[Scan]
initial_time=2016-01-28T16:47:52
final_time=2016-01-28T16:48:11
ip_count=19
run=1026
dataset=2
scan=148
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08769E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=1.3876E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=1.9622E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=3.85261E-10
ql4_vset=
ql4_vmon=-9.14257E0
ql4_imon=-6.12855E-11
mult1=-1.00173E-8
mult2=-2.64076E-9
rf_tmon=-4.13991E-3
rf_agc=3.35379E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.7081E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6581E0
bslens_imon=2.7414E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19443E1
lens5a_imon=1.98354E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05122E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=3.10956E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02055E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05092E1
cs_ea1_imon=1.23756E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42398E0
lens1_imon=2.62386E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03862E1
cs_ea2_imon=1.38228E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.00432E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.28818E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.12E1
os_restr1_imon=4.30572E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15434E1
os_ea1_imon=2.40042E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23679E0
cs_ionrep_imon=9.67597E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93497E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=2.05071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.25378E-8
tplens_vset=1.4E-1
tplens_vmon=1.5943E0
tplens_imon=-1.96979E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24914E1
iondef3_imon=1.49577E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.60265E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98144E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.98071E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26434E0
ionrepsh_imon=9.45192E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33572E1
lens5b_imon=2.18445E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44615E0
os_ea2_imon=-5.09181E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00659E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07318E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89615E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.39788E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.31287E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.10441E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73448E1
iondef1_imon=1.09321E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67897E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.43393E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.95152E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.03015E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=1.6989E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.60809E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.61271E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.25548E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36984E0
defgridb_imon=5.89281E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.41099E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07365E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62552E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30732E1
cs_fil1_imon=9.22568E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32686E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6539E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.27885E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.15978E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22042E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.1829E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.19358E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16441E-1	-7.9844E-1	-9.13138E0	-9.1418E0	5.17368E-3	9.35078E-2	2.73128E1	-3.26667E1	-3.26661E1	2.68118E1	2.15441E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.17918E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16488E-1	-7.98392E-1	-9.13134E0	-9.14197E0	5.4121E-3	9.32932E-2	2.72989E1	-3.26535E1	-3.25699E1	2.67926E1	2.15441E-9	2.51739E-3	2.51739E-3	6.34518E-3	2.16252E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16464E-1	-7.98631E-1	-9.13107E0	-9.1419E0	5.43594E-3	9.33647E-2	2.73086E1	-3.26691E1	-3.26897E1	2.6831E1	2.15685E-9	2.52293E-3	2.52293E-3	6.3245E-3	2.1703E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16488E-1	-7.98368E-1	-9.13122E0	-9.14178E0	5.14984E-3	9.36985E-2	2.7275E1	-3.26638E1	-3.25352E1	2.68142E1	2.15808E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.1829E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16298E-1	-7.98249E-1	-9.13115E0	-9.14171E0	5.07832E-3	9.35793E-2	2.72721E1	-3.26494E1	-3.25377E1	2.67955E1	2.15533E-9	2.51203E-3	2.51203E-3	6.29665E-3	2.17361E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16369E-1	-7.98702E-1	-9.13124E0	-9.14185E0	4.76837E-3	9.34124E-2	2.73207E1	-3.26705E1	-3.27642E1	2.683E1	2.15894E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.17822E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16274E-1	-7.98535E-1	-9.13129E0	-9.14183E0	4.74453E-3	9.36747E-2	2.72973E1	-3.26579E1	-3.26987E1	2.68186E1	2.16081E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.18201E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16774E-1	-7.98607E-1	-9.13119E0	-9.14161E0	4.86374E-3	9.35316E-2	2.73328E1	-3.26614E1	-3.26567E1	2.67896E1	2.15533E-9	2.52599E-3	2.52599E-3	6.31817E-3	2.18104E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09356E0	-8.16679E-1	-7.98655E-1	-9.13143E0	-9.14195E0	4.81606E-3	9.32693E-2	2.72739E1	-3.26711E1	-3.25936E1	2.67986E1	2.158E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.17444E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.16631E-1	-7.98512E-1	-9.13141E0	-9.14233E0	4.95911E-3	9.32932E-2	2.73201E1	-3.26518E1	-3.26086E1	2.67896E1	2.15332E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.17444E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.16655E-1	-7.98821E-1	-9.13126E0	-9.14207E0	4.98295E-3	9.35793E-2	2.72955E1	-3.26723E1	-3.26044E1	2.68406E1	2.15894E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.16125E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.16679E-1	-7.98655E-1	-9.13141E0	-9.14211E0	4.74453E-3	9.33647E-2	2.7301E1	-3.26738E1	-3.27894E1	2.68058E1	2.158E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.15938E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.16369E-1	-7.98678E-1	-9.13129E0	-9.14204E0	5.126E-3	9.32932E-2	2.73063E1	-3.26705E1	-3.25948E1	2.67866E1	2.15716E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.16806E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16369E-1	-7.98631E-1	-9.13119E0	-9.14221E0	5.05447E-3	9.33886E-2	2.72955E1	-3.26536E1	-3.27245E1	2.68058E1	2.15894E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17444E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16584E-1	-7.98559E-1	-9.13155E0	-9.14207E0	4.74453E-3	9.34124E-2	2.73351E1	-3.26777E1	-3.26458E1	2.67816E1	2.15706E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.16878E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16631E-1	-7.98535E-1	-9.13157E0	-9.14168E0	5.00679E-3	9.37939E-2	2.72921E1	-3.26921E1	-3.24968E1	2.67896E1	2.15706E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.17444E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16441E-1	-7.98559E-1	-9.1315E0	-9.1418E0	5.07832E-3	9.36031E-2	2.73106E1	-3.26242E1	-3.25226E1	2.6834E1	2.15533E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.17361E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.16488E-1	-7.98607E-1	-9.13162E0	-9.14223E0	4.673E-3	9.36747E-2	2.73145E1	-3.26944E1	-3.26909E1	2.68304E1	2.15791E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.18688E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0934E0	-8.16655E-1	-7.98655E-1	-9.13191E0	-9.14211E0	5.03063E-3	9.36031E-2	2.7275E1	-3.26856E1	-3.26248E1	2.67998E1	2.16085E-9	2.5131E-3	2.5131E-3	6.33436E-3	2.17732E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-8.16393E-1	-7.98488E-1	-9.13143E0	-9.14257E0	4.79221E-3	9.36747E-2	2.73448E1	-3.2653E1	-3.24914E1	2.67897E1	2.15716E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.1829E-2
