[Scan]
initial_time=2016-01-28T16:46:32
final_time=2016-01-28T16:46:51
ip_count=19
run=1026
dataset=2
scan=145
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=1.37723E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=1.97054E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=4.19748E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-4.57287E-11
mult1=-9.19856E-9
mult2=-2.75454E-9
rf_tmon=-4.4944E-3
rf_agc=3.38142E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.69666E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61607E0
bslens_imon=2.56449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20285E1
lens5a_imon=1.9989E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04838E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53536E1
cs_ef1b_imon=3.10522E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02333E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04675E1
cs_ea1_imon=1.2443E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40618E0
lens1_imon=2.51848E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64116E1
os_ef1alow_imon=2.98208E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.4333E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.00685E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.28306E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11572E1
os_restr1_imon=4.30652E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15447E1
os_ea1_imon=2.40204E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63568E1
os_ef1bup_imon=3.08115E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20904E0
cs_ionrep_imon=9.62562E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01921E1
cs_anode1_imon=2.05642E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.24623E-8
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-3.80294E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2632E1
iondef3_imon=1.50232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2635E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98523E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.95242E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25033E0
ionrepsh_imon=9.37078E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3387E1
lens5b_imon=2.16985E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.11265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40311E0
os_ea2_imon=-6.4221E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71558E1
cs_ef2a_imon=3.19226E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06429E0
os_ef2alow_imon=-2.63025E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99979E-1
os_ef2bup_imon=-5.25931E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11017E1
os_restr2_imon=3.40598E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.28265E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01963E1
cs_anode2_imon=2.09818E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.11369E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.07911E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.42732E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.86262E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15137E0
cs_ionaccel_imon=-9.99029E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47117E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56305E1
einzel_imon=7.69138E-6
window_vset=0.0E0
window_vmon=2.0071E-1
window_imon=-1.15826E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39187E-4
mask2_vset=0.0E0
mask2_vmon=-1.86391E1
mask2_imon=-7.018E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.62939E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.34104E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.19404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.27026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3322E1
os_fil1_imon=9.41011E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07712E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62619E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30655E1
cs_fil1_imon=9.23242E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.36427E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65218E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31923E-2
os_fil2_imon=-2.70889E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.79493E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35309E-1
cs_fil2_imon=-2.18992E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.30724E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21973E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.25594E-1
res40_imon=-2.54887E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16584E-1	-7.97963E-1	-9.13167E0	-9.14171E0	5.07832E-3	9.35793E-2	2.72739E1	-3.26903E1	-3.26663E1	2.67982E1	2.15992E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.17547E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.16512E-1	-7.98321E-1	-9.1316E0	-9.14183E0	5.05447E-3	9.36747E-2	2.73117E1	-3.26554E1	-3.26116E1	2.68051E1	2.15519E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.17633E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-8.16703E-1	-7.98392E-1	-9.13174E0	-9.14183E0	5.36442E-3	9.34839E-2	2.73157E1	-3.26596E1	-3.26856E1	2.68076E1	2.15409E-9	2.52027E-3	2.52027E-3	6.29624E-3	2.17915E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09325E0	-8.16536E-1	-7.98392E-1	-9.13191E0	-9.14156E0	5.07832E-3	9.36747E-2	2.73098E1	-3.26502E1	-3.28006E1	2.67868E1	2.15817E-9	2.52659E-3	2.52659E-3	6.3074E-3	2.18011E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.16655E-1	-7.98345E-1	-9.13148E0	-9.14187E0	5.26905E-3	9.34601E-2	2.72847E1	-3.26801E1	-3.26026E1	2.68106E1	2.15716E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.17176E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.16536E-1	-7.98512E-1	-9.13143E0	-9.14185E0	5.05447E-3	9.38177E-2	2.73297E1	-3.26188E1	-3.27528E1	2.67758E1	2.15894E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.16878E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.16774E-1	-7.98655E-1	-9.13157E0	-9.14176E0	4.88758E-3	9.36508E-2	2.7263E1	-3.26549E1	-3.26134E1	2.67816E1	2.16081E-9	2.52647E-3	2.52647E-3	6.34037E-3	2.18201E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16584E-1	-7.98655E-1	-9.13172E0	-9.14214E0	5.07832E-3	9.36747E-2	2.73063E1	-3.26585E1	-3.26467E1	2.68238E1	2.15894E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.16501E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16751E-1	-7.9844E-1	-9.13162E0	-9.14207E0	5.07832E-3	9.33647E-2	2.73024E1	-3.26768E1	-3.26357E1	2.6806E1	2.15706E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.17255E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16774E-1	-7.98488E-1	-9.13107E0	-9.14223E0	5.22137E-3	9.31978E-2	2.73183E1	-3.26807E1	-3.28303E1	2.68196E1	2.15522E-9	2.51764E-3	2.51764E-3	6.28803E-3	2.17592E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16584E-1	-7.98249E-1	-9.13117E0	-9.14221E0	5.07832E-3	9.33886E-2	2.72662E1	-3.26767E1	-3.27304E1	2.67944E1	2.15706E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.16878E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16536E-1	-7.98249E-1	-9.13122E0	-9.14214E0	4.88758E-3	9.36985E-2	2.73123E1	-3.26609E1	-3.27918E1	2.6822E1	2.158E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.16125E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16798E-1	-7.98035E-1	-9.13155E0	-9.14221E0	5.07832E-3	9.37223E-2	2.72907E1	-3.26645E1	-3.27167E1	2.67839E1	2.15808E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.16252E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16727E-1	-7.98321E-1	-9.13184E0	-9.14214E0	5.26905E-3	9.36985E-2	2.72889E1	-3.26717E1	-3.26236E1	2.68286E1	2.15519E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.17444E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.16417E-1	-7.98225E-1	-9.13138E0	-9.14176E0	5.22137E-3	9.34839E-2	2.7302E1	-3.26652E1	-3.27901E1	2.68063E1	2.15987E-9	2.51116E-3	2.51116E-3	6.29645E-3	2.17444E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16464E-1	-7.98297E-1	-9.13131E0	-9.14192E0	4.91142E-3	9.36747E-2	2.72868E1	-3.26561E1	-3.26531E1	2.68244E1	2.156E-9	2.51581E-3	2.51581E-3	6.29624E-3	2.19075E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16441E-1	-7.98583E-1	-9.13129E0	-9.14192E0	4.98295E-3	9.37462E-2	2.72821E1	-3.26956E1	-3.27965E1	2.67578E1	2.15894E-9	2.52318E-3	2.52318E-3	6.34588E-3	2.17255E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16441E-1	-7.98368E-1	-9.13126E0	-9.14166E0	4.98295E-3	9.36747E-2	2.7278E1	-3.2649E1	-3.27865E1	2.67499E1	2.15767E-9	2.52256E-3	2.52256E-3	6.32075E-3	2.18426E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16512E-1	-7.98559E-1	-9.13155E0	-9.14197E0	5.07832E-3	9.3317E-2	2.734E1	-3.25997E1	-3.27484E1	2.68208E1	2.15696E-9	2.51693E-3	2.51693E-3	6.30182E-3	2.16952E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16703E-1	-7.98512E-1	-9.13146E0	-9.14187E0	5.07832E-3	9.34601E-2	2.73105E1	-3.2635E1	-3.2632E1	2.67908E1					
