.14176E0	5.17368E-3	9.377E-2	2.73171E1	-3.26741E1	-3.26476E1	2.68004E1	2.158E-9	2.51007E-3	2.51007E-3	6.32936E-3	2.18011E-2
