[Scan]
initial_time=2016-01-28T17:43:08
final_time=2016-01-28T17:43:27
ip_count=19
run=1026
dataset=3
scan=167
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.8023E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.86955E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.45035E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.92477E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.6106E-8
mult1=-9.69609E-9
mult2=-2.66701E-9
rf_tmon=-5.30517E-3
rf_agc=3.28448E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.70524E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.56449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19659E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12441E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=3.10235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05065E1
cs_ea1_imon=1.23085E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06369E0
lens1_imon=1.54514E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65113E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.38587E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84833E1
cs_ef1a_imon=3.0036E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.25804E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.29959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15158E1
os_ea1_imon=2.41761E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63876E1
os_ef1bup_imon=3.07172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26213E0
cs_ionrep_imon=9.74949E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93264E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=2.04855E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.95614E-8
tplens_vset=1.4E-1
tplens_vmon=1.62728E0
tplens_imon=-2.42257E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26162E1
iondef3_imon=1.50232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26701E1
iondef2_imon=1.57169E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98286E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.73899E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31581E0
ionrepsh_imon=9.35308E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.17906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74447E1
cs_ef2b_imon=3.11641E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46387E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70615E1
cs_ef2a_imon=3.18308E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04255E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.45222E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=3.39103E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.29645E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.08856E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73345E1
iondef1_imon=1.06485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.07981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.39907E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.77302E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10371E0
cs_ionaccel_imon=-9.47263E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.55449E-6
window_vset=0.0E0
window_vmon=1.66887E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.38926E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.48427E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.4897E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41737E0
defgridb_imon=5.91631E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33279E1
os_fil1_imon=9.40108E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07245E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62662E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.2622E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32566E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65263E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36988E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.88225E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05212E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22198E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.64698E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.19E2	0.0E0	1.47E2	4.1E1	-7.41738E-2	-8.80014E1	-8.82149E-4	-8.80004E1	1.66893E-4	4.93526E-3	9.39131E-2	2.73163E1	-3.26449E1	-3.259E1	2.68007E1	1.19851E-7	2.52276E-3	2.52276E-3	6.29128E-3	2.99686E-1
2.0E0	9.41E3	3.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80014E1	-6.91414E-4	-8.80004E1	3.57628E-4	5.05447E-3	9.3627E-2	2.72826E1	-3.26684E1	-3.26535E1	2.67857E1	1.1974E-7	2.51182E-3	2.51182E-3	6.32858E-3	3.01609E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80011E1	-8.10623E-4	-8.80004E1	4.29153E-4	4.98295E-3	9.35078E-2	2.72927E1	-3.26762E1	-3.25853E1	2.67842E1	1.20045E-7	2.51611E-3	2.51611E-3	6.31879E-3	3.02699E-1
4.0E0	2.219E3	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80011E1	-6.91414E-4	-8.80007E1	5.24521E-4	5.126E-3	9.34839E-2	2.73159E1	-3.26518E1	-3.2617E1	2.68046E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80013E1	-5.24521E-4	-8.80002E1	3.09944E-4	4.81606E-3	9.38416E-2	2.73087E1	-3.26536E1	-3.26398E1	2.67899E1	1.19809E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.02922E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.8001E1	-5.24521E-4	-8.80004E1	5.00679E-4	4.62532E-3	9.377E-2	2.73175E1	-3.26933E1	-3.26561E1	2.68165E1	1.20174E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80011E1	-5.96046E-4	-8.80005E1	3.57628E-4	4.76837E-3	9.36747E-2	2.7266E1	-3.27029E1	-3.26098E1	2.67944E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02511E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80011E1	-5.00679E-4	-8.80003E1	3.33786E-4	4.57764E-3	9.39369E-2	2.72968E1	-3.2672E1	-3.25564E1	2.68136E1	1.19705E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02922E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80014E1	-7.15256E-4	-8.80006E1	4.76837E-4	4.88758E-3	9.36985E-2	2.72841E1	-3.26693E1	-3.26729E1	2.68016E1	1.198E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.03027E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80013E1	-7.62939E-4	-8.80006E1	4.29153E-4	5.19753E-3	9.38892E-2	2.73315E1	-3.26585E1	-3.26146E1	2.68082E1	1.20084E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.0201E-1
1.4E1	3.16E2	0.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80013E1	-7.15256E-4	-8.80005E1	4.76837E-4	4.72069E-3	9.35793E-2	2.72979E1	-3.26987E1	-3.26026E1	2.6816E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00824E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80014E1	-8.58307E-4	-8.80005E1	5.24521E-4	4.95911E-3	9.37939E-2	2.72877E1	-3.26615E1	-3.26122E1	2.6813E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00453E-1
1.6E1	3.1E1	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80014E1	-1.14441E-3	-8.80006E1	4.29153E-4	4.79221E-3	9.36508E-2	2.73098E1	-3.2649E1	-3.26219E1	2.68175E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.7E1	6.2E1	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80013E1	-8.82149E-4	-8.80005E1	4.29153E-4	5.00679E-3	9.34601E-2	2.73363E1	-3.26675E1	-3.2623E1	2.68028E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00302E-1
1.8E1	2.15E2	1.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80013E1	-8.82149E-4	-8.80005E1	5.00679E-4	5.00679E-3	9.32217E-2	2.73309E1	-3.26663E1	-3.26633E1	2.67974E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
1.9E1	3.66E2	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80015E1	-9.53674E-4	-8.80004E1	1.66893E-4	4.72069E-3	9.3627E-2	2.73261E1	-3.2641E1	-3.26116E1	2.68064E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.0148E-1
2.0E1	2.374E3	1.0E0	8.08E2	5.58E2	-7.16233E-2	-8.80015E1	-1.09673E-3	-8.80004E1	9.53674E-5	4.98295E-3	9.3627E-2	2.72921E1	-3.26526E1	-3.2659E1	2.67998E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
2.1E1	9.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80016E1	-8.34465E-4	-8.80007E1	2.38419E-4	4.60148E-3	9.34124E-2	2.73267E1	-3.26723E1	-3.25912E1	2.67944E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02659E-1
2.2E1	1.57E2	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80014E1	-5.72205E-4	-8.80004E1	4.76837E-4	4.72069E-3	9.3627E-2	2.72815E1	-3.26543E1	-3.26443E1	2.67949E1	1.19902E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80012E1	-1.0252E-3	-8.80005E1	5.00679E-4	5.03063E-3	9.34124E-2	2.73345E1	-3.26701E1	-3.26162E1	2.67926E1	1.20106E-7	2.52061E-3	2.52061E-3	6.29665E-3	2.9841E-1
