[Scan]
initial_time=2016-01-28T17:43:34
final_time=2016-01-28T17:43:54
ip_count=19
run=1026
dataset=3
scan=168
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.78654E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-7.1038E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.38803E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-1.83454E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.60728E-8
mult1=-1.08861E-8
mult2=-2.72396E-9
rf_tmon=-4.15431E-3
rf_agc=3.35793E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.73862E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64691E0
bslens_imon=2.37913E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.99785E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53655E1
cs_ef1b_imon=3.10977E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=1.23973E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06599E0
lens1_imon=1.16787E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64303E1
os_ef1alow_imon=2.96456E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04129E1
cs_ea2_imon=1.42106E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.848E1
cs_ef1a_imon=3.00198E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.25076E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11148E1
os_restr1_imon=4.2928E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=2.39764E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6376E1
os_ef1bup_imon=3.08769E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26351E0
cs_ionrep_imon=9.7801E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91847E2
cs_nozzle_imon=1.93279E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01853E1
cs_anode1_imon=2.03827E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=3.94953E-8
tplens_vset=1.4E-1
tplens_vmon=1.65705E0
tplens_imon=-3.6784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26903E1
iondef3_imon=1.49388E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2667E1
iondef2_imon=1.58436E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.52764E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25931E0
ionrepsh_imon=9.27902E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74813E1
cs_ef2b_imon=3.13597E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42934E0
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00334E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70759E1
cs_ef2a_imon=3.16366E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05643E0
os_ef2alow_imon=-2.68659E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90147E-1
os_ef2bup_imon=-5.25774E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10849E1
os_restr2_imon=3.39084E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.10601E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72678E1
iondef1_imon=1.09301E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.08054E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.36493E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.78233E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.05857E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47129E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56149E1
einzel_imon=7.67661E-6
window_vset=0.0E0
window_vmon=1.96389E-1
window_imon=-1.16336E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39125E-4
mask2_vset=0.0E0
mask2_vmon=-1.86232E1
mask2_imon=-8.82669E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92545E3
multa_neg_imon=8.19753E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.16434E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.1593E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61209E0
defgridb_imon=6.10666E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3331E1
os_fil1_imon=9.41778E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07535E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62455E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30937E1
cs_fil1_imon=9.25666E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.37122E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65181E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1253E-2
os_fil2_imon=-2.57518E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76622E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.91726E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36106E-1
cs_fil2_imon=-2.66874E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.80473E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22259E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20363E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.36929E-1
res40_imon=-2.55934E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=248
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.22E2	1.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80014E1	-6.19888E-4	-8.80006E1	2.14577E-4	4.62532E-3	9.377E-2	2.72895E1	-3.26877E1	-3.26662E1	2.68051E1	1.1966E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.0041E-1
2.0E0	9.348E3	7.0E0	3.16E2	1.6E2	-7.22418E-2	-8.8001E1	-5.48363E-4	-8.80004E1	3.33786E-4	4.81606E-3	9.3627E-2	2.73003E1	-3.26843E1	-3.26212E1	2.68124E1	1.20116E-7	2.5199E-3	2.5199E-3	6.31902E-3	2.99811E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80011E1	-7.15256E-4	-8.80005E1	3.33786E-4	4.41074E-3	9.3317E-2	2.72903E1	-3.26708E1	-3.26077E1	2.68046E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.98222E-1
4.0E0	2.195E3	1.0E0	6.55E2	3.98E2	-7.37874E-2	-8.8001E1	-6.91414E-4	-8.80001E1	1.66893E-4	4.62532E-3	9.36031E-2	2.73728E1	-3.26835E1	-3.26317E1	2.68088E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.97647E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80009E1	-6.4373E-4	-8.80006E1	5.48363E-4	4.673E-3	9.33409E-2	2.73089E1	-3.26763E1	-3.26438E1	2.6816E1	1.20028E-7	2.51472E-3	2.51472E-3	6.30221E-3	2.99753E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.8001E1	-6.91414E-4	-8.80006E1	2.86102E-4	5.14984E-3	9.37462E-2	2.73175E1	-3.26673E1	-3.26178E1	2.68012E1	1.20005E-7	2.52106E-3	2.52106E-3	6.32483E-3	3.00087E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80013E1	-4.52995E-4	-8.80005E1	5.48363E-4	4.8399E-3	9.35793E-2	2.72378E1	-3.26963E1	-3.26146E1	2.68016E1	1.19697E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80013E1	-6.4373E-4	-8.80003E1	7.15256E-5	4.76837E-3	9.36031E-2	2.72455E1	-3.2639E1	-3.26644E1	2.68148E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9978E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80013E1	-4.76837E-4	-8.80003E1	2.38419E-4	4.673E-3	9.37462E-2	2.72861E1	-3.26701E1	-3.26315E1	2.68364E1	1.198E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.00453E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80013E1	-8.10623E-4	-8.80003E1	1.43051E-4	4.98295E-3	9.33886E-2	2.73269E1	-3.26531E1	-3.25558E1	2.67926E1	1.20084E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.00676E-1
1.4E1	3.23E2	1.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80013E1	-5.24521E-4	-8.80004E1	0.0E0	4.86374E-3	9.33409E-2	2.73157E1	-3.2662E1	-3.27092E1	2.68238E1	1.2026E-7	2.50882E-3	2.50882E-3	6.29665E-3	3.01738E-1
1.5E1	1.1E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80014E1	-4.29153E-4	-8.80003E1	4.52995E-4	4.64916E-3	9.33886E-2	2.73081E1	-3.26897E1	-3.25834E1	2.68394E1	1.20311E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.02511E-1
1.6E1	2.6E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80013E1	-7.15256E-4	-8.80004E1	3.09944E-4	4.72069E-3	9.3317E-2	2.7379E1	-3.26543E1	-3.26819E1	2.68304E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.02659E-1
1.7E1	5.3E1	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80012E1	-9.05991E-4	-8.80003E1	5.24521E-4	4.8399E-3	9.32693E-2	2.72691E1	-3.26708E1	-3.26467E1	2.68022E1	1.19705E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
1.8E1	2.19E2	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80014E1	-9.05991E-4	-8.80006E1	3.8147E-4	4.8399E-3	9.34362E-2	2.72985E1	-3.26549E1	-3.26074E1	2.68094E1	1.20209E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.01995E-1
1.9E1	3.7E2	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80014E1	-9.29832E-4	-8.80003E1	5.00679E-4	4.93526E-3	9.3627E-2	2.73381E1	-3.26632E1	-3.25611E1	2.68123E1	1.19757E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9952E-1
2.0E1	2.484E3	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80014E1	-9.77516E-4	-8.80004E1	4.76837E-4	4.79221E-3	9.35555E-2	2.72538E1	-3.26697E1	-3.26974E1	2.6819E1	1.20209E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.98665E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80015E1	-1.23978E-3	-8.80006E1	2.86102E-4	4.8399E-3	9.377E-2	2.73099E1	-3.26795E1	-3.265E1	2.68134E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99941E-1
2.2E1	1.67E2	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80014E1	-7.15256E-4	-8.80005E1	4.76837E-4	4.93526E-3	9.3627E-2	2.73097E1	-3.26585E1	-3.25571E1	2.68004E1	1.198E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80015E1	-8.82149E-4	-8.80008E1	2.14577E-4	4.88758E-3	9.36031E-2	2.72678E1	-3.2667E1	-3.26903E1	2.68208E1	1.20363E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
