[Scan]
initial_time=2016-01-28T16:49:12
final_time=2016-01-28T16:49:31
ip_count=19
run=1026
dataset=2
scan=151
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.37215E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.04376E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=3.58331E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-5.56827E-11
mult1=-9.87765E-9
mult2=-2.66054E-9
rf_tmon=-5.09938E-3
rf_agc=3.32265E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.65704E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66444E0
bslens_imon=2.40876E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19984E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05121E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=3.1128E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04947E1
cs_ea1_imon=1.24713E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43863E0
lens1_imon=2.73085E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03956E1
cs_ea2_imon=1.41525E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83505E1
cs_ef1a_imon=2.99748E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.2798E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10715E1
os_restr1_imon=4.28301E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15123E1
os_ea1_imon=2.38859E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.07064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25859E0
cs_ionrep_imon=9.86629E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93264E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02103E1
cs_anode1_imon=2.06189E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.25418E-8
tplens_vset=1.4E-1
tplens_vmon=1.60545E0
tplens_imon=-2.10402E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25422E1
iondef3_imon=1.50374E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26478E1
iondef2_imon=1.56638E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98289E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.09294E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28041E0
ionrepsh_imon=9.29291E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33374E1
lens5b_imon=2.17375E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4503E0
os_ea2_imon=-5.43106E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00425E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71756E1
cs_ef2a_imon=3.19642E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26856E-1
os_ef2bup_imon=-5.50988E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.39644E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.31486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.0882E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73187E1
iondef1_imon=1.08149E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.078E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.46884E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.88366E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-9.86907E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47179E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55961E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=1.8791E-1
window_imon=-9.22035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.34624E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.44369E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.03477E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28449E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33256E1
os_fil1_imon=9.43459E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06945E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62319E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30702E1
cs_fil1_imon=9.23685E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33707E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64875E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.45852E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.08347E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.77409E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50863E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22031E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=2.18011E-2
chamber_ion_pmon=2.15613E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.29569E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16321E-1	-7.98321E-1	-9.13169E0	-9.14207E0	5.50747E-3	9.36031E-2	2.72877E1	-3.26543E1	-3.25094E1	2.68004E1	2.15987E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.17822E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16584E-1	-7.98464E-1	-9.13153E0	-9.14195E0	5.31673E-3	9.35316E-2	2.72967E1	-3.26669E1	-3.24902E1	2.67824E1	2.15519E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.17633E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16631E-1	-7.9844E-1	-9.13095E0	-9.14195E0	5.36442E-3	9.377E-2	2.73444E1	-3.26545E1	-3.25031E1	2.6759E1	2.15519E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.17633E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16441E-1	-7.97963E-1	-9.13141E0	-9.14207E0	5.05447E-3	9.35555E-2	2.73075E1	-3.26762E1	-3.24699E1	2.6792E1	2.15736E-9	2.51369E-3	2.51369E-3	6.323E-3	2.17384E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16393E-1	-7.98249E-1	-9.13124E0	-9.14168E0	5.38826E-3	9.34601E-2	2.73001E1	-3.26747E1	-3.25237E1	2.68132E1	2.15519E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.1839E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16417E-1	-7.98059E-1	-9.13146E0	-9.14171E0	5.05447E-3	9.36985E-2	2.72866E1	-3.26596E1	-3.27882E1	2.68222E1	2.16171E-9	2.51952E-3	2.51952E-3	6.28468E-3	2.17422E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.16274E-1	-7.98345E-1	-9.13131E0	-9.14156E0	4.98295E-3	9.35793E-2	2.73178E1	-3.26896E1	-3.26222E1	2.67816E1	2.15913E-9	2.51783E-3	2.51783E-3	6.30221E-3	2.17563E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16345E-1	-7.98106E-1	-9.13141E0	-9.14168E0	4.91142E-3	9.32455E-2	2.72985E1	-3.2653E1	-3.26386E1	2.68124E1	2.15872E-9	2.51758E-3	2.51758E-3	6.31321E-3	2.1751E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.16202E-1	-7.98106E-1	-9.1316E0	-9.14149E0	4.69685E-3	9.3174E-2	2.73039E1	-3.26787E1	-3.27148E1	2.68046E1	2.15894E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.1858E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.16345E-1	-7.98011E-1	-9.13146E0	-9.14166E0	4.62532E-3	9.35793E-2	2.72756E1	-3.26419E1	-3.2534E1	2.68112E1	2.156E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.17722E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09364E0	-8.16393E-1	-7.98464E-1	-9.13153E0	-9.14216E0	4.72069E-3	9.3174E-2	2.72883E1	-3.26482E1	-3.26362E1	2.67885E1	2.159E-9	2.52061E-3	2.52061E-3	6.29128E-3	2.1829E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16369E-1	-7.98416E-1	-9.13157E0	-9.14173E0	4.69685E-3	9.34124E-2	2.72835E1	-3.26464E1	-3.2644E1	2.68256E1	2.15145E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.18011E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16131E-1	-7.98321E-1	-9.13169E0	-9.14183E0	4.8399E-3	9.33886E-2	2.72921E1	-3.26779E1	-3.26691E1	2.68112E1	2.15716E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.16621E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.16298E-1	-7.98154E-1	-9.13129E0	-9.14185E0	4.98295E-3	9.36031E-2	2.73057E1	-3.26663E1	-3.27324E1	2.68298E1	2.15613E-9	2.52099E-3	2.52099E-3	6.35692E-3	2.1839E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0934E0	-8.16488E-1	-7.98249E-1	-9.13093E0	-9.14142E0	4.673E-3	9.33409E-2	2.73015E1	-3.26561E1	-3.26248E1	2.68184E1	2.15533E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.17547E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0934E0	-8.16464E-1	-7.9813E-1	-9.13143E0	-9.14149E0	4.43459E-3	9.36747E-2	2.7288E1	-3.27039E1	-3.25552E1	2.67962E1	2.15238E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17066E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09356E0	-8.16441E-1	-7.98273E-1	-9.13153E0	-9.14154E0	4.76837E-3	9.33647E-2	2.72638E1	-3.26803E1	-3.24555E1	2.67972E1	2.158E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.16501E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09333E0	-8.16464E-1	-7.98392E-1	-9.13134E0	-9.14156E0	4.62532E-3	9.33886E-2	2.73157E1	-3.26508E1	-3.25664E1	2.67532E1	2.15716E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.17918E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16607E-1	-7.98225E-1	-9.13134E0	-9.14209E0	4.72069E-3	9.3627E-2	2.73452E1	-3.26478E1	-3.25593E1	2.67794E1	2.15817E-9	2.52025E-3	2.52025E-3	6.32328E-3	2.171E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16631E-1	-7.98416E-1	-9.1311E0	-9.14204E0	4.76837E-3	9.34124E-2	2.73187E1	-3.26478E1	-3.25422E1	2.68058E1	2.15613E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.18011E-2
