[Scan]
initial_time=2016-01-28T16:52:19
final_time=2016-01-28T16:52:38
ip_count=19
run=1026
dataset=2
scan=158
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=1.37588E-8
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=2.01831E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=3.57986E-10
ql4_vset=
ql4_vmon=-9.14233E0
ql4_imon=-5.43952E-11
mult1=-9.6294E-9
mult2=-2.79185E-9
rf_tmon=-5.49461E-3
rf_agc=3.33327E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.71118E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66133E0
bslens_imon=2.73602E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19484E1
lens5a_imon=1.98632E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.04963E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.10379E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05078E1
cs_ea1_imon=1.25018E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39539E0
lens1_imon=2.65672E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64933E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03756E1
cs_ea2_imon=1.38357E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=3.00216E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.27099E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=4.30139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15444E1
os_ea1_imon=2.3962E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22085E0
cs_ionrep_imon=9.64672E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.05648E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.23521E-8
tplens_vset=1.4E-1
tplens_vmon=1.6186E0
tplens_imon=-3.49815E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24927E1
iondef3_imon=1.47081E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26614E1
iondef2_imon=1.57896E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98205E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.89415E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23347E0
ionrepsh_imon=9.44845E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33513E1
lens5b_imon=2.1817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45458E0
os_ea2_imon=-6.23792E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70975E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10038E-1
os_ef2bup_imon=-5.42699E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.40112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.28811E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72815E1
iondef1_imon=1.09012E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67788E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.41134E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.83062E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-1.02655E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56027E1
einzel_imon=7.60495E-6
window_vset=0.0E0
window_vmon=1.9692E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39012E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.4513E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.66903E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.23861E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.20399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3318E1
os_fil1_imon=9.41573E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06891E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62404E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30401E1
cs_fil1_imon=9.22442E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30223E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64791E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.983E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.77932E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21673E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.17633E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.49681E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.16393E-1	-7.98035E-1	-9.13138E0	-9.1418E0	5.43594E-3	9.35793E-2	2.72992E1	-3.26331E1	-3.26178E1	2.68166E1	2.16081E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.17633E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16154E-1	-7.98273E-1	-9.13141E0	-9.14204E0	5.26905E-3	9.34839E-2	2.72978E1	-3.26897E1	-3.26621E1	2.68118E1	2.15533E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.18477E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16107E-1	-7.97915E-1	-9.1315E0	-9.14173E0	5.05447E-3	9.37939E-2	2.72951E1	-3.26644E1	-3.26856E1	2.67896E1	2.15982E-9	2.5225E-3	2.5225E-3	6.32418E-3	2.17529E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16226E-1	-7.98225E-1	-9.13124E0	-9.14192E0	5.10216E-3	9.35793E-2	2.72837E1	-3.26566E1	-3.26107E1	2.67854E1	2.15808E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.17918E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.16083E-1	-7.98345E-1	-9.13141E0	-9.14204E0	5.07832E-3	9.38177E-2	2.72756E1	-3.26503E1	-3.26585E1	2.6798E1	2.15696E-9	2.52139E-3	2.52139E-3	6.34099E-3	2.17722E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.16083E-1	-7.9813E-1	-9.13157E0	-9.14173E0	5.31673E-3	9.33647E-2	2.73259E1	-3.26982E1	-3.26578E1	2.68088E1	2.159E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.17732E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16131E-1	-7.97868E-1	-9.13148E0	-9.14176E0	5.38826E-3	9.33886E-2	2.72919E1	-3.26344E1	-3.26068E1	2.68244E1	2.15613E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.1858E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16226E-1	-7.98011E-1	-9.13169E0	-9.14178E0	5.26905E-3	9.33647E-2	2.73124E1	-3.26551E1	-3.26618E1	2.67914E1	2.15987E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.18201E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.16178E-1	-7.98059E-1	-9.13174E0	-9.14168E0	4.88758E-3	9.35078E-2	2.72798E1	-3.2661E1	-3.25183E1	2.68101E1	2.15658E-9	2.51549E-3	2.51549E-3	6.32273E-3	2.17483E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16154E-1	-7.98202E-1	-9.1315E0	-9.14176E0	5.10216E-3	9.3317E-2	2.73352E1	-3.26909E1	-3.26337E1	2.67956E1	2.15864E-9	2.51911E-3	2.51911E-3	6.31332E-3	2.18831E-2
1.4E1	0.0E0	1.0E0	5.66E2	3.82E2	-2.09588E0	-8.16202E-1	-7.98178E-1	-9.13117E0	-9.14185E0	5.14984E-3	9.32932E-2	2.72907E1	-3.26693E1	-3.25828E1	2.68117E1	2.15533E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.18663E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09657E0	-8.16107E-1	-7.98011E-1	-9.13155E0	-9.1419E0	5.10216E-3	9.32693E-2	2.73111E1	-3.26867E1	-3.27269E1	2.67932E1	2.15519E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.1858E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.1594E-1	-7.98249E-1	-9.13124E0	-9.14187E0	4.93526E-3	9.35793E-2	2.72827E1	-3.26543E1	-3.25694E1	2.68244E1	2.15332E-9	2.51225E-3	2.51225E-3	6.31837E-3	2.17633E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.16131E-1	-7.98154E-1	-9.13143E0	-9.14173E0	5.07832E-3	9.34601E-2	2.72949E1	-3.26579E1	-3.26765E1	2.68268E1	2.158E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.17822E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16274E-1	-7.9813E-1	-9.13134E0	-9.1418E0	5.126E-3	9.36031E-2	2.72811E1	-3.26825E1	-3.26506E1	2.6816E1	2.15716E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.17176E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16035E-1	-7.98154E-1	-9.13143E0	-9.14152E0	4.79221E-3	9.35078E-2	2.73051E1	-3.26969E1	-3.27089E1	2.6834E1	2.15613E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.17822E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.16154E-1	-7.97939E-1	-9.13105E0	-9.14197E0	5.126E-3	9.32217E-2	2.73411E1	-3.26455E1	-3.2531E1	2.67955E1	2.15519E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.1839E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09627E0	-8.16274E-1	-7.98035E-1	-9.13141E0	-9.14195E0	5.29289E-3	9.35078E-2	2.72957E1	-3.26526E1	-3.26997E1	2.67956E1	2.15716E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.18663E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.16178E-1	-7.98178E-1	-9.13146E0	-9.14185E0	5.26905E-3	9.36508E-2	2.72829E1	-3.26633E1	-3.25227E1	2.68088E1	2.15624E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.17547E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.16226E-1	-7.98273E-1	-9.13134E0	-9.14233E0	5.22137E-3	9.3627E-2	2.72815E1	-3.26614E1	-3.24927E1	2.67788E1	2.15894E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.17633E-2
