[Scan]
initial_time=2016-01-28T17:42:41
final_time=2016-01-28T17:43:01
ip_count=19
run=1026
dataset=3
scan=166
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.7789E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-6.98292E-10
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=1.40654E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.88266E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.61051E-8
mult1=-1.13317E-8
mult2=-2.63703E-9
rf_tmon=-5.31174E-3
rf_agc=3.32737E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.44262E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69435E0
bslens_imon=2.64201E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19928E1
lens5a_imon=1.95937E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05065E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53639E1
cs_ef1b_imon=3.09793E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02327E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05033E1
cs_ea1_imon=1.23287E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06899E0
lens1_imon=1.10803E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64569E1
os_ef1alow_imon=2.9831E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0371E1
cs_ea2_imon=1.44466E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84044E1
cs_ef1a_imon=3.00373E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.25901E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11662E1
os_restr1_imon=4.30142E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15384E1
os_ea1_imon=2.40087E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63616E1
os_ef1bup_imon=3.07379E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22939E0
cs_ionrep_imon=9.50988E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91854E2
cs_nozzle_imon=1.93307E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01848E1
cs_anode1_imon=2.05051E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.94661E-8
tplens_vset=1.4E-1
tplens_vmon=1.62067E0
tplens_imon=-2.50751E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2554E1
iondef3_imon=1.49061E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26602E1
iondef2_imon=1.58171E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98424E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.59845E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28389E0
ionrepsh_imon=9.15169E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33379E1
lens5b_imon=2.17389E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7454E1
cs_ef2b_imon=3.10882E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45585E0
os_ea2_imon=-7.91927E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00673E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7083E1
cs_ef2a_imon=3.18434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02991E0
os_ef2alow_imon=-2.7318E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79692E-1
os_ef2bup_imon=-5.34352E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10838E1
os_restr2_imon=3.38596E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.27164E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01912E1
cs_anode2_imon=2.098E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72791E1
iondef1_imon=1.10361E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.07511E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.37265E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.79879E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11846E0
cs_ionaccel_imon=-9.80275E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47125E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56301E1
einzel_imon=7.59442E-6
window_vset=0.0E0
window_vmon=1.96464E-1
window_imon=-1.19435E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39139E-4
mask2_vset=0.0E0
mask2_vmon=-1.86214E1
mask2_imon=-7.35061E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.31013E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.37184E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.11547E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26057E0
defgridb_imon=6.00197E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.41512E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0705E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6256E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=9.25554E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30495E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6473E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.27491E-2
os_fil2_imon=-2.78202E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86926E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.95438E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.46415E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.02679E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22269E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.54294E-1
res40_imon=-2.50605E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.6E2	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80014E1	-5.96046E-4	-8.80003E1	2.38419E-4	5.38826E-3	9.38416E-2	2.73175E1	-3.27009E1	-3.26301E1	2.6803E1	1.20337E-7	2.5199E-3	2.5199E-3	6.32483E-3	3.02025E-1
2.0E0	9.518E3	5.0E0	3.16E2	1.6E2	-7.14689E-2	-8.8001E1	-4.29153E-4	-8.80004E1	1.90735E-4	4.91142E-3	9.38892E-2	2.73039E1	-3.26697E1	-3.25817E1	2.68088E1	1.19809E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01871E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80013E1	-4.05312E-4	-8.80007E1	-1.19209E-4	4.79221E-3	9.38892E-2	2.73033E1	-3.2675E1	-3.26278E1	2.67944E1	1.20244E-7	2.52027E-3	2.52027E-3	6.32418E-3	2.99879E-1
4.0E0	2.201E3	3.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80009E1	-4.76837E-4	-8.80007E1	-9.53674E-5	4.673E-3	9.35078E-2	2.73027E1	-3.26726E1	-3.2629E1	2.68377E1	1.20414E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80012E1	-4.05312E-4	-8.80001E1	2.14577E-4	4.673E-3	9.3627E-2	2.72871E1	-3.26609E1	-3.26128E1	2.6801E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80011E1	-4.05312E-4	-8.80001E1	3.57628E-4	5.07832E-3	9.36031E-2	2.73231E1	-3.26573E1	-3.26212E1	2.68136E1	1.19965E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.03185E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80011E1	-3.33786E-4	-8.80002E1	4.52995E-4	4.81606E-3	9.35555E-2	2.72847E1	-3.26567E1	-3.26272E1	2.68256E1	1.19991E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80011E1	1.19209E-4	-8.80001E1	5.72205E-4	4.76837E-3	9.39846E-2	2.72754E1	-3.26657E1	-3.25773E1	2.68043E1					
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80009E1	-5.24521E-4	-8.80004E1	3.8147E-4	4.74453E-3	9.34839E-2	2.73115E1	-3.2682E1	-3.26674E1	2.68199E1	1.19919E-7	2.51142E-3	2.51142E-3	6.32784E-3	3.01365E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80008E1	-4.05312E-4	-8.80003E1	3.8147E-4	4.62532E-3	9.33409E-2	2.728E1	-3.26609E1	-3.25728E1	2.67992E1	1.20171E-7	2.52106E-3	2.52106E-3	6.33065E-3	3.02303E-1
1.4E1	3.0E2	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.8001E1	-1.00136E-3	-8.80001E1	-7.15256E-5	4.72069E-3	9.33647E-2	2.73063E1	-3.26915E1	-3.25977E1	2.68148E1	1.20084E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.01742E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80008E1	-6.67572E-4	-8.80004E1	1.19209E-4	4.45843E-3	9.35555E-2	2.72886E1	-3.26805E1	-3.27074E1	2.68112E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.6E1	2.9E1	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80008E1	-6.4373E-4	-8.80005E1	1.19209E-4	4.33922E-3	9.33409E-2	2.72673E1	-3.27652E1	-3.25393E1	2.68076E1	1.2033E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.03449E-1
1.7E1	5.1E1	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80008E1	-4.05312E-4	-8.80004E1	2.38419E-5	4.41074E-3	9.32932E-2	2.72915E1	-3.26933E1	-3.26862E1	2.67978E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99686E-1
1.8E1	2.26E2	0.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80009E1	-4.05312E-4	-8.80001E1	2.38419E-5	4.50611E-3	9.3317E-2	2.73228E1	-3.26823E1	-3.26578E1	2.67914E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
1.9E1	3.46E2	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80012E1	-5.72205E-4	-8.80003E1	3.57628E-4	4.673E-3	9.32932E-2	2.72998E1	-3.26703E1	-3.2662E1	2.67943E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9926E-1
2.0E1	2.423E3	2.0E0	8.08E2	5.58E2	-7.34782E-2	-8.8001E1	-5.96046E-4	-8.80003E1	7.15256E-5	4.8399E-3	9.34362E-2	2.72757E1	-3.26374E1	-3.25719E1	2.67866E1	1.19851E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00453E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80011E1	-4.52995E-4	-8.80003E1	-2.38419E-5	4.69685E-3	9.40323E-2	2.7321E1	-3.26644E1	-3.26272E1	2.67956E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01871E-1
2.2E1	1.62E2	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.8001E1	-5.24521E-4	-8.79999E1	0.0E0	4.33922E-3	9.34839E-2	2.73129E1	-3.26669E1	-3.27101E1	2.6789E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.8001E1	-2.38419E-4	-8.80004E1	9.53674E-5	4.57764E-3	9.34124E-2	2.72791E1	-3.26602E1	-3.2554E1	2.68094E1	1.2026E-7	2.52384E-3	2.52384E-3	6.33436E-3	2.98665E-1
