[Scan]
initial_time=2016-01-28T17:44:01
final_time=2016-01-28T17:44:20
ip_count=19
run=1026
dataset=3
scan=169
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.77867E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.58321E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.39538E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.86189E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.60798E-8
mult1=-9.40478E-9
mult2=-2.80949E-9
rf_tmon=-4.53307E-3
rf_agc=3.33268E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.68414E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62889E0
bslens_imon=2.48007E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19448E1
lens5a_imon=1.98487E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04956E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53922E1
cs_ef1b_imon=3.10311E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02067E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05475E1
cs_ea1_imon=1.23865E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02694E0
lens1_imon=1.44545E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64678E1
os_ef1alow_imon=2.95958E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03744E1
cs_ea2_imon=1.39799E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84023E1
cs_ef1a_imon=2.98912E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.25058E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11303E1
os_restr1_imon=4.30346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15191E1
os_ea1_imon=2.41819E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63601E1
os_ef1bup_imon=3.07114E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24849E0
cs_ionrep_imon=9.69358E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93254E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01717E1
cs_anode1_imon=2.06088E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.94281E-8
tplens_vset=1.4E-1
tplens_vmon=1.63122E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.28042E1
iondef3_imon=1.48198E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26773E1
iondef2_imon=1.55913E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02897E2
lens6_imon=2.9818E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=8.51178E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31218E0
ionrepsh_imon=9.18529E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33471E1
lens5b_imon=2.17702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74768E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44016E0
os_ea2_imon=-8.07644E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06054E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70632E1
cs_ef2a_imon=3.18165E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04935E0
os_ef2alow_imon=-2.64756E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86226E-1
os_ef2bup_imon=-5.21925E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=3.39503E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.28414E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.10363E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73311E1
iondef1_imon=1.10527E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.08156E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.34665E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=7.76648E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13883E0
cs_ionaccel_imon=-1.16363E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47077E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.66699E-6
window_vset=0.0E0
window_vmon=1.7772E-1
window_imon=-1.14278E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86709E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.35397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.27248E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50211E3
multb_neg_imon=7.42246E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32036E0
defgridb_imon=5.93001E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3327E1
os_fil1_imon=9.4213E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07121E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62356E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=9.26266E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.36271E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64641E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1382E-2
os_fil2_imon=-2.61706E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.0526E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33273E-1
cs_fil2_imon=-2.56493E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.70384E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22209E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.20435E-7
chamber_cvt_pmon=2.52757E-3
foreline_cvt_pmon=2.52757E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.73107E-1
res40_imon=-2.41472E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.09E2	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80012E1	-6.4373E-4	-8.80005E1	5.24521E-4	5.10216E-3	9.3627E-2	2.72929E1	-3.26753E1	-3.26162E1	2.6801E1	1.20069E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.02659E-1
2.0E0	9.502E3	5.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80012E1	-7.39098E-4	-8.80002E1	7.39098E-4	5.126E-3	9.33886E-2	2.72824E1	-3.26695E1	-3.26921E1	2.67998E1	1.20042E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.00852E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.13915E-2	-8.80011E1	-3.57628E-4	-8.80002E1	3.57628E-4	4.93526E-3	9.35555E-2	2.72796E1	-3.267E1	-3.25669E1	2.68499E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.97762E-1
4.0E0	2.181E3	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.8001E1	-6.91414E-4	-8.80004E1	4.29153E-4	4.64916E-3	9.36747E-2	2.72967E1	-3.26428E1	-3.27324E1	2.68214E1	1.19841E-7	2.51287E-3	2.51287E-3	6.29157E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80009E1	-7.39098E-4	-8.80005E1	3.33786E-4	4.673E-3	9.34601E-2	2.73063E1	-3.26488E1	-3.27354E1	2.68184E1	1.19965E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.8001E1	-8.82149E-4	-8.80003E1	1.43051E-4	4.43459E-3	9.377E-2	2.72733E1	-3.265E1	-3.24992E1	2.67505E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80013E1	-5.72205E-4	-8.80003E1	3.57628E-4	5.05447E-3	9.37462E-2	2.72968E1	-3.26585E1	-3.2672E1	2.68004E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80011E1	-6.67572E-4	-8.80004E1	2.38419E-4	4.72069E-3	9.33886E-2	2.73249E1	-3.26609E1	-3.26152E1	2.68118E1	1.20055E-7	2.52276E-3	2.52276E-3	6.34518E-3	2.98665E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80009E1	-5.24521E-4	-8.80004E1	3.09944E-4	4.74453E-3	9.35316E-2	2.72955E1	-3.26518E1	-3.25203E1	2.68088E1	1.19653E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01347E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.8001E1	-4.76837E-4	-8.80003E1	4.52995E-4	4.45843E-3	9.36985E-2	2.73147E1	-3.2653E1	-3.26933E1	2.68136E1	1.19861E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.9952E-1
1.4E1	2.98E2	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80009E1	-3.09944E-4	-8.80003E1	1.90735E-4	4.76837E-3	9.36031E-2	2.73293E1	-3.26874E1	-3.25411E1	2.67989E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.03712E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80013E1	-3.09944E-4	-8.80006E1	3.33786E-4	4.57764E-3	9.36031E-2	2.73057E1	-3.26673E1	-3.27051E1	2.68214E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.02253E-1
1.6E1	3.3E1	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.8001E1	-6.67572E-4	-8.80006E1	2.14577E-4	4.8399E-3	9.3627E-2	2.72721E1	-3.26693E1	-3.25185E1	2.68112E1	1.19902E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.99686E-1
1.7E1	5.0E1	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.8001E1	-1.00136E-3	-8.80002E1	2.14577E-4	4.69685E-3	9.37223E-2	2.72947E1	-3.25874E1	-3.27166E1	2.68028E1	1.19965E-7	2.51116E-3	2.51116E-3	6.28552E-3	2.9952E-1
1.8E1	1.79E2	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80012E1	-7.39098E-4	-8.80005E1	-7.15256E-5	4.72069E-3	9.34124E-2	2.72799E1	-3.26645E1	-3.26837E1	2.68611E1	1.19872E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.0041E-1
1.9E1	3.57E2	0.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80012E1	-5.72205E-4	-8.80004E1	3.33786E-4	4.64916E-3	9.31263E-2	2.73099E1	-3.26675E1	-3.26044E1	2.67884E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.98481E-1
2.0E1	2.364E3	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80012E1	-5.96046E-4	-8.80004E1	2.86102E-4	4.673E-3	9.34601E-2	2.73736E1	-3.26951E1	-3.26813E1	2.67968E1	1.20122E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.98222E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80013E1	-4.05312E-4	-8.80003E1	2.86102E-4	4.36306E-3	9.33886E-2	2.72773E1	-3.26596E1	-3.25038E1	2.67995E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9952E-1
2.2E1	1.69E2	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80009E1	-4.52995E-4	-8.80007E1	1.43051E-4	4.55379E-3	9.32217E-2	2.72979E1	-3.26398E1	-3.27342E1	2.6819E1	1.20192E-7	2.51498E-3	2.51498E-3	6.33388E-3	3.02115E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80013E1	-4.52995E-4	-8.80007E1	-9.53674E-5	4.88758E-3	9.31978E-2	2.73311E1	-3.26773E1	-3.28042E1	2.6813E1	1.20435E-7	2.52757E-3	2.52757E-3	6.32936E-3	3.01085E-1
