[Scan]
initial_time=2016-01-28T16:50:05
final_time=2016-01-28T16:50:25
ip_count=19
run=1026
dataset=2
scan=153
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08756E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.38424E-8
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=1.97482E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=3.57485E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=-4.57525E-11
mult1=-9.75243E-9
mult2=-2.71861E-9
rf_tmon=-4.7828E-3
rf_agc=3.25585E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=1.70559E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.4123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20102E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.11388E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04304E1
cs_ea1_imon=1.2266E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39262E0
lens1_imon=2.45831E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03661E1
cs_ea2_imon=1.40251E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84004E1
cs_ef1a_imon=3.01586E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.28423E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11712E1
os_restr1_imon=4.27725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15406E1
os_ea1_imon=2.39496E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20314E0
cs_ionrep_imon=9.69994E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=2.05216E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.2483E-8
tplens_vset=1.4E-1
tplens_vmon=1.60545E0
tplens_imon=-1.82087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.49135E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26831E1
iondef2_imon=1.55789E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.98753E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26744E0
ionrepsh_imon=9.43449E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44736E0
os_ea2_imon=-6.10355E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.40725E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.29999E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.10117E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73369E1
iondef1_imon=1.09423E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.46086E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.88886E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.08421E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=1.99923E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.86662E1
mask2_imon=-6.91381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.85945E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.58172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.01707E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48528E0
defgridb_imon=6.1393E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3321E1
os_fil1_imon=9.39819E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07377E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62908E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30601E1
cs_fil1_imon=9.22016E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29502E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65144E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33189E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.68103E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21948E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.17255E-2
chamber_ion_pmon=2.15613E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.49681E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.16441E-1	-7.98202E-1	-9.13143E0	-9.14168E0	4.79221E-3	9.34839E-2	2.7319E1	-3.26903E1	-3.2655E1	2.68123E1	2.15808E-9	2.52384E-3	2.52384E-3	6.33977E-3	2.17361E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16131E-1	-7.98488E-1	-9.13136E0	-9.14195E0	4.81606E-3	9.36747E-2	2.72877E1	-3.26567E1	-3.27071E1	2.68076E1	2.15716E-9	2.51417E-3	2.51417E-3	6.33977E-3	2.17361E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16083E-1	-7.98345E-1	-9.13148E0	-9.1418E0	4.8399E-3	9.36031E-2	2.73153E1	-3.26573E1	-3.273E1	2.67938E1	2.15716E-9	2.52923E-3	2.52923E-3	6.29128E-3	2.17732E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16393E-1	-7.98297E-1	-9.13165E0	-9.1418E0	4.8399E-3	9.34124E-2	2.73069E1	-3.2629E1	-3.25834E1	2.67974E1	2.156E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.17337E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16417E-1	-7.98225E-1	-9.13146E0	-9.14211E0	4.93526E-3	9.33886E-2	2.72915E1	-3.26608E1	-3.24632E1	2.67958E1	2.15808E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.17918E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16417E-1	-7.98178E-1	-9.13129E0	-9.14216E0	5.17368E-3	9.35316E-2	2.72865E1	-3.26332E1	-3.25527E1	2.67864E1	2.15894E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.1839E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16321E-1	-7.97963E-1	-9.13134E0	-9.1418E0	5.00679E-3	9.34124E-2	2.72979E1	-3.26356E1	-3.26861E1	2.68051E1	2.15624E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.18104E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16298E-1	-7.98202E-1	-9.13134E0	-9.14202E0	5.126E-3	9.38416E-2	2.72973E1	-3.26771E1	-3.25221E1	2.67908E1	2.15791E-9	2.51693E-3	2.51693E-3	6.32978E-3	2.17337E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16512E-1	-7.98178E-1	-9.13138E0	-9.14159E0	4.98295E-3	9.37462E-2	2.72721E1	-3.26679E1	-3.2721E1	2.68076E1	2.15894E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.17444E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.16536E-1	-7.98583E-1	-9.13122E0	-9.1419E0	4.74453E-3	9.34601E-2	2.72895E1	-3.26663E1	-3.25305E1	2.68136E1	2.15441E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.18104E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.16298E-1	-7.98583E-1	-9.13122E0	-9.14195E0	4.91142E-3	9.34601E-2	2.72522E1	-3.26759E1	-3.26464E1	2.68274E1	2.15349E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.17176E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.16131E-1	-7.98678E-1	-9.13136E0	-9.14176E0	5.36442E-3	9.35078E-2	2.73021E1	-3.26711E1	-3.2757E1	2.68004E1	2.15987E-9	2.52538E-3	2.52538E-3	6.29645E-3	2.15938E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16464E-1	-7.98583E-1	-9.13165E0	-9.14185E0	5.17368E-3	9.35316E-2	2.72835E1	-3.26536E1	-3.25996E1	2.67962E1	2.15894E-9	2.52099E-3	2.52099E-3	6.28552E-3	2.17822E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16059E-1	-7.98249E-1	-9.1315E0	-9.1419E0	5.17368E-3	9.33409E-2	2.73099E1	-3.26248E1	-3.24824E1	2.6807E1	2.15613E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.17444E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16679E-1	-7.97963E-1	-9.13186E0	-9.14171E0	4.79221E-3	9.33647E-2	2.729E1	-3.26573E1	-3.26793E1	2.68036E1	2.15332E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.17066E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16822E-1	-7.9813E-1	-9.13165E0	-9.1419E0	5.05447E-3	9.3317E-2	2.73195E1	-3.26867E1	-3.26086E1	2.6774E1	2.15455E-9	2.52553E-3	2.52553E-3	6.33388E-3	2.18194E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.16822E-1	-7.98178E-1	-9.13146E0	-9.14197E0	5.05447E-3	9.31501E-2	2.72998E1	-3.26195E1	-3.26885E1	2.68099E1	2.15505E-9	2.52473E-3	2.52473E-3	6.32978E-3	2.17722E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16345E-1	-7.98035E-1	-9.13131E0	-9.14195E0	5.10216E-3	9.32932E-2	2.72833E1	-3.26726E1	-3.26714E1	2.68124E1	2.15907E-9	2.51814E-3	2.51814E-3	6.33388E-3	2.18377E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16369E-1	-7.98345E-1	-9.13131E0	-9.1418E0	5.38826E-3	9.34362E-2	2.72937E1	-3.26933E1	-3.25707E1	2.68172E1	2.15519E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.17255E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16441E-1	-7.98273E-1	-9.13141E0	-9.14216E0	5.34058E-3	9.33886E-2	2.73369E1	-3.26831E1	-3.26356E1	2.67926E1	2.15613E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17255E-2
