[Scan]
initial_time=2016-01-28T16:50:59
final_time=2016-01-28T16:51:18
ip_count=19
run=1026
dataset=2
scan=155
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08782E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.3768E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.03685E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=3.41713E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=-4.95791E-11
mult1=-9.61758E-9
mult2=-2.80753E-9
rf_tmon=-5.34124E-3
rf_agc=3.26189E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.69818E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62072E0
bslens_imon=2.4665E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2012E1
lens5a_imon=1.96507E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04963E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53729E1
cs_ef1b_imon=3.11544E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02068E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=1.26197E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38274E0
lens1_imon=2.58865E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64556E1
os_ef1alow_imon=2.96637E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04034E1
cs_ea2_imon=1.41236E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84459E1
cs_ef1a_imon=3.01424E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.2746E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11798E1
os_restr1_imon=4.29986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15586E1
os_ea1_imon=2.40975E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63434E1
os_ef1bup_imon=3.07769E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24637E0
cs_ionrep_imon=9.70737E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93386E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01951E1
cs_anode1_imon=2.06024E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.24471E-8
tplens_vset=1.4E-1
tplens_vmon=1.61344E0
tplens_imon=-1.36699E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24998E1
iondef3_imon=1.50283E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26785E1
iondef2_imon=1.57764E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98434E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.97581E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28645E0
ionrepsh_imon=9.39819E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33709E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.12751E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48812E0
os_ea2_imon=-6.93982E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00451E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7081E1
cs_ef2a_imon=3.17538E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05715E0
os_ef2alow_imon=-2.62282E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04992E-1
os_ef2bup_imon=-5.38634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.40775E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.30348E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01938E1
cs_anode2_imon=2.09411E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73151E1
iondef1_imon=1.09212E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68292E1
iondef4_imon=1.10002E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.41824E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.87707E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13403E0
cs_ionaccel_imon=-1.11261E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47339E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56366E1
einzel_imon=7.49323E-6
window_vset=0.0E0
window_vmon=1.80894E-1
window_imon=-1.20603E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39259E-4
mask2_vset=0.0E0
mask2_vmon=-1.86694E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.77596E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.54307E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=6.97821E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49055E0
defgridb_imon=6.00869E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.45177E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0742E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62677E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30592E1
cs_fil1_imon=9.24055E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31403E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6514E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42649E-2
os_fil2_imon=-2.74958E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90819E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.8422E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31749E-1
cs_fil2_imon=-2.28251E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.96192E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21919E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.17255E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.16669E-1
res40_imon=-2.6306E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16393E-1	-7.98321E-1	-9.13184E0	-9.14195E0	5.31673E-3	9.34839E-2	2.73128E1	-3.26844E1	-3.25399E1	2.67962E1	2.15872E-9	2.52454E-3	2.52454E-3	6.31321E-3	2.18513E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16298E-1	-7.98106E-1	-9.1315E0	-9.14178E0	5.17368E-3	9.377E-2	2.72808E1	-3.2656E1	-3.25199E1	2.68118E1	2.15613E-9	2.52757E-3	2.52757E-3	6.32936E-3	2.18201E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16154E-1	-7.98273E-1	-9.13157E0	-9.14173E0	5.14984E-3	9.34839E-2	2.72626E1	-3.26655E1	-3.27269E1	2.68124E1	2.16078E-9	2.52139E-3	2.52139E-3	6.30182E-3	2.17722E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16202E-1	-7.98321E-1	-9.13148E0	-9.14183E0	5.126E-3	9.32932E-2	2.7308E1	-3.2682E1	-3.27316E1	2.67974E1	2.15619E-9	2.52297E-3	2.52297E-3	6.32916E-3	2.17028E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16202E-1	-7.98535E-1	-9.13131E0	-9.14209E0	4.79221E-3	9.33886E-2	2.72831E1	-3.26823E1	-3.25776E1	2.68118E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.16464E-1	-7.98821E-1	-9.13129E0	-9.14195E0	4.88758E-3	9.34362E-2	2.7308E1	-3.26207E1	-3.27334E1	2.68298E1	2.158E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.17633E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16345E-1	-7.98512E-1	-9.1316E0	-9.14164E0	5.03063E-3	9.34124E-2	2.72889E1	-3.26699E1	-3.25125E1	2.6804E1	2.15706E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.17633E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16345E-1	-7.98559E-1	-9.13126E0	-9.14192E0	5.03063E-3	9.35316E-2	2.72727E1	-3.26314E1	-3.27191E1	2.68388E1	2.15987E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.17255E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16107E-1	-7.98368E-1	-9.13112E0	-9.14204E0	5.00679E-3	9.34839E-2	2.72604E1	-3.26823E1	-3.26291E1	2.68004E1	2.158E-9	2.52428E-3	2.52428E-3	6.29098E-3	2.1575E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.1625E-1	-7.98321E-1	-9.13131E0	-9.14176E0	4.8399E-3	9.32932E-2	2.7324E1	-3.26419E1	-3.24573E1	2.6796E1	2.15519E-9	2.51826E-3	2.51826E-3	6.32386E-3	2.16407E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16226E-1	-7.98178E-1	-9.13136E0	-9.14161E0	5.00679E-3	9.34839E-2	2.73015E1	-3.262E1	-3.25635E1	2.67976E1					
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16107E-1	-7.98345E-1	-9.1316E0	-9.14171E0	5.07832E-3	9.32932E-2	2.73118E1	-3.26548E1	-3.26346E1	2.67872E1	2.15519E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.18011E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.16107E-1	-7.98607E-1	-9.13148E0	-9.14202E0	4.86374E-3	9.31263E-2	2.72827E1	-3.26496E1	-3.26803E1	2.67776E1	2.15706E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.17255E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.16178E-1	-7.9844E-1	-9.13129E0	-9.14187E0	5.00679E-3	9.33409E-2	2.73357E1	-3.26819E1	-3.25635E1	2.68058E1	2.15706E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17633E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16417E-1	-7.9844E-1	-9.13107E0	-9.14171E0	4.93526E-3	9.34601E-2	2.73021E1	-3.26609E1	-3.25779E1	2.6774E1	2.15706E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.17444E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.16226E-1	-7.98631E-1	-9.13126E0	-9.14214E0	5.00679E-3	9.36747E-2	2.73045E1	-3.26795E1	-3.27438E1	2.67758E1	2.15716E-9	2.52599E-3	2.52599E-3	6.3074E-3	2.17361E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16631E-1	-7.98559E-1	-9.13112E0	-9.14218E0	5.10216E-3	9.36747E-2	2.73169E1	-3.26632E1	-3.27847E1	2.68154E1	2.15706E-9	2.50898E-3	2.50898E-3	6.31837E-3	2.17822E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16488E-1	-7.98631E-1	-9.13124E0	-9.1419E0	5.19753E-3	9.32455E-2	2.72992E1	-3.2652E1	-3.27564E1	2.68192E1	2.15613E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.18011E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.16369E-1	-7.98535E-1	-9.13143E0	-9.14209E0	5.03063E-3	9.35793E-2	2.72967E1	-3.26554E1	-3.25395E1	2.67589E1	2.15636E-9	2.52342E-3	2.52342E-3	6.33919E-3	2.17646E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16631E-1	-7.98512E-1	-9.13141E0	-9.14218E0	5.03063E-3	9.33886E-2	2.73151E1	-3.26785E1	-3.24998E1	2.68292E1	2.15894E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.17255E-2
